IT939372B - Apparecchio per il mascheramento ottico di strati fotosensibili - Google Patents

Apparecchio per il mascheramento ottico di strati fotosensibili

Info

Publication number
IT939372B
IT939372B IT5265471A IT5265471A IT939372B IT 939372 B IT939372 B IT 939372B IT 5265471 A IT5265471 A IT 5265471A IT 5265471 A IT5265471 A IT 5265471A IT 939372 B IT939372 B IT 939372B
Authority
IT
Italy
Prior art keywords
equipment
photosensitive layers
optical masking
masking
optical
Prior art date
Application number
IT5265471A
Other languages
English (en)
Italian (it)
Original Assignee
Delmas J
Microlec Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7110838A external-priority patent/FR2130955A6/fr
Priority claimed from FR7126053A external-priority patent/FR2146512A6/fr
Application filed by Delmas J, Microlec Sa filed Critical Delmas J
Application granted granted Critical
Publication of IT939372B publication Critical patent/IT939372B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IT5265471A 1971-03-26 1971-09-03 Apparecchio per il mascheramento ottico di strati fotosensibili IT939372B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7110838A FR2130955A6 (OSRAM) 1971-03-26 1971-03-26
FR7126053A FR2146512A6 (OSRAM) 1971-07-16 1971-07-16

Publications (1)

Publication Number Publication Date
IT939372B true IT939372B (it) 1973-02-10

Family

ID=26216288

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5265471A IT939372B (it) 1971-03-26 1971-09-03 Apparecchio per il mascheramento ottico di strati fotosensibili

Country Status (5)

Country Link
BE (1) BE772057A (OSRAM)
CH (1) CH537096A (OSRAM)
DD (1) DD94438A5 (OSRAM)
IT (1) IT939372B (OSRAM)
NL (1) NL7112018A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT406100B (de) * 1996-08-08 2000-02-25 Thallner Erich Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen

Also Published As

Publication number Publication date
DD94438A5 (OSRAM) 1972-12-12
CH537096A (fr) 1973-05-15
BE772057A (fr) 1972-01-17
NL7112018A (OSRAM) 1972-09-28

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