FR2078240A5 - - Google Patents
Info
- Publication number
- FR2078240A5 FR2078240A5 FR7103906A FR7103906A FR2078240A5 FR 2078240 A5 FR2078240 A5 FR 2078240A5 FR 7103906 A FR7103906 A FR 7103906A FR 7103906 A FR7103906 A FR 7103906A FR 2078240 A5 FR2078240 A5 FR 2078240A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
- H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2005682A DE2005682C3 (en) | 1970-02-07 | 1970-02-07 | Device for extracting the secondary electrons in a scanning electron microscope or an electron beam microanalyser |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2078240A5 true FR2078240A5 (en) | 1971-11-05 |
Family
ID=5761726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7103906A Expired FR2078240A5 (en) | 1970-02-07 | 1971-02-05 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3736422A (en) |
CH (1) | CH524140A (en) |
DE (1) | DE2005682C3 (en) |
FR (1) | FR2078240A5 (en) |
GB (1) | GB1284708A (en) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1403946A (en) * | 1973-05-23 | 1975-08-28 | Mullard Ltd | Spectroscopy |
JPS5428710B2 (en) * | 1972-11-01 | 1979-09-18 | ||
GB1447983A (en) * | 1973-01-10 | 1976-09-02 | Nat Res Dev | Detector for electron microscopes |
US4086491A (en) * | 1977-02-04 | 1978-04-25 | The United States Of America As Represented By The Secretary Of The Navy | Direct measurement of the electron beam of a scanning electron microscope |
DE2922325A1 (en) * | 1979-06-01 | 1980-12-11 | Philips Patentverwaltung | GRID ELECTRON MICROSCOPE |
EP0263839A1 (en) * | 1986-02-18 | 1988-04-20 | Cambridge Instruments Limited | Specimen chamber for scanning electron beam instruments |
GB8604004D0 (en) * | 1986-02-18 | 1986-03-26 | Cambridge Instr Ltd | Specimen chamber |
US4933552A (en) * | 1988-10-06 | 1990-06-12 | International Business Machines Corporation | Inspection system utilizing retarding field back scattered electron collection |
JP2927627B2 (en) * | 1992-10-20 | 1999-07-28 | 株式会社日立製作所 | Scanning electron microscope |
JP3194552B2 (en) * | 1993-06-24 | 2001-07-30 | 富士通株式会社 | Charged particle beam exposure system |
JP3251875B2 (en) * | 1996-05-10 | 2002-01-28 | 株式会社東芝 | Charged particle beam exposure system |
JP3564958B2 (en) | 1997-08-07 | 2004-09-15 | 株式会社日立製作所 | Inspection method and inspection apparatus using electron beam |
DE69901787T2 (en) * | 1999-03-31 | 2002-11-21 | Advantest Corp., Tokio/Tokyo | Method and device for mapping a surface potential |
US6586736B1 (en) * | 1999-09-10 | 2003-07-01 | Kla-Tencor, Corporation | Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
US6664546B1 (en) | 2000-02-10 | 2003-12-16 | Kla-Tencor | In-situ probe for optimizing electron beam inspection and metrology based on surface potential |
JP2004513477A (en) * | 2000-10-31 | 2004-04-30 | フェイ カンパニ | SEM with adjustable final electrode for electrostatic objective |
JP4443167B2 (en) | 2003-08-25 | 2010-03-31 | 株式会社日立製作所 | Scanning electron microscope |
EP1648018B1 (en) * | 2004-10-14 | 2017-02-22 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Focussing lens and charged particle beam device for non zero landing angle operation |
JP5645386B2 (en) * | 2009-09-30 | 2014-12-24 | 株式会社日立製作所 | Electromagnetic field application device |
DE102010011059A1 (en) | 2010-03-11 | 2011-09-15 | Global Beam Technologies Ag | Method and device for producing a component |
WO2012109340A1 (en) | 2011-02-08 | 2012-08-16 | Atti International Services Company, Inc. | Electron beam profile measurement system and method with "moms" |
JP5852474B2 (en) * | 2012-03-01 | 2016-02-03 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
US9997331B1 (en) * | 2014-01-27 | 2018-06-12 | Mochii, Inc. | Charged-particle beam microscopy |
US9564291B1 (en) | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3103584A (en) * | 1963-09-10 | Electron microanalyzer system | ||
NL285495A (en) * | 1961-11-18 | |||
US3158733A (en) * | 1962-09-12 | 1964-11-24 | Nat Res Corp | Focus control for electron beam heating |
US3315157A (en) * | 1963-07-22 | 1967-04-18 | Hitachi Ltd | Apparatus for impedance measurement through the use of electron beam probes |
GB1128107A (en) * | 1965-06-23 | 1968-09-25 | Hitachi Ltd | Scanning electron microscope |
-
1970
- 1970-02-07 DE DE2005682A patent/DE2005682C3/en not_active Expired
-
1971
- 1971-01-22 CH CH95671A patent/CH524140A/en not_active IP Right Cessation
- 1971-02-05 FR FR7103906A patent/FR2078240A5/fr not_active Expired
- 1971-02-08 US US00112919A patent/US3736422A/en not_active Expired - Lifetime
- 1971-04-19 GB GB21245/71A patent/GB1284708A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE2005682A1 (en) | 1971-09-09 |
CH524140A (en) | 1972-06-15 |
US3736422A (en) | 1973-05-29 |
DE2005682C3 (en) | 1974-05-09 |
GB1284708A (en) | 1972-08-09 |
DE2005682B2 (en) | 1973-10-18 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |