CN100371842C - 控制传送带型热处理器中工件的温度响应的方法与设备 - Google Patents

控制传送带型热处理器中工件的温度响应的方法与设备 Download PDF

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Publication number
CN100371842C
CN100371842C CNB008159793A CN00815979A CN100371842C CN 100371842 C CN100371842 C CN 100371842C CN B008159793 A CNB008159793 A CN B008159793A CN 00815979 A CN00815979 A CN 00815979A CN 100371842 C CN100371842 C CN 100371842C
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China
Prior art keywords
window index
workpiece
processor
data processor
process window
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Expired - Lifetime
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CNB008159793A
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Chinese (zh)
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CN1391667A (zh
Inventor
菲利普·C·卡茨米尔罗维克兹
埃里克·德兰斯费尔德特
斯坦利·D·舒尔茨
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KIC THERMAL PROFILING Inc
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KIC THERMAL PROFILING Inc
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1927Control of temperature characterised by the use of electric means using a plurality of sensors
    • G05D23/193Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces
    • G05D23/1931Control of temperature characterised by the use of electric means using a plurality of sensors sensing the temperaure in different places in thermal relationship with one or more spaces to control the temperature of one space

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  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Health & Medical Sciences (AREA)
  • Remote Sensing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Control Of Heat Treatment Processes (AREA)
  • Control Of Temperature (AREA)
CNB008159793A 1999-09-23 2000-09-18 控制传送带型热处理器中工件的温度响应的方法与设备 Expired - Lifetime CN100371842C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/401,749 1999-09-23
US09/401,749 US6453219B1 (en) 1999-09-23 1999-09-23 Method and apparatus for controlling temperature response of a part in a conveyorized thermal processor

Publications (2)

Publication Number Publication Date
CN1391667A CN1391667A (zh) 2003-01-15
CN100371842C true CN100371842C (zh) 2008-02-27

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CNB008159793A Expired - Lifetime CN100371842C (zh) 1999-09-23 2000-09-18 控制传送带型热处理器中工件的温度响应的方法与设备

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Country Link
US (1) US6453219B1 (enExample)
EP (1) EP1218812B1 (enExample)
JP (1) JP2003510676A (enExample)
CN (1) CN100371842C (enExample)
DE (1) DE60002354T2 (enExample)
WO (1) WO2001022188A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240177086A1 (en) * 2021-03-30 2024-05-30 Mitsubishi Electric Corporation Work assistance apparatus, work assistance system, and work assistance method

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6606537B1 (en) * 2001-04-19 2003-08-12 Kic Thermal Profiling Method for correcting process temperature profile in a multi-zone thermal processor
US20050044892A1 (en) * 2003-08-28 2005-03-03 George Stephan P. Method and apparatus for heating glass sheets
US7493242B1 (en) 2004-11-10 2009-02-17 The United States Of America As Represented By The Secretary Of The Navy Mathematical model for predicting the thermal behavior of an item
US20070088605A1 (en) * 2005-10-19 2007-04-19 Yahoo! Inc. System and method for achieving linear advertisement impression delivery under uneven, volatile traffic conditions
JP4685992B2 (ja) * 2007-01-23 2011-05-18 株式会社タムラ製作所 はんだ付け装置及びはんだ付け方法並びにはんだ付け用プログラム
US20080255936A1 (en) * 2007-04-13 2008-10-16 Yahoo! Inc. System and method for balancing goal guarantees and optimization of revenue in advertisement delivery under uneven, volatile traffic conditions
US7809459B2 (en) * 2007-12-31 2010-10-05 Hitachi Global Technologies Netherlands B.V. Advanced-process-control system utilizing a lambda tuner
CN101949652B (zh) * 2010-09-28 2012-11-07 中南大学 基于满意优化的热风温度与烧结终点温度协调控制方法
DE202012000084U1 (de) 2012-01-05 2012-04-02 Dirk Stiebert Sicherheitsgerichtete fehlertolerante Thermoprozesssteuerung
JP6112089B2 (ja) * 2014-09-17 2017-04-12 カシオ計算機株式会社 加熱装置、加熱方法、及び、立体形成システム
KR102404877B1 (ko) * 2017-05-29 2022-06-07 알케이씨 인스트루먼트 인크 제어계 설계 장치 및 제어 시스템
US11525736B2 (en) * 2020-01-15 2022-12-13 International Business Machines Corporation Temperature monitoring for printed circuit board assemblies during mass soldering

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003160A (en) * 1987-06-19 1991-03-26 Matsushita Electric Works, Ltd. Reflow furnace control system
US5099442A (en) * 1989-11-04 1992-03-24 Ohkura Electric Co., Ltd. Furnace temperature control apparatus using adjustment input
US5439160A (en) * 1993-03-31 1995-08-08 Siemens Corporate Research, Inc. Method and apparatus for obtaining reflow oven settings for soldering a PCB
WO1997028669A1 (en) * 1996-01-31 1997-08-07 Asm America, Inc. Model-based predictive control of thermal processing

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3621213A (en) 1969-11-26 1971-11-16 Ibm Programmed digital-computer-controlled system for automatic growth of semiconductor crystals
US3793717A (en) 1971-04-01 1974-02-26 Rca Corp Method of controlling resistance values of thick-film resistors
FR2174748B1 (enExample) 1972-03-09 1975-03-07 Est Aciers Fins
US4176554A (en) 1977-11-09 1979-12-04 Kazmierowicz Casimir W Method and apparatus for obtaining the temperature profile of a kiln
US4242907A (en) 1979-02-12 1981-01-06 Kazmierowicz Casimir W Apparatus for monitoring and controlling a flat zone in a furnace
JPS5947324A (ja) 1982-09-08 1984-03-17 Mitsubishi Electric Corp 加熱炉の加熱制御方法
DE3400300C2 (de) 1983-06-24 1986-01-23 Gebrüder Bühler AG, Uzwil Verfahren zur Herstellung von langen Teigwaren und Vorrichtung zur Durchführung eines solchen Verfahrens
JPS61145606A (ja) 1984-12-19 1986-07-03 Ohkura Electric Co Ltd 干渉対応形パタ−ン切換式温度制御装置
US4982347A (en) 1989-06-22 1991-01-01 Unisys Corporation Process and apparatus for producing temperature profiles in a workpiece as it passes through a belt furnace
JPH05293637A (ja) * 1992-03-31 1993-11-09 Matsushita Electric Ind Co Ltd リフロー装置
US5396416A (en) * 1992-08-19 1995-03-07 Continental Controls, Inc. Multivariable process control method and apparatus
WO1995027235A1 (en) * 1994-03-31 1995-10-12 Omron Corporation Control system and method
US5457625A (en) * 1994-04-13 1995-10-10 The M. W. Kellogg Company Maximizing process production rates using permanent constraints
US5971249A (en) * 1997-02-24 1999-10-26 Quad Systems Corporation Method and apparatus for controlling a time/temperature profile inside of a reflow oven
JP3274095B2 (ja) * 1997-07-18 2002-04-15 富士通株式会社 加熱炉内の被加熱物の熱解析装置及びそれを用いたリフロー炉の制御装置並びにそのプログラムを記録したコンピュータ読み取り可能な記録媒体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5003160A (en) * 1987-06-19 1991-03-26 Matsushita Electric Works, Ltd. Reflow furnace control system
US5099442A (en) * 1989-11-04 1992-03-24 Ohkura Electric Co., Ltd. Furnace temperature control apparatus using adjustment input
US5439160A (en) * 1993-03-31 1995-08-08 Siemens Corporate Research, Inc. Method and apparatus for obtaining reflow oven settings for soldering a PCB
WO1997028669A1 (en) * 1996-01-31 1997-08-07 Asm America, Inc. Model-based predictive control of thermal processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240177086A1 (en) * 2021-03-30 2024-05-30 Mitsubishi Electric Corporation Work assistance apparatus, work assistance system, and work assistance method

Also Published As

Publication number Publication date
JP2003510676A (ja) 2003-03-18
WO2001022188A1 (en) 2001-03-29
EP1218812B1 (en) 2003-04-23
EP1218812A1 (en) 2002-07-03
US6453219B1 (en) 2002-09-17
DE60002354D1 (de) 2003-05-28
CN1391667A (zh) 2003-01-15
DE60002354T2 (de) 2003-12-04

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Granted publication date: 20080227