CH613556A5 - Process for photolithographic patterning of resistor tracks in hybrid circuits - Google Patents
Process for photolithographic patterning of resistor tracks in hybrid circuitsInfo
- Publication number
- CH613556A5 CH613556A5 CH275775A CH275775A CH613556A5 CH 613556 A5 CH613556 A5 CH 613556A5 CH 275775 A CH275775 A CH 275775A CH 275775 A CH275775 A CH 275775A CH 613556 A5 CH613556 A5 CH 613556A5
- Authority
- CH
- Switzerland
- Prior art keywords
- hybrid circuits
- photolithographic patterning
- resistor tracks
- tracks
- resistor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/702—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof
- H01L21/707—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof of thick-or thin-film circuits or parts thereof of thin-film circuits or parts thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/167—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0302—Properties and characteristics in general
- H05K2201/0317—Thin film conductor layer; Thin film passive component
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0361—Stripping a part of an upper metal layer to expose a lower metal layer, e.g. by etching or using a laser
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/388—Improvement of the adhesion between the insulating substrate and the metal by the use of a metallic or inorganic thin film adhesion layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH275775A CH613556A5 (en) | 1975-03-05 | 1975-03-05 | Process for photolithographic patterning of resistor tracks in hybrid circuits |
DE19752512860 DE2512860C2 (de) | 1975-03-05 | 1975-03-24 | Verfahren zum fotolithografischen Strukturieren von Widerstandsbahnen in Hybridschaltungen |
SE7602098A SE417657B (sv) | 1975-03-05 | 1976-02-23 | Forfarande vid fotolitografisk strukturering av motstandsbanor |
DK91576A DK91576A (da) | 1975-03-05 | 1976-03-03 | Fremgangsmade til fotolitografisk strukturering af modstandsbaner i hybridkredslob |
FR7605954A FR2303444A1 (fr) | 1975-03-05 | 1976-03-03 | Procede pour l'elaboration photolithographique des pistes resistives dans les circuits hybrides |
GB855876A GB1535995A (en) | 1975-03-05 | 1976-03-03 | Photolithographic production of resistance elements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH275775A CH613556A5 (en) | 1975-03-05 | 1975-03-05 | Process for photolithographic patterning of resistor tracks in hybrid circuits |
Publications (1)
Publication Number | Publication Date |
---|---|
CH613556A5 true CH613556A5 (en) | 1979-09-28 |
Family
ID=4240925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH275775A CH613556A5 (en) | 1975-03-05 | 1975-03-05 | Process for photolithographic patterning of resistor tracks in hybrid circuits |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH613556A5 (xx) |
DE (1) | DE2512860C2 (xx) |
DK (1) | DK91576A (xx) |
FR (1) | FR2303444A1 (xx) |
GB (1) | GB1535995A (xx) |
SE (1) | SE417657B (xx) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2532472B1 (fr) * | 1982-08-31 | 1985-12-20 | Lignes Telegraph Telephon | Procede de fabrication de connexions electriques pour circuit hybride et circuit hybride comportant de telles connexions |
DE3708832A1 (de) * | 1987-03-18 | 1988-09-29 | Siemens Ag | Nasschemische strukturierung von hafniumborid-schichten |
FR2648232B1 (fr) | 1989-06-09 | 1991-09-27 | Erg | Procede et dispositif de mesure in situ des caracteristiques de gonflement d'un sol |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3457148A (en) * | 1964-10-19 | 1969-07-22 | Bell Telephone Labor Inc | Process for preparation of stabilized metal film resistors |
CH576739A5 (xx) * | 1972-08-25 | 1976-06-15 | Ciba Geigy Ag |
-
1975
- 1975-03-05 CH CH275775A patent/CH613556A5/xx not_active IP Right Cessation
- 1975-03-24 DE DE19752512860 patent/DE2512860C2/de not_active Expired
-
1976
- 1976-02-23 SE SE7602098A patent/SE417657B/xx not_active IP Right Cessation
- 1976-03-03 GB GB855876A patent/GB1535995A/en not_active Expired
- 1976-03-03 FR FR7605954A patent/FR2303444A1/fr active Granted
- 1976-03-03 DK DK91576A patent/DK91576A/da not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DK91576A (da) | 1976-09-06 |
FR2303444A1 (fr) | 1976-10-01 |
SE417657B (sv) | 1981-03-30 |
FR2303444B1 (xx) | 1980-01-25 |
DE2512860C2 (de) | 1986-06-19 |
GB1535995A (en) | 1978-12-13 |
SE7602098L (sv) | 1976-09-06 |
DE2512860A1 (de) | 1976-09-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51149620A (en) | Levelling apparatus for vehicle | |
GB2022531A (en) | Removable track structure for wheeled vehicles | |
JPS527598A (en) | Exhaust apparatus for steering aircraft | |
JPS524168A (en) | Contacts for integrated circuits | |
SE7513394L (sv) | Apparat for reglering av dragkraften hos fordon | |
SE405061B (sv) | Anordning vid flerskiktad skiva med tryckta kretsar | |
GB1556457A (en) | Control circuits for servo devices | |
JPS524130A (en) | Circuit for driving indicator | |
GB2048889B (en) | Riboflavin purification | |
CH613556A5 (en) | Process for photolithographic patterning of resistor tracks in hybrid circuits | |
ZA76106B (en) | Track circuit | |
GB1545514A (en) | Apparatus for the testing of inaccessable parts | |
SE418429B (sv) | Apparat for framstellning av kabelhervor | |
SE7601776L (sv) | Forfarande for framstellning av tryckta kretsar | |
GB1552321A (en) | Oscillator circuits | |
JPS5281481A (en) | Antiiskid device for wheel | |
JPS5277591A (en) | Pattern tracer | |
JPS51132520A (en) | Wheel for track | |
JPS5220256A (en) | Resistor for vehicles | |
JPS5263912A (en) | Apparatus for making sculptureelike emboss pattern on work bodies | |
SE422723B (sv) | Anslutningsdon for tryckta kretskort | |
JPS5217830A (en) | Original setting device for duplicator | |
JPS51143410A (en) | Apparatus for making mask for photooengraving | |
GB1548931A (en) | Set of pieces for japanese chess | |
JPS5257634A (en) | Selffhoisting apparatus for vehicle |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUE | Assignment |
Owner name: CONTRAVES AG |
|
PL | Patent ceased |