CH678109A5 - - Google Patents

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Publication number
CH678109A5
CH678109A5 CH225088A CH225088A CH678109A5 CH 678109 A5 CH678109 A5 CH 678109A5 CH 225088 A CH225088 A CH 225088A CH 225088 A CH225088 A CH 225088A CH 678109 A5 CH678109 A5 CH 678109A5
Authority
CH
Switzerland
Prior art keywords
frequency
optical
conductor
measuring
plate
Prior art date
Application number
CH225088A
Other languages
German (de)
English (en)
Inventor
Hilda Schaer
Original Assignee
Althis Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Althis Ag filed Critical Althis Ag
Priority to CH225088A priority Critical patent/CH678109A5/de
Priority to DE19893918811 priority patent/DE3918811A1/de
Publication of CH678109A5 publication Critical patent/CH678109A5/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02051—Integrated design, e.g. on-chip or monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CH225088A 1988-06-13 1988-06-13 CH678109A5 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH225088A CH678109A5 (fr) 1988-06-13 1988-06-13
DE19893918811 DE3918811A1 (de) 1988-06-13 1989-06-09 Heterodynes interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH225088A CH678109A5 (fr) 1988-06-13 1988-06-13

Publications (1)

Publication Number Publication Date
CH678109A5 true CH678109A5 (fr) 1991-07-31

Family

ID=4229378

Family Applications (1)

Application Number Title Priority Date Filing Date
CH225088A CH678109A5 (fr) 1988-06-13 1988-06-13

Country Status (2)

Country Link
CH (1) CH678109A5 (fr)
DE (1) DE3918811A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT392537B (de) * 1989-03-21 1991-04-25 Tabarelli Werner Interferometeranordnung, insbesondere zur entfernungs- bzw. verschiebewegbestimmung eines beweglichen bauteiles
US5127731A (en) * 1991-02-08 1992-07-07 Hughes Aircraft Company Stabilized two-color laser diode interferometer
DE4212981C2 (de) * 1992-04-18 1994-02-03 Deutsche Aerospace Aktuator
EP3388862A1 (fr) * 2017-04-13 2018-10-17 Leica Geosystems AG Mesure des distances haute résolution au moyen de l'interférométrie

Also Published As

Publication number Publication date
DE3918811A1 (de) 1989-12-28

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Legal Events

Date Code Title Description
PL Patent ceased