FR2026656B1 - - Google Patents

Info

Publication number
FR2026656B1
FR2026656B1 FR6943692A FR6943692A FR2026656B1 FR 2026656 B1 FR2026656 B1 FR 2026656B1 FR 6943692 A FR6943692 A FR 6943692A FR 6943692 A FR6943692 A FR 6943692A FR 2026656 B1 FR2026656 B1 FR 2026656B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6943692A
Other languages
French (fr)
Other versions
FR2026656A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681816083 external-priority patent/DE1816083C3/en
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2026656A1 publication Critical patent/FR2026656A1/fr
Application granted granted Critical
Publication of FR2026656B1 publication Critical patent/FR2026656B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3228Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of AIIIBV compounds, e.g. to make them semi-insulating
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01DHARVESTING; MOWING
    • A01D19/00Digging machines with centrifugal wheels, drums or spinners
    • A01D19/04Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel
    • A01D19/06Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel with scoop wheels or drums
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
FR6943692A 1968-12-20 1969-12-17 Expired FR2026656B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681816083 DE1816083C3 (en) 1968-12-20 Process for the gettering of rapidly diffusing impurities in semiconductor crystal wafers

Publications (2)

Publication Number Publication Date
FR2026656A1 FR2026656A1 (en) 1970-09-18
FR2026656B1 true FR2026656B1 (en) 1975-04-18

Family

ID=5716946

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6943692A Expired FR2026656B1 (en) 1968-12-20 1969-12-17

Country Status (6)

Country Link
AT (1) AT311419B (en)
CH (1) CH522290A (en)
FR (1) FR2026656B1 (en)
GB (1) GB1267700A (en)
NL (1) NL6918858A (en)
SE (1) SE363243B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1307546A (en) * 1970-05-22 1973-02-21 Mullard Ltd Methods of manufacturing semiconductor devices
EP0323432A1 (en) * 1987-12-30 1989-07-05 Monsanto Company GaAs polycristalline gettering

Also Published As

Publication number Publication date
GB1267700A (en) 1972-03-22
FR2026656A1 (en) 1970-09-18
AT311419B (en) 1973-11-12
CH522290A (en) 1972-06-15
DE1816083A1 (en) 1970-06-25
SE363243B (en) 1974-01-14
DE1816083B2 (en) 1976-05-13
NL6918858A (en) 1970-06-23

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Legal Events

Date Code Title Description
ST Notification of lapse