CN100379890C - 蒸镀二氧化硅保护膜方法 - Google Patents
蒸镀二氧化硅保护膜方法 Download PDFInfo
- Publication number
- CN100379890C CN100379890C CNB2004100774259A CN200410077425A CN100379890C CN 100379890 C CN100379890 C CN 100379890C CN B2004100774259 A CNB2004100774259 A CN B2004100774259A CN 200410077425 A CN200410077425 A CN 200410077425A CN 100379890 C CN100379890 C CN 100379890C
- Authority
- CN
- China
- Prior art keywords
- sio
- substrate
- silicon dioxide
- protective film
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 47
- 230000001681 protective effect Effects 0.000 title claims abstract description 33
- 238000000576 coating method Methods 0.000 title claims abstract description 31
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 235000012239 silicon dioxide Nutrition 0.000 title claims abstract description 30
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000013049 sediment Substances 0.000 claims description 24
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 20
- 238000001704 evaporation Methods 0.000 claims description 20
- 230000008020 evaporation Effects 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 2
- 229910001882 dioxygen Inorganic materials 0.000 claims description 2
- 230000006378 damage Effects 0.000 abstract description 4
- 230000008021 deposition Effects 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 2
- 230000008016 vaporization Effects 0.000 abstract 6
- 238000009834 vaporization Methods 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 30
- 239000012528 membrane Substances 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100774259A CN100379890C (zh) | 2004-12-07 | 2004-12-07 | 蒸镀二氧化硅保护膜方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2004100774259A CN100379890C (zh) | 2004-12-07 | 2004-12-07 | 蒸镀二氧化硅保护膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1786256A CN1786256A (zh) | 2006-06-14 |
CN100379890C true CN100379890C (zh) | 2008-04-09 |
Family
ID=36783868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2004100774259A Expired - Fee Related CN100379890C (zh) | 2004-12-07 | 2004-12-07 | 蒸镀二氧化硅保护膜方法 |
Country Status (1)
Country | Link |
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CN (1) | CN100379890C (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102002674B (zh) * | 2010-11-30 | 2012-07-04 | 东莞星晖真空镀膜塑胶制品有限公司 | 一种透明塑胶制品的表面真空镀膜工艺 |
CN106756808B (zh) * | 2016-11-29 | 2019-04-02 | 深圳倍声声学技术有限公司 | 一种提高动铁部件抗腐蚀性能的方法 |
CN106604197B (zh) * | 2016-11-29 | 2019-10-11 | 深圳倍声声学技术有限公司 | 一种提高动铁受话器线圈抗腐蚀性能的方法 |
CN108973373A (zh) * | 2018-08-01 | 2018-12-11 | 苏州安洁科技股份有限公司 | 一种油墨层上镀膜后龟裂膜应力去除工艺 |
CN110204212A (zh) * | 2019-05-31 | 2019-09-06 | 东莞市银泰玻璃有限公司 | 一种蒙砂玻璃的加工方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1317150A (zh) * | 1998-07-07 | 2001-10-10 | 联合讯号公司 | 纳米多孔二氧化硅的蒸气沉积工艺 |
JP2003332042A (ja) * | 2002-05-16 | 2003-11-21 | Denso Corp | 有機電子デバイス素子 |
-
2004
- 2004-12-07 CN CNB2004100774259A patent/CN100379890C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1317150A (zh) * | 1998-07-07 | 2001-10-10 | 联合讯号公司 | 纳米多孔二氧化硅的蒸气沉积工艺 |
JP2003332042A (ja) * | 2002-05-16 | 2003-11-21 | Denso Corp | 有機電子デバイス素子 |
Also Published As
Publication number | Publication date |
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CN1786256A (zh) | 2006-06-14 |
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Owner name: SHENZHEN CITY FANGDA GUOKE OPTOELECTRONICS TECHNO Free format text: FORMER OWNER: FANGDA GROUP CO LTD Effective date: 20070810 |
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Effective date of registration: 20070810 Address after: 518055 Guangdong city of Shenzhen province Nanshan District Xili Town, Longjing Fangda Applicant after: Shenzhen Fangda Guoke Optical Electronic Technology Co., Ltd. Address before: 518055 Guangdong city of Shenzhen province Nanshan District Xili Town, Longjing Fangda industrial city Applicant before: Fangda Group Co., Ltd. |
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Owner name: SHENYANG FANGDA SEMICONDUCTOR LIGHTING CO., LTD. Effective date: 20110830 |
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Free format text: CORRECT: ADDRESS; FROM: 518055 SHENZHEN, GUANGDONG PROVINCE TO: 110168 SHENYANG, LIAONING PROVINCE |
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Effective date of registration: 20110830 Address after: 110168 Liaoning Shenyang Hunnan New District Wende Street No. 6 Patentee after: Shenzhen Fangda Guoke Optoelectronic Technology Co., Ltd. Address before: 518055 Guangdong city of Shenzhen province Nanshan District Xili Town, Longjing Fangda Patentee before: Shenzhen Fangda Guoke Optical Electronic Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080409 Termination date: 20191207 |
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