CN100345011C - 光波导 - Google Patents

光波导 Download PDF

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Publication number
CN100345011C
CN100345011C CNB038143062A CN03814306A CN100345011C CN 100345011 C CN100345011 C CN 100345011C CN B038143062 A CNB038143062 A CN B038143062A CN 03814306 A CN03814306 A CN 03814306A CN 100345011 C CN100345011 C CN 100345011C
Authority
CN
China
Prior art keywords
layer
optical
core layer
waveguide
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB038143062A
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English (en)
Chinese (zh)
Other versions
CN1662833A (zh
Inventor
M·A·哈泽
J·－Y·张
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN1662833A publication Critical patent/CN1662833A/zh
Application granted granted Critical
Publication of CN100345011C publication Critical patent/CN100345011C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12085—Integrated
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
CNB038143062A 2002-06-21 2003-04-22 光波导 Expired - Fee Related CN100345011C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/177,102 2002-06-21
US10/177,102 US6832034B2 (en) 2002-06-21 2002-06-21 Optical waveguide

Publications (2)

Publication Number Publication Date
CN1662833A CN1662833A (zh) 2005-08-31
CN100345011C true CN100345011C (zh) 2007-10-24

Family

ID=29999079

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038143062A Expired - Fee Related CN100345011C (zh) 2002-06-21 2003-04-22 光波导

Country Status (8)

Country Link
US (2) US6832034B2 (https=)
EP (1) EP1516211A1 (https=)
JP (1) JP2005531030A (https=)
KR (1) KR20050012819A (https=)
CN (1) CN100345011C (https=)
AU (1) AU2003222671A1 (https=)
TW (1) TW200400371A (https=)
WO (1) WO2004001463A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104849878A (zh) * 2015-06-03 2015-08-19 东南大学 一种基于马赫-曾德结构的氮化硅波导热光开关阵列芯片及其制作方法

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* Cited by examiner, † Cited by third party
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US7006746B2 (en) * 2002-08-29 2006-02-28 Micron Technology, Inc. Waveguide for thermo optic device
US7020365B2 (en) * 2002-08-29 2006-03-28 Micron Technology, Inc. Resistive heater for thermo optic device
US7120336B2 (en) * 2002-08-29 2006-10-10 Micron Technology, Inc. Resonator for thermo optic device
US20060293644A1 (en) * 2005-06-21 2006-12-28 Donald Umstadter System and methods for laser-generated ionizing radiation
WO2007011727A1 (en) * 2005-07-14 2007-01-25 Massachusetts Institute Of Technology Ring resonators comprising chalcogenide glass
JP2008181411A (ja) * 2007-01-25 2008-08-07 Nitto Denko Corp タッチパネル用光導波路
US8144392B2 (en) * 2007-02-12 2012-03-27 The United States Of America As Represented By The Secretary Of The Navy Waveguide amplifier in a sputtered film of erbium-doped gallium lanthanum sulfide glass
JP2010117380A (ja) * 2008-10-14 2010-05-27 Nitto Denko Corp 光導波路装置の製造方法
US20110085773A1 (en) * 2009-10-13 2011-04-14 Electronics And Telecommunications Research Institute Optical waveguide and method of forming the same
EP2795675A4 (en) * 2011-12-20 2015-11-25 Intel Corp HYBRID INTEGRATION OF GROUP III-V SEMICONDUCTOR COMPONENTS ON SILICON
JP2013210623A (ja) 2012-02-28 2013-10-10 Furukawa Electric Co Ltd:The 光導波路素子およびその製造方法
US10371890B2 (en) 2013-02-26 2019-08-06 Furukawa Electric Co., Ltd. Optical waveguide element
US9726820B2 (en) * 2014-08-14 2017-08-08 Raytheon Company End pumped PWG with tapered core thickness
CN107238891B (zh) * 2017-05-23 2019-11-05 深圳信息职业技术学院 一种可集成的无定型硅波导结构及其制作方法
CN109324369A (zh) * 2018-12-12 2019-02-12 科新网通科技有限公司 一种平面波导器件的生产工艺
NL2023679B1 (en) * 2019-08-09 2021-04-13 Illumina Inc System and method for patterning flow cell substrates
WO2025253524A1 (ja) * 2024-06-04 2025-12-11 Ｎｔｔ株式会社 光回路

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5598501A (en) * 1993-03-18 1997-01-28 Nippon Telegraph And Telephone Corporation Polyimide optical waveguide and method of manufacturing the same
US5963573A (en) * 1997-08-25 1999-10-05 3M Innovative Properties Company Light absorbing layer for II-VI semiconductor light emitting devices
US6052215A (en) * 1999-01-22 2000-04-18 Harris Corporation Index-guided solid acoustic traveling wave lens
US6271954B1 (en) * 1994-03-17 2001-08-07 Molex Fiber Optics, Inc. Waveguide absorption modulator with integral optical isolator

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4923264A (en) * 1989-01-18 1990-05-08 University Of Pittsburgh Of The Commonwealth System Of Higher Education Resonance coupled optical coupler with semiconductor waveguide layer comprising a multi-quantum-well structure
US5613995A (en) 1993-04-23 1997-03-25 Lucent Technologies Inc. Method for making planar optical waveguides
FR2732777B1 (fr) * 1995-04-05 1997-06-20 Bruno Adrien Demultiplexeur insensible a la polarisation et procede de realisation
JPH11103130A (ja) * 1997-09-29 1999-04-13 Mitsubishi Electric Corp 半導体光素子，及びその製造方法
US6563998B1 (en) * 1999-04-15 2003-05-13 John Farah Polished polymide substrate
AU3772099A (en) * 1998-05-01 1999-11-23 University Of New Mexico Highly doped lasers and amplifiers
US6312581B1 (en) 1999-11-30 2001-11-06 Agere Systems Optoelectronics Guardian Corp. Process for fabricating an optical device
EP1116973A1 (en) * 2000-01-11 2001-07-18 Corning Incorporated Athermalized integrated optical waveguide devices
EP1368680A2 (en) * 2000-10-13 2003-12-10 Massachusetts Institute Of Technology Optical waveguides with trench structures
US6580850B1 (en) 2000-11-24 2003-06-17 Applied Wdm, Inc. Optical waveguide multimode to single mode transformer
US6600864B2 (en) * 2000-12-20 2003-07-29 Intel Corporation Method and apparatus for switching an optical beam using an optical rib waveguide
JP4004025B2 (ja) * 2001-02-13 2007-11-07 日東電工株式会社 透明導電性積層体およびタッチパネル
JP2002258081A (ja) * 2001-02-28 2002-09-11 Fujitsu Ltd 光配線基板、光配線基板の製造方法及び多層光配線
US6873638B2 (en) * 2001-06-29 2005-03-29 3M Innovative Properties Company Laser diode chip with waveguide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5598501A (en) * 1993-03-18 1997-01-28 Nippon Telegraph And Telephone Corporation Polyimide optical waveguide and method of manufacturing the same
US6271954B1 (en) * 1994-03-17 2001-08-07 Molex Fiber Optics, Inc. Waveguide absorption modulator with integral optical isolator
US5963573A (en) * 1997-08-25 1999-10-05 3M Innovative Properties Company Light absorbing layer for II-VI semiconductor light emitting devices
US6052215A (en) * 1999-01-22 2000-04-18 Harris Corporation Index-guided solid acoustic traveling wave lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104849878A (zh) * 2015-06-03 2015-08-19 东南大学 一种基于马赫-曾德结构的氮化硅波导热光开关阵列芯片及其制作方法

Also Published As

Publication number Publication date
AU2003222671A1 (en) 2004-01-06
JP2005531030A (ja) 2005-10-13
EP1516211A1 (en) 2005-03-23
US6832034B2 (en) 2004-12-14
WO2004001463A1 (en) 2003-12-31
KR20050012819A (ko) 2005-02-02
US6909831B2 (en) 2005-06-21
US20040008959A1 (en) 2004-01-15
TW200400371A (en) 2004-01-01
US20040197065A1 (en) 2004-10-07
CN1662833A (zh) 2005-08-31

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20071024

Termination date: 20100422