CA950657A - Laser interferometer system comprising passive interferometer section and active section - Google Patents

Laser interferometer system comprising passive interferometer section and active section

Info

Publication number
CA950657A
CA950657A CA130,952,A CA130952A CA950657A CA 950657 A CA950657 A CA 950657A CA 130952 A CA130952 A CA 130952A CA 950657 A CA950657 A CA 950657A
Authority
CA
Canada
Prior art keywords
section
interferometer
passive
active
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA130,952,A
Other languages
English (en)
Other versions
CA130952S (en
Inventor
Richard R. Baldwin
Gary B. Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of CA950657A publication Critical patent/CA950657A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CA130,952,A 1971-02-01 1971-12-23 Laser interferometer system comprising passive interferometer section and active section Expired CA950657A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
CA950657A true CA950657A (en) 1974-07-09

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
CA130,952,A Expired CA950657A (en) 1971-02-01 1971-12-23 Laser interferometer system comprising passive interferometer section and active section

Country Status (6)

Country Link
CA (1) CA950657A (sv)
DE (1) DE2201194B2 (sv)
FR (1) FR2124998A5 (sv)
GB (1) GB1375091A (sv)
IT (1) IT950612B (sv)
SE (1) SE383780B (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053199B1 (de) * 1980-12-02 1984-08-29 Dr. Johannes Heidenhain GmbH Verfahren zum schrittweisen Messen von geometrischen Grössen und Vorrichtungen zur Durchführung des Verfahrens
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Also Published As

Publication number Publication date
DE2201194B2 (de) 1973-01-04
DE2201194A1 (de) 1972-08-17
FR2124998A5 (sv) 1972-09-22
AU3752271A (en) 1973-09-27
GB1375091A (sv) 1974-11-27
SE383780B (sv) 1976-03-29
IT950612B (it) 1973-06-20

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