SE383780B - Interferometeranordning - Google Patents

Interferometeranordning

Info

Publication number
SE383780B
SE383780B SE7201037A SE103772A SE383780B SE 383780 B SE383780 B SE 383780B SE 7201037 A SE7201037 A SE 7201037A SE 103772 A SE103772 A SE 103772A SE 383780 B SE383780 B SE 383780B
Authority
SE
Sweden
Prior art keywords
interferometer device
interferometer
Prior art date
Application number
SE7201037A
Other languages
English (en)
Inventor
G B Gordon
R R Baldwin
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of SE383780B publication Critical patent/SE383780B/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
SE7201037A 1971-02-01 1972-01-31 Interferometeranordning SE383780B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
SE383780B true SE383780B (sv) 1976-03-29

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7201037A SE383780B (sv) 1971-02-01 1972-01-31 Interferometeranordning

Country Status (6)

Country Link
CA (1) CA950657A (sv)
DE (1) DE2201194B2 (sv)
FR (1) FR2124998A5 (sv)
GB (1) GB1375091A (sv)
IT (1) IT950612B (sv)
SE (1) SE383780B (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE9183T1 (de) * 1980-12-02 1984-09-15 Dr. Johannes Heidenhain Gmbh Verfahren zum schrittweisen messen von geometrischen groessen und vorrichtungen zur durchfuehrung des verfahrens.
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Also Published As

Publication number Publication date
IT950612B (it) 1973-06-20
DE2201194B2 (de) 1973-01-04
AU3752271A (en) 1973-09-27
CA950657A (en) 1974-07-09
DE2201194A1 (de) 1972-08-17
FR2124998A5 (sv) 1972-09-22
GB1375091A (sv) 1974-11-27

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