CH524140A - Method for examining a sample by means of electron beam scanning microscopy and electron beam microanalysis - Google Patents

Method for examining a sample by means of electron beam scanning microscopy and electron beam microanalysis

Info

Publication number
CH524140A
CH524140A CH95671A CH95671A CH524140A CH 524140 A CH524140 A CH 524140A CH 95671 A CH95671 A CH 95671A CH 95671 A CH95671 A CH 95671A CH 524140 A CH524140 A CH 524140A
Authority
CH
Switzerland
Prior art keywords
electron beam
examining
sample
scanning microscopy
microanalysis
Prior art date
Application number
CH95671A
Other languages
German (de)
Inventor
Weber Ulrich Dr Dipl-Phys
Juergen Dipl Phys Gullasch
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH524140A publication Critical patent/CH524140A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH95671A 1970-02-07 1971-01-22 Method for examining a sample by means of electron beam scanning microscopy and electron beam microanalysis CH524140A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2005682A DE2005682C3 (en) 1970-02-07 1970-02-07 Device for extracting the secondary electrons in a scanning electron microscope or an electron beam microanalyser

Publications (1)

Publication Number Publication Date
CH524140A true CH524140A (en) 1972-06-15

Family

ID=5761726

Family Applications (1)

Application Number Title Priority Date Filing Date
CH95671A CH524140A (en) 1970-02-07 1971-01-22 Method for examining a sample by means of electron beam scanning microscopy and electron beam microanalysis

Country Status (5)

Country Link
US (1) US3736422A (en)
CH (1) CH524140A (en)
DE (1) DE2005682C3 (en)
FR (1) FR2078240A5 (en)
GB (1) GB1284708A (en)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1403946A (en) * 1973-05-23 1975-08-28 Mullard Ltd Spectroscopy
JPS5428710B2 (en) * 1972-11-01 1979-09-18
GB1447983A (en) * 1973-01-10 1976-09-02 Nat Res Dev Detector for electron microscopes
US4086491A (en) * 1977-02-04 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Direct measurement of the electron beam of a scanning electron microscope
DE2922325A1 (en) * 1979-06-01 1980-12-11 Philips Patentverwaltung GRID ELECTRON MICROSCOPE
EP0263839A1 (en) * 1986-02-18 1988-04-20 Cambridge Instruments Limited Specimen chamber for scanning electron beam instruments
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
US4933552A (en) * 1988-10-06 1990-06-12 International Business Machines Corporation Inspection system utilizing retarding field back scattered electron collection
JP2927627B2 (en) * 1992-10-20 1999-07-28 株式会社日立製作所 Scanning electron microscope
JP3194552B2 (en) * 1993-06-24 2001-07-30 富士通株式会社 Charged particle beam exposure system
JP3251875B2 (en) * 1996-05-10 2002-01-28 株式会社東芝 Charged particle beam exposure system
JP3564958B2 (en) * 1997-08-07 2004-09-15 株式会社日立製作所 Inspection method and inspection apparatus using electron beam
DE69901787T2 (en) * 1999-03-31 2002-11-21 Advantest Corp., Tokio/Tokyo Method and device for mapping a surface potential
US6586736B1 (en) * 1999-09-10 2003-07-01 Kla-Tencor, Corporation Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
US6664546B1 (en) 2000-02-10 2003-12-16 Kla-Tencor In-situ probe for optimizing electron beam inspection and metrology based on surface potential
WO2002037523A2 (en) * 2000-10-31 2002-05-10 Koninklijke Philips Electronics N.V. Sem provided with an adjustable voltage of the final electrode in the electrostatic objective
JP4443167B2 (en) 2003-08-25 2010-03-31 株式会社日立製作所 Scanning electron microscope
EP1648018B1 (en) * 2004-10-14 2017-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Focussing lens and charged particle beam device for non zero landing angle operation
JP5645386B2 (en) * 2009-09-30 2014-12-24 株式会社日立製作所 Electromagnetic field application device
DE102010011059A1 (en) 2010-03-11 2011-09-15 Global Beam Technologies Ag Method and device for producing a component
WO2012109340A1 (en) 2011-02-08 2012-08-16 Atti International Services Company, Inc. Electron beam profile measurement system and method with "moms"
JP5852474B2 (en) * 2012-03-01 2016-02-03 株式会社日立ハイテクノロジーズ Charged particle beam equipment
US9997331B1 (en) * 2014-01-27 2018-06-12 Mochii, Inc. Charged-particle beam microscopy
US9564291B1 (en) 2014-01-27 2017-02-07 Mochii, Inc. Hybrid charged-particle beam and light beam microscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103584A (en) * 1963-09-10 Electron microanalyzer system
NL285495A (en) * 1961-11-18
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3315157A (en) * 1963-07-22 1967-04-18 Hitachi Ltd Apparatus for impedance measurement through the use of electron beam probes
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
FR2078240A5 (en) 1971-11-05
DE2005682A1 (en) 1971-09-09
US3736422A (en) 1973-05-29
DE2005682B2 (en) 1973-10-18
GB1284708A (en) 1972-08-09
DE2005682C3 (en) 1974-05-09

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Legal Events

Date Code Title Description
PL Patent ceased