CH576073A5 - - Google Patents

Info

Publication number
CH576073A5
CH576073A5 CH1583074A CH1583074A CH576073A5 CH 576073 A5 CH576073 A5 CH 576073A5 CH 1583074 A CH1583074 A CH 1583074A CH 1583074 A CH1583074 A CH 1583074A CH 576073 A5 CH576073 A5 CH 576073A5
Authority
CH
Switzerland
Application number
CH1583074A
Original Assignee
Leybold Heraeus Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Gmbh & Co Kg filed Critical Leybold Heraeus Gmbh & Co Kg
Publication of CH576073A5 publication Critical patent/CH576073A5/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F04D29/0513—Axial thrust balancing hydrostatic; hydrodynamic thrust bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CH1583074A 1973-11-29 1974-11-28 CH576073A5 (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2359456A DE2359456A1 (de) 1973-11-29 1973-11-29 Turbomolekularvakuumpumpe mit gasgelagertem rotor

Publications (1)

Publication Number Publication Date
CH576073A5 true CH576073A5 (xx) 1976-05-31

Family

ID=5899403

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1583074A CH576073A5 (xx) 1973-11-29 1974-11-28

Country Status (5)

Country Link
US (1) US3969042A (xx)
CH (1) CH576073A5 (xx)
DE (1) DE2359456A1 (xx)
FR (1) FR2253156B3 (xx)
GB (1) GB1473374A (xx)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180370A (en) * 1975-03-22 1979-12-25 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Turbomolecular pump
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
US4364612A (en) * 1980-08-05 1982-12-21 Casper S.P.A. Lower pair kinematic assembly with hydrostatic bearing
FR2521650A1 (fr) * 1982-02-16 1983-08-19 Cit Alcatel Pompe rotative a vide eleve
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
FR2567208B1 (fr) * 1984-07-05 1988-12-09 Cit Alcatel Pompe rotative a vide eleve
ATE32931T1 (de) * 1984-07-16 1988-03-15 Cp Pumpen Ag Kreiselpumpe mit einem spaltrohrtopf.
GB2165592B (en) * 1984-10-04 1988-06-22 Sperry Sun Inc Devices for imparting rotary motion
DE3600124A1 (de) * 1986-01-04 1987-07-16 Fortuna Werke Maschf Ag Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser
US4835114A (en) * 1986-02-19 1989-05-30 Hitachi, Ltd. Method for LPCVD of semiconductors using oil free vacuum pumps
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
US6137195A (en) * 1996-03-28 2000-10-24 Anorad Corporation Rotary-linear actuator
US5952744A (en) * 1996-03-28 1999-09-14 Anoiad Corporation Rotary-linear actuator
US7218017B1 (en) 1996-06-24 2007-05-15 Anorad Corporation System and method to control a rotary-linear actuator
US5833374A (en) * 1997-05-19 1998-11-10 Varian Associates, Inc. Rotatable assembly for supporting of the rotor of a vacuum pump
US6147424A (en) * 1997-07-18 2000-11-14 Sankyo Seiki Mfg. Co., Ltd. Gas dynamic pressure bearing apparatus
DE19756837C2 (de) * 1997-12-19 1999-09-30 K Busch Gmbh Druck & Vakuum Dr Molekular- und Viskositätspumpe
DE19809957A1 (de) * 1998-03-07 1999-09-09 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
EP1024294A3 (en) 1999-01-29 2002-03-13 Ibiden Co., Ltd. Motor and turbo-molecular pump
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
JP4152553B2 (ja) * 2000-02-10 2008-09-17 Ｔｈｋ株式会社 タービンロータを備えたスピンドル装置
DE20014189U1 (de) * 2000-08-17 2001-04-05 Hsieh Hsin Mao Lüfter
JP2002339957A (ja) * 2001-05-16 2002-11-27 Sankyo Seiki Mfg Co Ltd 軸受装置
DE502004003827D1 (de) * 2004-01-29 2007-06-28 Pfeiffer Vacuum Gmbh Gasreibungspumpe
GB0701609D0 (en) 2007-01-29 2007-03-07 Boc Group Plc Vacuum pump
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
JP4347395B2 (ja) * 2008-03-13 2009-10-21 ファナック株式会社 ロータ側から駆動用流体を噴射することにより駆動するスピンドル
DE102010045716A1 (de) * 2010-09-16 2012-03-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10598222B2 (en) 2012-01-03 2020-03-24 New Way Machine Components, Inc. Air bearing for use as seal
WO2018057717A1 (en) * 2016-09-24 2018-03-29 Radiant Physics Inc. Pressurized gas bearings for rotating machinery
USD817753S1 (en) 2017-03-09 2018-05-15 Woodward, Inc. Spring array
RU2680292C1 (ru) * 2018-04-10 2019-02-19 Виталий Николаевич Ключник Насос

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
FR1469527A (fr) * 1965-12-03 1967-02-17 Messier Fa Pompe ou moteur hydraulique à barillet tournant
US3570191A (en) * 1969-04-22 1971-03-16 Tydeman Machine Works Inc Hydrostatic spindle
US3639791A (en) * 1970-02-13 1972-02-01 Speedring Corp Hydrostatic air bearing
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives

Also Published As

Publication number Publication date
US3969042A (en) 1976-07-13
FR2253156A1 (xx) 1975-06-27
GB1473374A (en) 1977-05-11
FR2253156B3 (xx) 1977-08-26
DE2359456A1 (de) 1975-06-05

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Legal Events

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