IT950612B - Apparecchio interferometro a laser - Google Patents

Apparecchio interferometro a laser

Info

Publication number
IT950612B
IT950612B IT47996/72A IT4799672A IT950612B IT 950612 B IT950612 B IT 950612B IT 47996/72 A IT47996/72 A IT 47996/72A IT 4799672 A IT4799672 A IT 4799672A IT 950612 B IT950612 B IT 950612B
Authority
IT
Italy
Prior art keywords
laser interferometer
interferometer device
laser
interferometer
Prior art date
Application number
IT47996/72A
Other languages
English (en)
Italian (it)
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of IT950612B publication Critical patent/IT950612B/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
IT47996/72A 1971-02-01 1972-01-28 Apparecchio interferometro a laser IT950612B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11159671A 1971-02-01 1971-02-01

Publications (1)

Publication Number Publication Date
IT950612B true IT950612B (it) 1973-06-20

Family

ID=22339394

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47996/72A IT950612B (it) 1971-02-01 1972-01-28 Apparecchio interferometro a laser

Country Status (6)

Country Link
CA (1) CA950657A (sv)
DE (1) DE2201194B2 (sv)
FR (1) FR2124998A5 (sv)
GB (1) GB1375091A (sv)
IT (1) IT950612B (sv)
SE (1) SE383780B (sv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053199B1 (de) * 1980-12-02 1984-08-29 Dr. Johannes Heidenhain GmbH Verfahren zum schrittweisen Messen von geometrischen Grössen und Vorrichtungen zur Durchführung des Verfahrens
US4509858A (en) * 1983-01-17 1985-04-09 Gca Corporation/Tropel Division Compact, linear measurement interferometer with zero abbe error
DE3421213C2 (de) * 1984-06-07 1986-08-28 Daimler-Benz Ag, 7000 Stuttgart Zweikanal-Zweifrequenz-Laserinterferometer
DE3835892C1 (en) * 1988-10-21 1990-01-11 Daimler-Benz Aktiengesellschaft, 7000 Stuttgart, De Long-path laser interferometer

Also Published As

Publication number Publication date
DE2201194B2 (de) 1973-01-04
DE2201194A1 (de) 1972-08-17
FR2124998A5 (sv) 1972-09-22
AU3752271A (en) 1973-09-27
GB1375091A (sv) 1974-11-27
SE383780B (sv) 1976-03-29
CA950657A (en) 1974-07-09

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