CN100377330C - 基板支承用槽棒及使用该槽棒的基板载具 - Google Patents
基板支承用槽棒及使用该槽棒的基板载具 Download PDFInfo
- Publication number
- CN100377330C CN100377330C CNB031401309A CN03140130A CN100377330C CN 100377330 C CN100377330 C CN 100377330C CN B031401309 A CNB031401309 A CN B031401309A CN 03140130 A CN03140130 A CN 03140130A CN 100377330 C CN100377330 C CN 100377330C
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- CN
- China
- Prior art keywords
- support plate
- groove rod
- substrate
- protuberance
- substrate supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Pallets (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB031401309A CN100377330C (zh) | 2003-08-06 | 2003-08-06 | 基板支承用槽棒及使用该槽棒的基板载具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB031401309A CN100377330C (zh) | 2003-08-06 | 2003-08-06 | 基板支承用槽棒及使用该槽棒的基板载具 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1581458A CN1581458A (zh) | 2005-02-16 |
CN100377330C true CN100377330C (zh) | 2008-03-26 |
Family
ID=34579247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031401309A Expired - Fee Related CN100377330C (zh) | 2003-08-06 | 2003-08-06 | 基板支承用槽棒及使用该槽棒的基板载具 |
Country Status (1)
Country | Link |
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CN (1) | CN100377330C (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100921521B1 (ko) | 2007-10-12 | 2009-10-12 | 세메스 주식회사 | 기판 지지 유닛 및 이를 이용한 기판 처리 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US6031205A (en) * | 1995-03-13 | 2000-02-29 | Tokyo Electron Limited | Thermal treatment apparatus with thermal protection members intercepting thermal radiation at or above a predetermined angle |
US6186344B1 (en) * | 1995-09-07 | 2001-02-13 | Samsung Electronics Co., Ltd. | Cassette for loading glasses for liquid crystal display device |
US6237979B1 (en) * | 1996-05-17 | 2001-05-29 | Micron Technology, Inc. | Wafer carrier |
US6532642B1 (en) * | 1998-10-02 | 2003-03-18 | Union Oil Company Of California | Method of making a silicon carbide rail for use in a semiconductor wafer carrier |
-
2003
- 2003-08-06 CN CNB031401309A patent/CN100377330C/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5584401A (en) * | 1994-07-29 | 1996-12-17 | Yodogawa Kasei Kabushiki Kaisha | Substrate-supporting side boards and a cassette utilizing the boards |
US6031205A (en) * | 1995-03-13 | 2000-02-29 | Tokyo Electron Limited | Thermal treatment apparatus with thermal protection members intercepting thermal radiation at or above a predetermined angle |
US6186344B1 (en) * | 1995-09-07 | 2001-02-13 | Samsung Electronics Co., Ltd. | Cassette for loading glasses for liquid crystal display device |
US6237979B1 (en) * | 1996-05-17 | 2001-05-29 | Micron Technology, Inc. | Wafer carrier |
US6532642B1 (en) * | 1998-10-02 | 2003-03-18 | Union Oil Company Of California | Method of making a silicon carbide rail for use in a semiconductor wafer carrier |
Also Published As
Publication number | Publication date |
---|---|
CN1581458A (zh) | 2005-02-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee after: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee after: Foxsemicon Integrated Technology Inc. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee before: Foxsemicon Integrated Technology Inc. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080326 Termination date: 20120806 |