CH516225A - Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method - Google Patents

Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method

Info

Publication number
CH516225A
CH516225A CH1208870A CH1208870A CH516225A CH 516225 A CH516225 A CH 516225A CH 1208870 A CH1208870 A CH 1208870A CH 1208870 A CH1208870 A CH 1208870A CH 516225 A CH516225 A CH 516225A
Authority
CH
Switzerland
Prior art keywords
electron
evaporation
carrying
operating
high vacuum
Prior art date
Application number
CH1208870A
Other languages
German (de)
Inventor
Hacman Dionys
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1208870A priority Critical patent/CH516225A/en
Priority to NL7014861A priority patent/NL7014861A/xx
Priority to DE19702050651 priority patent/DE2050651C3/en
Priority to FR7126624A priority patent/FR2101871A5/fr
Priority to GB3433671A priority patent/GB1334126A/en
Publication of CH516225A publication Critical patent/CH516225A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
CH1208870A 1970-08-12 1970-08-12 Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method CH516225A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1208870A CH516225A (en) 1970-08-12 1970-08-12 Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method
NL7014861A NL7014861A (en) 1970-08-12 1970-10-09
DE19702050651 DE2050651C3 (en) 1970-08-12 1970-10-15 Method for operating an electron beam generating device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under an ultra-high vacuum and device for carrying out the method
FR7126624A FR2101871A5 (en) 1970-08-12 1971-07-21
GB3433671A GB1334126A (en) 1970-08-12 1971-07-22 Evaporation and or treatment of materials in ultra-high vacuum by electron beans

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1208870A CH516225A (en) 1970-08-12 1970-08-12 Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method

Publications (1)

Publication Number Publication Date
CH516225A true CH516225A (en) 1971-11-30

Family

ID=4379742

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1208870A CH516225A (en) 1970-08-12 1970-08-12 Method for operating a device having an electron-emitting cathode and an auxiliary electrode for beam shaping for the evaporation and / or processing of materials under ultra-high vacuum by means of an electron beam and device for carrying out the method

Country Status (5)

Country Link
CH (1) CH516225A (en)
DE (1) DE2050651C3 (en)
FR (1) FR2101871A5 (en)
GB (1) GB1334126A (en)
NL (1) NL7014861A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4556471A (en) * 1983-10-14 1985-12-03 Multi-Arc Vacuum Systems Inc. Physical vapor deposition apparatus
CN105826148A (en) * 2016-04-14 2016-08-03 中国科学院电子学研究所 Method, device and system for degassing of part of microwave vacuum electronic device

Also Published As

Publication number Publication date
DE2050651C3 (en) 1974-05-30
GB1334126A (en) 1973-10-17
DE2050651A1 (en) 1972-02-17
FR2101871A5 (en) 1972-03-31
DE2050651B2 (en) 1973-10-31
NL7014861A (en) 1972-02-15

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Legal Events

Date Code Title Description
PL Patent ceased