CH522290A - Process for the gettering of rapidly diffusing impurities in semiconductor crystals - Google Patents

Process for the gettering of rapidly diffusing impurities in semiconductor crystals

Info

Publication number
CH522290A
CH522290A CH1869869A CH1869869A CH522290A CH 522290 A CH522290 A CH 522290A CH 1869869 A CH1869869 A CH 1869869A CH 1869869 A CH1869869 A CH 1869869A CH 522290 A CH522290 A CH 522290A
Authority
CH
Switzerland
Prior art keywords
gettering
semiconductor crystals
diffusing impurities
rapidly diffusing
rapidly
Prior art date
Application number
CH1869869A
Other languages
German (de)
Inventor
Sirtl Erhard Dr Dipl-Chem
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681816083 external-priority patent/DE1816083C3/en
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH522290A publication Critical patent/CH522290A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3228—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of AIIIBV compounds, e.g. to make them semi-insulating
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01D—HARVESTING; MOWING
    • A01D19/00—Digging machines with centrifugal wheels, drums or spinners
    • A01D19/04—Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel
    • A01D19/06—Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel with scoop wheels or drums
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
CH1869869A 1968-12-20 1969-12-16 Process for the gettering of rapidly diffusing impurities in semiconductor crystals CH522290A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681816083 DE1816083C3 (en) 1968-12-20 Process for the gettering of rapidly diffusing impurities in semiconductor crystal wafers

Publications (1)

Publication Number Publication Date
CH522290A true CH522290A (en) 1972-06-15

Family

ID=5716946

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1869869A CH522290A (en) 1968-12-20 1969-12-16 Process for the gettering of rapidly diffusing impurities in semiconductor crystals

Country Status (6)

Country Link
AT (1) AT311419B (en)
CH (1) CH522290A (en)
FR (1) FR2026656B1 (en)
GB (1) GB1267700A (en)
NL (1) NL6918858A (en)
SE (1) SE363243B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1307546A (en) * 1970-05-22 1973-02-21 Mullard Ltd Methods of manufacturing semiconductor devices
EP0323432A1 (en) * 1987-12-30 1989-07-05 Monsanto Company GaAs polycristalline gettering

Also Published As

Publication number Publication date
GB1267700A (en) 1972-03-22
FR2026656A1 (en) 1970-09-18
AT311419B (en) 1973-11-12
FR2026656B1 (en) 1975-04-18
DE1816083A1 (en) 1970-06-25
SE363243B (en) 1974-01-14
DE1816083B2 (en) 1976-05-13
NL6918858A (en) 1970-06-23

Similar Documents

Publication Publication Date Title
AT267443B (en) Process for the production of crystalline fructose
DE1918845B2 (en) METHOD FOR MANUFACTURING SEMICONDUCTOR ARRANGEMENTS
AT297659B (en) Process for the production of silicon carbide crystals
AT277161B (en) Process for the production of silicon carbide crystals
CH514236A (en) Semiconductor device and method of manufacturing the same
CH483725A (en) Planar semiconductor device and method of making the same
AT316894B (en) Semiconductor device and method of manufacturing the same
AT267050B (en) Process for obtaining the kallikrein inactivator in crystallized form
CH464152A (en) Process for the heat treatment of semiconductor single crystals
CH522290A (en) Process for the gettering of rapidly diffusing impurities in semiconductor crystals
CH512824A (en) Method of manufacturing semiconductor devices
CH523294A (en) Process for the production of heat-vulcanizable acrylate copolymers
CH509823A (en) Process for the production of single crystals
CH493939A (en) Process for the manufacture of truncated pyramidal semiconductor elements
AT306677B (en) Process for the extraction of yttrium
AT303686B (en) Process for making semiconductor interconnects
DE1941504B2 (en) PROCESS FOR THE PRODUCTION OF PURE ALUMINUM
CH488411A (en) Process for the manufacture of shaped tablets
HK36776A (en) Improvements in supports for semiconductor crystals
AT305377B (en) Process for the production of zones diffused with gallium in semiconductor crystals
AT273234B (en) Process for the production of planar double-diffused semiconductor components
BE745305A (en) PROCESS FOR MANUFACTURING FILIFORM CRYSTALS
CH538300A (en) Process for the production of wire-shaped crystals
CH494065A (en) Process for the production of semiconductor crystals
CH497792A (en) Method of manufacturing semiconductor devices

Legal Events

Date Code Title Description
PL Patent ceased