CH611687A5 - High-vacuum valve, in particular for ultrahigh-vacuum purposes - Google Patents

High-vacuum valve, in particular for ultrahigh-vacuum purposes

Info

Publication number
CH611687A5
CH611687A5 CH642276A CH642276A CH611687A5 CH 611687 A5 CH611687 A5 CH 611687A5 CH 642276 A CH642276 A CH 642276A CH 642276 A CH642276 A CH 642276A CH 611687 A5 CH611687 A5 CH 611687A5
Authority
CH
Switzerland
Prior art keywords
vacuum
ultrahigh
purposes
valve
vacuum valve
Prior art date
Application number
CH642276A
Other languages
English (en)
Inventor
Werner Dipl Phys Baechler
Guenter Dipl Ing Dr Kaiser
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of CH611687A5 publication Critical patent/CH611687A5/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
CH642276A 1975-05-24 1976-05-21 High-vacuum valve, in particular for ultrahigh-vacuum purposes CH611687A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752523152 DE2523152C3 (de) 1975-05-24 1975-05-24 Hochvakuumventil, insbesondere für Ultrahochvakuumzwecke

Publications (1)

Publication Number Publication Date
CH611687A5 true CH611687A5 (en) 1979-06-15

Family

ID=5947387

Family Applications (1)

Application Number Title Priority Date Filing Date
CH642276A CH611687A5 (en) 1975-05-24 1976-05-21 High-vacuum valve, in particular for ultrahigh-vacuum purposes

Country Status (4)

Country Link
CH (1) CH611687A5 (https=)
DE (1) DE2523152C3 (https=)
FR (1) FR2312710A1 (https=)
NL (1) NL7605550A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3130651A1 (de) * 1981-08-03 1983-02-17 Leybold-Heraeus GmbH, 5000 Köln Ausheizbares, grosses vakuumventil
DE3834913A1 (de) * 1988-10-13 1990-04-19 Hubert Boesch Dichtung fuer ventile oder flansche, insbesondere fuer die vakuumtechnik

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH600223A5 (https=) * 1975-07-01 1978-06-15 Vat Ag
DE2947585C2 (de) * 1979-11-26 1986-01-16 VAT Aktiengesellschaft für Vakuum-Apparate-Technik, Haag Dichtvorrichtung für den Verschluß eines aus Metall bestehenden Hochvakuumventils
DE3019516C2 (de) 1980-05-22 1982-04-29 Klinger AG, 6301 Zug Dichtungsanordnung
DE3023475C2 (de) * 1980-06-24 1984-08-30 Leybold-Heraeus GmbH, 5000 Köln Metallgedichtetes Ventil
DE3717724A1 (de) * 1987-05-26 1988-12-08 Schertler Siegfried Ventilschieber mit einem schiebergehaeuse
DE4023845C1 (en) * 1990-07-27 1992-04-02 Vat Holding Ag, Haag, Ch Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat
DE102005004987B8 (de) 2005-02-02 2017-12-14 Vat Holding Ag Vakuumventil
CN101311585B (zh) * 2007-05-25 2011-01-12 费海鸿 全金属角阀
CN110803797B (zh) * 2019-10-23 2021-11-23 江苏医药职业学院 一种环境工程用净化排水设备
CN112268141B (zh) * 2020-10-23 2025-05-16 中国科学院上海高等研究院 用于真空封合之密封碟盘

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2147332A (en) * 1938-02-02 1939-02-14 Wolverine Brass Works Valve structure
US2482696A (en) * 1944-11-29 1949-09-20 Mueller Co Pipe-line stopper
DE832822C (de) * 1949-10-29 1952-02-28 Gustav Friedrich Gerdts Absperrventil mit Spreizverschluss
AT225483B (de) * 1959-08-28 1963-01-25 Dilo Ges Drexler U Co Hartdichtung
US3108780A (en) * 1960-04-18 1963-10-29 Cons Vacuum Corp Valve for ultra-high vacuum apparatus
US3164364A (en) * 1962-10-04 1965-01-05 Diamond Power Speciality Deformable valve head and seat construction
CH512684A (fr) * 1969-08-25 1971-09-15 Suisse De Rech S Horlogeres La Vanne de précision

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3130651A1 (de) * 1981-08-03 1983-02-17 Leybold-Heraeus GmbH, 5000 Köln Ausheizbares, grosses vakuumventil
DE3834913A1 (de) * 1988-10-13 1990-04-19 Hubert Boesch Dichtung fuer ventile oder flansche, insbesondere fuer die vakuumtechnik
US4988075A (en) * 1988-10-13 1991-01-29 Boesch Hubert R Seal for valves or flanges, in particular for vacuum technology

Also Published As

Publication number Publication date
DE2523152A1 (de) 1976-11-25
FR2312710A1 (fr) 1976-12-24
FR2312710B3 (https=) 1979-02-16
NL7605550A (nl) 1976-11-26
DE2523152B2 (de) 1981-04-16
DE2523152C3 (de) 1982-01-07

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Legal Events

Date Code Title Description
PL Patent ceased
PL Patent ceased