CH537096A - Appareil de masquage optique d'une couche photosensible - Google Patents
Appareil de masquage optique d'une couche photosensibleInfo
- Publication number
- CH537096A CH537096A CH1275771A CH1275771A CH537096A CH 537096 A CH537096 A CH 537096A CH 1275771 A CH1275771 A CH 1275771A CH 1275771 A CH1275771 A CH 1275771A CH 537096 A CH537096 A CH 537096A
- Authority
- CH
- Switzerland
- Prior art keywords
- objective
- semi
- objectives
- mask
- optical masking
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims description 45
- 230000000873 masking effect Effects 0.000 title claims description 18
- 230000005855 radiation Effects 0.000 claims description 14
- 239000012528 membrane Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000004304 visual acuity Effects 0.000 description 13
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 230000004075 alteration Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 201000009310 astigmatism Diseases 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002775 capsule Substances 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7110838A FR2130955A6 (OSRAM) | 1971-03-26 | 1971-03-26 | |
| FR7126053A FR2146512A6 (OSRAM) | 1971-07-16 | 1971-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH537096A true CH537096A (fr) | 1973-05-15 |
Family
ID=26216288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1275771A CH537096A (fr) | 1971-03-26 | 1971-08-31 | Appareil de masquage optique d'une couche photosensible |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE772057A (OSRAM) |
| CH (1) | CH537096A (OSRAM) |
| DD (1) | DD94438A5 (OSRAM) |
| IT (1) | IT939372B (OSRAM) |
| NL (1) | NL7112018A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT406100B (de) * | 1996-08-08 | 2000-02-25 | Thallner Erich | Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen |
-
1971
- 1971-08-31 CH CH1275771A patent/CH537096A/fr not_active IP Right Cessation
- 1971-09-01 BE BE772057A patent/BE772057A/xx unknown
- 1971-09-01 NL NL7112018A patent/NL7112018A/xx unknown
- 1971-09-03 IT IT5265471A patent/IT939372B/it active
- 1971-09-03 DD DD15752971A patent/DD94438A5/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DD94438A5 (OSRAM) | 1972-12-12 |
| IT939372B (it) | 1973-02-10 |
| BE772057A (fr) | 1972-01-17 |
| NL7112018A (OSRAM) | 1972-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |