BE772057A - Appareil de masquage optique de couches - Google Patents

Appareil de masquage optique de couches

Info

Publication number
BE772057A
BE772057A BE772057A BE772057A BE772057A BE 772057 A BE772057 A BE 772057A BE 772057 A BE772057 A BE 772057A BE 772057 A BE772057 A BE 772057A BE 772057 A BE772057 A BE 772057A
Authority
BE
Belgium
Prior art keywords
optical layer
masking device
layer masking
optical
masking
Prior art date
Application number
BE772057A
Other languages
English (en)
French (fr)
Original Assignee
Delmas Jean Raymond
Microlec S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7110838A external-priority patent/FR2130955A6/fr
Priority claimed from FR7126053A external-priority patent/FR2146512A6/fr
Application filed by Delmas Jean Raymond, Microlec S A filed Critical Delmas Jean Raymond
Publication of BE772057A publication Critical patent/BE772057A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
BE772057A 1971-03-26 1971-09-01 Appareil de masquage optique de couches BE772057A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7110838A FR2130955A6 (OSRAM) 1971-03-26 1971-03-26
FR7126053A FR2146512A6 (OSRAM) 1971-07-16 1971-07-16

Publications (1)

Publication Number Publication Date
BE772057A true BE772057A (fr) 1972-01-17

Family

ID=26216288

Family Applications (1)

Application Number Title Priority Date Filing Date
BE772057A BE772057A (fr) 1971-03-26 1971-09-01 Appareil de masquage optique de couches

Country Status (5)

Country Link
BE (1) BE772057A (OSRAM)
CH (1) CH537096A (OSRAM)
DD (1) DD94438A5 (OSRAM)
IT (1) IT939372B (OSRAM)
NL (1) NL7112018A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT406100B (de) * 1996-08-08 2000-02-25 Thallner Erich Kontaktbelichtungsverfahren zur herstellung von halbleiterbausteinen

Also Published As

Publication number Publication date
DD94438A5 (OSRAM) 1972-12-12
IT939372B (it) 1973-02-10
CH537096A (fr) 1973-05-15
NL7112018A (OSRAM) 1972-09-28

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