CN100378932C - Wafer contact window of soft sheet bearing device and joint pad open and driving hole process - Google Patents
Wafer contact window of soft sheet bearing device and joint pad open and driving hole process Download PDFInfo
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- CN100378932C CN100378932C CNB200410095556XA CN200410095556A CN100378932C CN 100378932 C CN100378932 C CN 100378932C CN B200410095556X A CNB200410095556X A CN B200410095556XA CN 200410095556 A CN200410095556 A CN 200410095556A CN 100378932 C CN100378932 C CN 100378932C
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- metal level
- driving hole
- open end
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
The present invention relates to a wafer contact window of a soft sheet bearing device and a process of a joint pad opening and a driving hole, which is suitable for the process technique of a tape automated bonding (TAB) packing body. The present invention comprises the following steps: firstly, a thin film is provided; successively, a plurality of openings are processed on the surface of the thin film by a laser, wherein the openings comprises at least a wafer contact window, at least a joint pad opening and a plurality of driving holes; then, a metal layer is formed on the thin film and the metal layer is decorated with patterns to form a plurality of pins extending on the wafer contact window and to form a plurality of joint pads correspondingly positioned on the joint pad opening; the pins and the joint pads are used as the desired bearing device supplying subsequent wafer packing.
Description
Technical field
The present invention relates to a kind of wafer contact window and joint pad open end and driving hole manufacturing process of carrier, but particularly relate to wafer contact window and the joint pad open end and the driving hole manufacturing process of the soft sheet type bearing device of a kind of bending (Flexible).
Background technology
Along with the progress of science and technology and the lasting lifting of quality of the life, the integration that adds the 3C industry with continue to grow up, (Integrated circuit, application IC) is more and more wider to make integrated circuit.For make the naked wafer of the integrated circuit of fragile structure (die) can be subjected to effective protection, and make simultaneously the naked wafer of integrated circuit can with the mutual transmitting signals in the external world, wafer package (package) technology just develop.The wafer package technology of having developed at present is numerous, with the wafer joining technique, common wafer joining technique is routing (Wire Bonding, W/B), cover crystalline substance (Flip Chip, F/C) and coil type engage (Tape Automa tic Bonding automatically, TAB) etc., wherein the automatic joining technique of coil type is that wafer is engaged on the soft sheet type bearing device, and the packaging body of encapsulation after finishing not only volume is little, in light weight, and, have more elasticity so can make packaging body load onto in subsequent group because but film itself has the characteristic of bending.
Seeing also shown in Figure 1A～1F, is wafer contact window and joint pad open end and the driving hole manufacturing process that has known a kind of soft sheet type bearing device now.See also Figure 1A, at first, provide film 110 and adhesion coating 120 earlier, wherein adhesion coating 120 is to be disposed on the film 110.See also Figure 1B, then, use the diel (not shown) that film 110 and adhesion coating 120 are carried out punching (Punch), and produce a wafer contact window 130, a plurality of predetermined joint pad open end 132 and a plurality of driving holes 134.Film 110 and adhesion coating 120 are to be disposed on the conveyer belt (not shown) by these driving holes 134, and drive film 110 by this conveyer belt and adhesion coating 120 advances.
See also Fig. 1 C, then, metal level 140 is disposed on the adhesion coating 120, and by the adherence of adhesion coating 120 metal level 140 is engaged on the film 110, wherein these predetermined joint pad open ends 132 are to expose local metal level 140.See also Fig. 1 D, afterwards, fill soft glue material (Flex Coat) 150 in these predetermined joint pad open ends 132, wherein these soft glue materials 150 are in order to increase the amounting to property of this soft sheet type bearing device.See also Fig. 1 E, then, etching and patterned metal layer 140, the metal level 140 that makes these predetermined joint pad open ends 132 be exposed can be used as a plurality of joint sheets 142.See also Fig. 1 F, then, form coat of metal 160 on exposed metal level 140, touch outside air and oxidation with the metal level 140 that prevents to expose.Afterwards, carry out the finished product detection step, good to guarantee film 110 with the outward appearance of the pattern of metal level 140, and finish the making of the wafer contact window 130 of existing known soft sheet type bearing device and joint pad open end 132 and driving hole 134.
It should be noted that, because existing known each batch soft sheet type bearing device, must design corresponding wafer contact window and joint pad open end and driving hole position with different connecting point position (all not shown in the figures) at the dimensions of different chips, and these wafer contact windows and joint pad open end and driving hole are to utilize diel film and adhesion coating are carried out punching and to form.Therefore, for the dimensions of different chips and different connecting point position designs, then must have and use the diel of different size especially made to order, yet, make the required consumed time of mould, cost is but considerably high, so, when producing various on a small quantity soft sheet type bearing device, will obviously increase the manufacturing cost of wafer contact window and the joint pad open end and the driving hole of soft sheet type bearing device significantly.
This shows that the wafer contact window of above-mentioned existing soft sheet type bearing device and joint pad open end and driving hole manufacturing process still have many defectives, and demand urgently further being improved.The problem that exists for the wafer contact window that solves soft sheet type bearing device and joint pad open end and driving hole manufacturing process, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, and this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that the wafer contact window of above-mentioned existing soft sheet type bearing device and joint pad open end and driving hole manufacturing process exist, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, actively studied innovation, in the hope of founding a kind of wafer contact window and joint pad open end and driving hole manufacturing process of novel soft sheet type bearing device, can improve wafer contact window and the joint pad open end and the driving hole manufacturing process of general existing soft sheet type bearing device, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the wafer contact window of existing soft sheet type bearing device and the defective of joint pad open end and the existence of driving hole manufacturing process, and provide a kind of wafer contact window and joint pad open end and driving hole manufacturing process of new soft sheet type bearing device, technical problem to be solved is to make it can save the manufacturing cost of wafer contact window and the joint pad open end and the driving hole of soft sheet type bearing device effectively, thereby be suitable for practicality more, and have the value on the industry.
Another object of the present invention is to, a kind of laser punching method is provided, technical problem to be solved is to make its manufacturing cost that can save wafer contact window and the joint pad open end and the driving hole of soft sheet type bearing device effectively, thereby is suitable for practicality more.
The object of the invention to solve the technical problems realizes by the following technical solutions.Wafer contact window and the joint pad open end and the driving hole manufacturing process of a kind of soft sheet type bearing device that proposes according to the present invention are applicable to the manufacturing process technology of the automatic bonding packaging body of winding, and it comprises the steps: to provide film at least; Go up most openings of formation by laser in a surface of this film, wherein should comprise at least one wafer contact window, at least one driving hole and at least one joint pad open end by a majority opening, wherein should a majority opening one of them is to be used to expose wafer at least, and as the wafer contact window of this wafer, and should a majority opening one of them is as driving hole at least; And form metal level on this film, and this metal level and this wafer be in the heteropleural of this film respectively, and should a majority opening one of them is the metal level that exposes the part at least, and as the opening of the joint sheet of being scheduled to of this metal level.
The object of the invention to solve the technical problems also can be applied to the following technical measures to achieve further.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, described therein providing after this film more comprises forming adhesion coating on this film, makes this metal level be engaged on this film by this adhesion coating.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, the described therein method that this metal level is disposed on this film comprises pressing manufacturing process.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, described therein this metal level of formation on this film after, more comprise this metal level of patterning, this metal level that wherein extends the part on this wafer contact window is a plurality of pins, and this metal level that this predetermined joint pad open end of this metal level exposes the part is a joint sheet.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, described therein this metal level of formation on this film after, more comprise and fill the soft glue material in the opening of this predetermined joint sheet.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, described therein providing after the film more comprises forming most pore-forming marks on this film.
The wafer contact window of aforesaid soft sheet type bearing device and joint pad open end and driving hole manufacturing process, described therein opening are to run through those pore-forming marks and this film by this laser and form.
The object of the invention to solve the technical problems also adopts following technical scheme to realize.A kind of laser punching method according to the present invention's proposition, be applicable to film holed technique, it comprises the steps: to go up most openings of formation by laser in a surface of this film at least, wherein should comprise at least one wafer contact window by a majority opening, at least one driving hole and at least one joint pad open end, wherein should a majority opening one of them is to be suitable for exposing wafer at least, and as this wafer wafer contact window, and should a majority opening one of them is to be used to expose local metal level at least, and as the predetermined joint pad open end of this metal level, and should a majority opening one of them is as driving hole at least.
Aforesaid laser punching method before described therein those openings of formation, more comprises forming most pore-forming marks on this film.
Aforesaid laser punching method, described therein opening are to run through those pore-forming marks and this film by this laser and form.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
The present invention proposes a kind of wafer contact window and joint pad open end and driving hole manufacturing process of soft sheet type bearing device, be applicable to that winding engages (Tape Automated Bonding automatically, TAB) the manufacturing process technology of packaging body, the wafer contact window of this soft sheet type bearing device and joint pad open end and driving hole manufacturing process comprise following several steps at least.At first, provide film.Then, form most openings by a laser on the surface of this film, wherein at least one in these openings is to be used to expose wafer, and as the wafer contact window of this wafer, and in these openings at least one is as driving hole.Afterwards, form metal level on this film, and at least one opening in these openings is to expose local metal level, and as the opening of the predetermined joint sheet of this metal level.
Wafer contact window and joint pad open end and driving hole manufacturing process according to the described soft sheet type bearing device of preferred embodiment of the present invention, wherein after film is provided, more comprise forming adhesion coating on film, make metal level to be engaged on the film by adhesion coating.
According to wafer contact window and the joint pad open end and the driving hole manufacturing process of the described soft sheet type bearing device of preferred embodiment of the present invention, wherein the method that metal level is disposed on the film comprises pressing manufacturing process.
Wafer contact window and joint pad open end and driving hole manufacturing process according to the described soft sheet type bearing device of preferred embodiment of the present invention, wherein after the formation metal level is on film, more comprise patterned metal layer, the metal level that wherein extends the part on the wafer contact window is a plurality of pins, and this metal level that this predetermined joint pad open end of metal level exposes the part is a joint sheet.
According to wafer contact window and the joint pad open end and the driving hole manufacturing process of the described soft sheet type bearing device of preferred embodiment of the present invention, wherein after the formation metal level is on film, more comprises and fill the soft glue material in the opening of predetermined joint sheet.
Wafer contact window and joint pad open end and driving hole manufacturing process according to the described soft sheet type bearing device of preferred embodiment of the present invention, wherein after film is provided, more comprise forming a plurality of pore-forming marks on film, and these openings are to form by laser runs through these pore-forming marks and film.
For reaching above-mentioned purpose of the present invention, the present invention proposes a kind of laser punching method in addition, be applicable to film holed technique, and this laser punching method comprises the steps: by laser to form a plurality of openings on the surface of film, wherein should comprise at least one wafer contact window by a majority opening, at least one driving hole and at least one joint pad open end, wherein at least one in these openings is to be suitable for exposing wafer, and as the wafer contact window of this wafer, and in these openings at least one is to be suitable for exposing local predetermined metal level, and as the predetermined joint pad open end of metal level, and these openings one of them is as driving hole at least.
According to the described laser punching method of preferred embodiment of the present invention, before forming these openings, more comprise forming a plurality of pore-forming marks on film, and these openings are to form by laser runs through these pore-forming marks and film.
By technique scheme, the present invention has following advantage at least:
The wafer contact window of soft sheet type bearing device of the present invention and joint pad open end and driving hole manufacturing process and laser punching method thereof form wafer contact window, predetermined joint pad open end and driving hole because of only just running through film by laser.Therefore, compared to existing known manufacturing process, the wafer contact window of soft sheet type bearing device of the present invention and joint pad open end and driving hole manufacturing process needn't be made mould, so can save the wafer contact window of making soft sheet type bearing device and the cost of joint pad open end and driving hole effectively.
In sum, the wafer contact window of the soft sheet type bearing device of special construction of the present invention and joint pad open end and driving hole manufacturing process, it has above-mentioned many advantages and practical value, and in like product, do not see have similar structural design to publish or use and really genus innovation, no matter it structurally or bigger improvement all arranged on the function, have large improvement technically, and produced handy and practical effect, and the wafer contact window of more existing soft sheet type bearing device and joint pad open end and driving hole manufacturing process have the multinomial effect of enhancement, thereby be suitable for practicality more, and have the extensive value of industry, really be a novelty, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of specification, below with preferred embodiment of the present invention and conjunction with figs. describe in detail as after.
Description of drawings
Figure 1A～1F is wafer contact window and joint pad open end and the driving hole manufacturing process that has known a kind of soft sheet type bearing device now.
Fig. 2 A～2E is wafer contact window and the joint pad open end and the driving hole manufacturing process of a kind of soft sheet type bearing device of preferred embodiment of the present invention.
Fig. 2 F is the soft sheet type bearing device of Fig. 2 E, and its coat of metal is formed at the structural representation of the metal level of patterning.
Fig. 2 G is the soft sheet type bearing device of Fig. 2 F, and its welding cover layer (solder mask) is formed at the structural representation on the coat of metal partly.
Fig. 2 H is the soft sheet type bearing device of Fig. 2 G, and its coat of metal is formed at not the structural representation on the coat of metal that is covered by welding cover layer.
Fig. 3 is a kind of soft sheet type bearing device of preferred embodiment of the present invention, and it has the schematic diagram of a plurality of pore-forming marks on film.
110: film 120: adhesion coating
130: contact window 132: joint pad open end
134: driving hole 140: metal level
142: joint sheet 150: the soft glue material
160: coat of metal 210: film
212: pore-forming mark 220: adhesion coating
230: wafer contact window 232: joint pad open end
234: driving hole 240: metal level
242: joint sheet 244: pin
250: soft glue material 260: coat of metal
270: welding cover layer 280: coat of metal
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, wafer contact window and joint pad open end and its embodiment of driving hole manufacturing process, structure, feature and the effect thereof of the soft sheet type bearing device that foundation the present invention is proposed, describe in detail as after.
Seeing also shown in Fig. 2 A～2E, is wafer contact window and the joint pad open end and the driving hole manufacturing process of a kind of soft sheet type bearing device of preferred embodiment of the present invention.Soft sheet type bearing device of the present invention is to be applicable to that winding engages (Tape Automated Bonding, TAB) the manufacturing process technology of packaging body automatically.See also Fig. 2 A, at first, provide film 210 earlier, the material of this film 210 for example is a policapram (polyimide) etc.Please continue to consult Fig. 2 A, then, adhesion coating 220 is disposed on the film 210.See also Fig. 2 B, afterwards, for example use laser and form a plurality of openings in film 210 and adhesion coating 220, wherein these openings are to run through film 210 to form wafer contact hole 230, most individual predetermined joint pad open ends 232 and most driving holes 234 with adhesion coating 220.Wafer contact window 230 is to be suitable for exposing the wafer (not shown).These predetermined joint pad open ends 232 are to be suitable for exposing local predetermined metal level (not shown).Film 210 and adhesion coating 220 are to be disposed on the conveyer belt (not shown) by these driving holes 234, and drive film 210 by this conveyer belt and adhesion coating 220 advances.
See also shown in Fig. 2 C, then, form metal level 240 on film 210, this metal level 240 is that for example pressing (laminate) is on film 210 by adhesion coating 220, and wherein the material of metal level 240 for example is Copper Foil or other metals etc.See also Fig. 2 D, then, fill soft glue material (FlexCoat) 250 in these predetermined joint pad open ends 232, wherein the material of these soft glue materials 250 comprises policapram (polyimide), and these soft glue materials 250 are in order to increase the amounting to property of this soft sheet type bearing device.See also Fig. 2 E, afterwards, etch metal layers 240, the metal level 240 that makes these predetermined joint pad open ends 232 be exposed can be used as a plurality of joint sheets 242.Manufacturing process step as for etch metal layers 240 for example comprises the surface of planarization metal layer 240 with chemical grinding (chemical polish) manufacturing process earlier, afterwards, the coating photoresistance on the metal level 240, photoresistance exposure, development, coating colloid and bottom surface cover (back coat) on film 210, metal level 240 is soaked in the etching solution and multiple tracks steps (all not shown in the figures) such as patterned metal layer 240 and removing photoresistance just repeat no more at this with infusion process.What deserves to be mentioned is that the metal level 240 that extends the part on the wafer contact window 230 is a plurality of pins 244, these pins 244 can electrically connect (not shown) with most projections (bonding pad) of wafer.Then, for example carry out the finished product detection step, good to guarantee film 210 with the patterned appearance of metal level 240, with the making of the wafer contact window 230 of finishing soft sheet type bearing device of the present invention and joint pad open end 232 with driving hole 234.
As for continuous manufacturing process after after the wafer contact window of the soft sheet type bearing device of the present invention that completes and joint pad open end and driving hole, more comprise following step.Fig. 2 F is the soft sheet type bearing device of Fig. 2 E, and its coat of metal is formed at the structural representation of patterned metal layer.See also Fig. 2 F; then; for example form coat of metal 260 on the pattern of metal level 240 to electroplate (plating) manufacturing process, touch outside air and oxidation with the metal level 240 that prevents to expose, wherein the material of coat of metal 260 for example is a tin etc.Fig. 2 G is the soft sheet type bearing device of Fig. 2 F, and its welding cover layer (solder mask) is formed at the structural representation on the coat of metal partly.See also Fig. 2 G, then, for example form welding cover layer (solder mask) 270 on the coat of metal 260 of part with printing (plating) manufacturing process.Fig. 2 H is the soft sheet type bearing device of Fig. 2 G, and its coat of metal is formed at not the structural representation on the coat of metal that is covered by welding cover layer.See also Fig. 2 H, then, use is for example electroplated (plating) manufacturing process and is formed coat of metal 280 on the coat of metal 260 that is not covered by welding cover layer 270, and wherein the material of coat of metal 280 for example is a tin etc.Afterwards, carry out the finished product detection step, good to guarantee film 210 with the patterned appearance of metal level 240.
Seeing also shown in Figure 3ly, is a kind of soft sheet type bearing device of preferred embodiment of the present invention, and it has the schematic diagram of a plurality of pore-forming marks on film.See also Fig. 3, it should be noted that wafer contact window and the joint pad open end and the driving hole manufacturing process of another soft sheet type bearing device of the present invention, can also after film 210 is provided, on film 210, form a plurality of pore-forming marks 212 again.Then, see also Fig. 2 B, form these openings 230,232 and 234 by laser runs through these pore-forming marks 212, film 210 and adhesion coating 220, then the step with Fig. 2 C, 2D, 2E, 2F, 2C and 2H representative is identical as for other steps, so just repeat no more at this.In addition; the wafer contact window of present embodiment soft sheet type bearing device and joint pad open end and driving hole manufacturing process can also laser and around these pore-forming marks 212 and burn out these openings 230,232 and 234 on film 210, also be included in the scope of protection of the present invention.
It should be noted that; above-mentioned laser burns out the step (shown in Fig. 2 B) of a plurality of openings 230,232 and 234 on film 210; necessity is providing film 210 (shown in Fig. 2 A) to carry out afterwards; can also after the step of Fig. 2 C, 2E, 2F, 2G or 2H, just carry out, also be included in the scope of protection of the present invention.In addition, soft sheet type bearing device of the present invention is unnecessary just can be engaged in metal level 240 on the film 210 by adhesion coating 220.
Therefore, wafer contact window and joint pad open end and driving hole manufacturing process compared to existing known soft sheet type bearing device, the wafer contact window of soft sheet type bearing device of the present invention and joint pad open end and driving hole manufacturing process and laser punching method thereof will just can flexibly burn out contact window 230 and joint pad open end 232 and driving hole 234 with laser manufacturing process on film 210, and needn't make the mould of multiple different size, so can reduce the required cost of mould of making these different sizes significantly, and then save the wafer contact window 230 of making soft sheet type bearing device and the cost of joint pad open end 232 and driving hole 234 effectively.
In sum, because the wafer contact window of soft sheet type bearing device of the present invention and joint pad open end and driving hole and laser punching method thereof are because of only just burning out contact window, joint pad open end and driving hole by laser manufacturing process on film, so the demand that can meet on a small quantity, diversely, flexibly make soft sheet type bearing device, and can save the cost of the required mould of wafer contact window, joint pad open end and the driving hole of existing known making soft sheet type bearing device significantly.
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (10)
1. the wafer contact window of a soft sheet type bearing device and joint pad open end and driving hole manufacturing process are applicable to the manufacturing process technology of the automatic bonding packaging body of winding to it is characterized in that it comprises the steps: at least
Film is provided;
Go up most openings of formation by laser in a surface of this film, wherein should comprise at least one wafer contact window, at least one driving hole and at least one joint pad open end by a majority opening, wherein should a majority opening one of them is to be used to expose wafer at least, and as the wafer contact window of this wafer, and should a majority opening one of them is as driving hole at least; And
Form metal level on this film, and this metal level and this wafer be in the heteropleural of this film respectively, and should a majority opening one of them is the metal level that exposes the part at least, and as the opening of the joint sheet of being scheduled to of this metal level.
2. the wafer contact window of soft sheet type bearing device according to claim 1 and joint pad open end and driving hole manufacturing process, described therein providing after this film is provided, more comprise forming adhesion coating on this film, make this metal level be engaged on this film by this adhesion coating.
3. the wafer contact window of soft sheet type bearing device according to claim 1 and joint pad open end and driving hole manufacturing process is characterized in that the described therein method that this metal level is disposed on this film comprises pressing manufacturing process.
4. the wafer contact window of soft sheet type bearing device according to claim 1 and joint pad open end and driving hole manufacturing process, after it is characterized in that described therein this metal level of formation is on this film, more comprise this metal level of patterning, this metal level that wherein extends the part on this wafer contact window is a plurality of pins, and this metal level that this predetermined joint pad open end of this metal level exposes the part is a joint sheet.
5. the wafer contact window of soft sheet type bearing device according to claim 1 and joint pad open end and driving hole manufacturing process, after it is characterized in that described therein this metal level of formation is on this film, more comprise and fill the soft glue material in the opening of this predetermined joint sheet.
6. described therein providing after the film is provided for the wafer contact window of soft sheet type bearing device according to claim 1 and joint pad open end and driving hole manufacturing process, more comprises forming most pore-forming marks on this film.
7. the wafer contact window of soft sheet type bearing device according to claim 6 and joint pad open end and driving hole manufacturing process is characterized in that described therein opening is to run through those pore-forming marks and this film by this laser and form.
8. a laser punching method is applicable to film holed technique, it is characterized in that it comprises the steps: at least
Go up most openings of formation by laser in a surface of this film, wherein should comprise at least one wafer contact window, at least one driving hole and at least one joint pad open end by a majority opening, wherein should a majority opening at least wherein one be to be used to expose wafer, and as this wafer wafer contact window, and should a majority opening one of them is to be used to expose local metal level at least, and as the predetermined joint pad open end of this metal level, and should a majority opening one of them is as driving hole at least.
9. laser punching method according to claim 8 is characterized in that before described therein those openings of formation, more comprises forming most pore-forming marks on this film.
10. laser punching method according to claim 9 is characterized in that described therein opening is to run through those pore-forming marks and this film by this laser and form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410095556XA CN100378932C (en) | 2004-11-29 | 2004-11-29 | Wafer contact window of soft sheet bearing device and joint pad open and driving hole process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410095556XA CN100378932C (en) | 2004-11-29 | 2004-11-29 | Wafer contact window of soft sheet bearing device and joint pad open and driving hole process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1783442A CN1783442A (en) | 2006-06-07 |
| CN100378932C true CN100378932C (en) | 2008-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410095556XA Expired - Fee Related CN100378932C (en) | 2004-11-29 | 2004-11-29 | Wafer contact window of soft sheet bearing device and joint pad open and driving hole process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100378932C (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000353726A (en) * | 1999-06-14 | 2000-12-19 | Toppan Printing Co Ltd | Manufacture of film carrier |
| US20010028101A1 (en) * | 1998-02-25 | 2001-10-11 | Fujitsu Limited | Method of fabricating semiconductor having through hole |
-
2004
- 2004-11-29 CN CNB200410095556XA patent/CN100378932C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010028101A1 (en) * | 1998-02-25 | 2001-10-11 | Fujitsu Limited | Method of fabricating semiconductor having through hole |
| JP2000353726A (en) * | 1999-06-14 | 2000-12-19 | Toppan Printing Co Ltd | Manufacture of film carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1783442A (en) | 2006-06-07 |
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