CH600569A5 - - Google Patents

Info

Publication number
CH600569A5
CH600569A5 CH1279776A CH1279776A CH600569A5 CH 600569 A5 CH600569 A5 CH 600569A5 CH 1279776 A CH1279776 A CH 1279776A CH 1279776 A CH1279776 A CH 1279776A CH 600569 A5 CH600569 A5 CH 600569A5
Authority
CH
Switzerland
Application number
CH1279776A
Inventor
Thomas Hill
Ambrose Kennedy
Walter Grey Thomson
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH600569A5 publication Critical patent/CH600569A5/xx

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0017Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
    • B28D5/0029Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rotating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00Severing by tearing or breaking
    • Y10T225/30Breaking or tearing apparatus
    • Y10T225/307Combined with preliminary weakener or with nonbreaking cutter
    • Y10T225/321Preliminary weakener
    • Y10T225/325With means to apply moment of force to weakened work
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00Severing by tearing or breaking
    • Y10T225/30Breaking or tearing apparatus
    • Y10T225/329Plural breakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
CH1279776A 1975-10-21 1976-10-08 CH600569A5 (US06653308-20031125-C00199.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/624,632 US4044937A (en) 1975-10-21 1975-10-21 Multiple ball element wafer breaking apparatus

Publications (1)

Publication Number Publication Date
CH600569A5 true CH600569A5 (US06653308-20031125-C00199.png) 1978-06-15

Family

ID=24502723

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1279776A CH600569A5 (US06653308-20031125-C00199.png) 1975-10-21 1976-10-08

Country Status (6)

Country Link
US (1) US4044937A (US06653308-20031125-C00199.png)
JP (1) JPS5250685A (US06653308-20031125-C00199.png)
CH (1) CH600569A5 (US06653308-20031125-C00199.png)
ES (1) ES452562A1 (US06653308-20031125-C00199.png)
FR (1) FR2328555A1 (US06653308-20031125-C00199.png)
GB (1) GB1492000A (US06653308-20031125-C00199.png)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63214365A (ja) * 1987-03-02 1988-09-07 Takeuchi Tekko Kk 車室内薬液噴霧装置
JPS63214364A (ja) * 1987-03-02 1988-09-07 Takeuchi Tekko Kk 車室内薬液噴霧装置
DE69204828T2 (de) * 1992-06-09 1996-05-02 Ibm Herstellung von Laserdioden mit durch Spaltung erzeugten Stirnflächen auf einem vollständigen Wafer.
IT1274540B (it) * 1995-05-22 1997-07-17 Alcatel Italia Metodo e dispositivo per eseguire la sfaldatura in ultra-vuoto di porzioni di wafer di semiconduttore processato
JP3228140B2 (ja) * 1996-08-19 2001-11-12 松下電器産業株式会社 導電性ボールの搭載方法
US6048747A (en) * 1998-05-01 2000-04-11 Lucent Technologies, Inc. Laser bar cleaving apparatus
FR2794284B1 (fr) * 1999-05-31 2001-08-10 St Microelectronics Sa Procede et outillage de coupe de produits semiconducteurs
US6551048B1 (en) * 2000-07-12 2003-04-22 National Semiconductor Corporation Off-load system for semiconductor devices
JP2006024591A (ja) * 2004-07-06 2006-01-26 Hugle Electronics Inc ブレーキングエキスパンダ
JP6462414B2 (ja) * 2015-02-27 2019-01-30 株式会社ディスコ 分割装置
JP6629096B2 (ja) * 2016-02-24 2020-01-15 株式会社ディスコ 板状物の分割装置
CN110304633B (zh) * 2019-07-17 2020-12-15 亚洲硅业(青海)股份有限公司 一种还原炉硅棒出炉装置
JP7309191B2 (ja) * 2019-11-06 2023-07-18 中村留精密工業株式会社 ウェハー分割装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3917139A (en) * 1975-01-22 1975-11-04 Nikolai Pavlovich Kabanov Apparatus for cutting shapes out of glass sheets
US3040489A (en) * 1959-03-13 1962-06-26 Motorola Inc Semiconductor dicing
US3562058A (en) * 1967-05-16 1971-02-09 Texas Instruments Inc Method for breaking and separating substrate material
US3493155A (en) * 1969-05-05 1970-02-03 Nasa Apparatus and method for separating a semiconductor wafer
US3687345A (en) * 1970-11-23 1972-08-29 Signetics Corp Method and apparatus for aligning and breaking wafers
US3918150A (en) * 1974-02-08 1975-11-11 Gen Electric System for separating a semiconductor wafer into discrete pellets

Also Published As

Publication number Publication date
GB1492000A (en) 1977-11-16
JPS5250685A (en) 1977-04-22
JPS5320378B2 (US06653308-20031125-C00199.png) 1978-06-26
US4044937A (en) 1977-08-30
FR2328555A1 (fr) 1977-05-20
FR2328555B1 (US06653308-20031125-C00199.png) 1978-12-15
ES452562A1 (es) 1977-11-16

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Legal Events

Date Code Title Description
PL Patent ceased