CN100388457C - 真空机械手 - Google Patents
真空机械手 Download PDFInfo
- Publication number
- CN100388457C CN100388457C CNB2005101264046A CN200510126404A CN100388457C CN 100388457 C CN100388457 C CN 100388457C CN B2005101264046 A CNB2005101264046 A CN B2005101264046A CN 200510126404 A CN200510126404 A CN 200510126404A CN 100388457 C CN100388457 C CN 100388457C
- Authority
- CN
- China
- Prior art keywords
- arm
- vacuum mechanical
- vacuum
- wafer
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101264046A CN100388457C (zh) | 2005-12-08 | 2005-12-08 | 真空机械手 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005101264046A CN100388457C (zh) | 2005-12-08 | 2005-12-08 | 真空机械手 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1851892A CN1851892A (zh) | 2006-10-25 |
CN100388457C true CN100388457C (zh) | 2008-05-14 |
Family
ID=37133366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101264046A Active CN100388457C (zh) | 2005-12-08 | 2005-12-08 | 真空机械手 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100388457C (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100919215B1 (ko) * | 2007-09-06 | 2009-09-28 | 세메스 주식회사 | 엔드 이펙터 및 이를 갖는 로봇 암 장치 |
JP5480562B2 (ja) * | 2009-08-26 | 2014-04-23 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP2011119556A (ja) * | 2009-12-07 | 2011-06-16 | Yaskawa Electric Corp | 水平多関節ロボットおよびそれを備えた搬送装置 |
CN102560406B (zh) * | 2010-12-24 | 2013-10-30 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pvd设备及采用该pvd设备进行晶片处理的方法 |
CN103227084B (zh) * | 2013-04-10 | 2016-01-06 | 天通吉成机器技术有限公司 | 一种等离子体刻蚀机的传片系统 |
CN105088144B (zh) * | 2015-08-07 | 2019-01-25 | 京东方科技集团股份有限公司 | 一种更换坩埚装置 |
CN110744733B (zh) * | 2019-09-25 | 2021-12-03 | 智科博芯(北京)科技有限公司 | 一种基于输送优化的plc内置八度角芯片的晶圆划片机 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759268A (en) * | 1995-11-07 | 1998-06-02 | Sputtered Films, Inc. | System for providing a controlled deposition on wafers |
US6126381A (en) * | 1997-04-01 | 2000-10-03 | Kensington Laboratories, Inc. | Unitary specimen prealigner and continuously rotatable four link robot arm mechanism |
JP2001035837A (ja) * | 1999-07-19 | 2001-02-09 | Matsushita Electric Ind Co Ltd | ドライエッチ処理装置と、基板の処理方法 |
JP2003022417A (ja) * | 2001-07-10 | 2003-01-24 | Sharp Corp | 文字列認識装置 |
CN1454751A (zh) * | 2002-04-25 | 2003-11-12 | 帝人制机株式会社 | 机器人臂机构和机器人装置 |
WO2005048313A2 (en) * | 2003-11-10 | 2005-05-26 | Blueshift Technologies, Inc. | Methods and systems for handling workpieces in a vacuum-based semiconductor handling system |
-
2005
- 2005-12-08 CN CNB2005101264046A patent/CN100388457C/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759268A (en) * | 1995-11-07 | 1998-06-02 | Sputtered Films, Inc. | System for providing a controlled deposition on wafers |
US6126381A (en) * | 1997-04-01 | 2000-10-03 | Kensington Laboratories, Inc. | Unitary specimen prealigner and continuously rotatable four link robot arm mechanism |
JP2001035837A (ja) * | 1999-07-19 | 2001-02-09 | Matsushita Electric Ind Co Ltd | ドライエッチ処理装置と、基板の処理方法 |
JP2003022417A (ja) * | 2001-07-10 | 2003-01-24 | Sharp Corp | 文字列認識装置 |
CN1454751A (zh) * | 2002-04-25 | 2003-11-12 | 帝人制机株式会社 | 机器人臂机构和机器人装置 |
WO2005048313A2 (en) * | 2003-11-10 | 2005-05-26 | Blueshift Technologies, Inc. | Methods and systems for handling workpieces in a vacuum-based semiconductor handling system |
Also Published As
Publication number | Publication date |
---|---|
CN1851892A (zh) | 2006-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100388457C (zh) | 真空机械手 | |
EP3163603B1 (en) | Method of operating a robot having an end effector | |
KR102157427B1 (ko) | 기판 반송 로봇 및 기판 처리 시스템 | |
JP4980978B2 (ja) | 基板処理装置 | |
US20080199283A1 (en) | Substrate processing apparatus | |
US20130149076A1 (en) | Fully-independent robot systems, apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing | |
US20130272823A1 (en) | Robot systems, apparatus, and methods having independently rotatable waists | |
KR101539568B1 (ko) | 복수의 웨이퍼 핸들링 능력이 있는 이송 기구 | |
CN106558526B (zh) | 一种自带晶圆寻边传感器的机械手 | |
KR100814140B1 (ko) | 웨이퍼 이송용 신속 교환 스테이션 | |
JP2009065165A (ja) | エンドエフェクタ及びこれを有する基板移送ロボット | |
JP2010045214A (ja) | 基板搬送装置およびこれを備えた基板処理装置 | |
KR100281454B1 (ko) | 로드로크용 로드암 | |
JPH11288988A (ja) | アライメント高速処理機構 | |
JP2001009765A (ja) | 昇降ユニット及びロボット装置 | |
CN213278047U (zh) | 一种单晶圆搬运装置 | |
US7984543B2 (en) | Methods for moving a substrate carrier | |
JP5524304B2 (ja) | 基板処理装置における基板搬送方法 | |
JP4056283B2 (ja) | 被移送体移送装置及びその移送方法 | |
JP5279554B2 (ja) | 基板処理装置 | |
KR101368898B1 (ko) | 웨이퍼이송로봇, 이를 이용하는 웨이퍼처리시스템 및웨이퍼이송방법 | |
US6343905B1 (en) | Edge gripped substrate lift mechanism | |
CN215433709U (zh) | 一种新型晶圆搬运用机械手 | |
JP5283770B2 (ja) | 基板搬送装置およびこれを備えた基板処理装置 | |
JP5330031B2 (ja) | 基板処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: BEIFANG MICROELECTRONIC BASE EQUIPMENT PROCES RESE Free format text: FORMER OWNER: BEIJING YUANHE ELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20110311 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100016 NO. 1, JIUXIANQIAO EAST ROAD, CHAOYANG DISTRICT, BEIJING TO: 100015 NO. 1, JIUXIANQIAO EAST ROAD, CHAOYANG DISTRICT, BEIJING |
|
TR01 | Transfer of patent right |
Effective date of registration: 20110311 Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing Address before: 100016 Jiuxianqiao East Road, Beijing, No. 1, No. Patentee before: Beijing Yuanhe Electronic Technology Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100015 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |