CH509609A - Verfahren zur Mehrfachabbildung eines beleuchteten oder selbstleuchtenden Gegenstandes - Google Patents
Verfahren zur Mehrfachabbildung eines beleuchteten oder selbstleuchtenden GegenstandesInfo
- Publication number
- CH509609A CH509609A CH1160368A CH1160368A CH509609A CH 509609 A CH509609 A CH 509609A CH 1160368 A CH1160368 A CH 1160368A CH 1160368 A CH1160368 A CH 1160368A CH 509609 A CH509609 A CH 509609A
- Authority
- CH
- Switzerland
- Prior art keywords
- illuminated
- self
- multiple imaging
- luminous object
- luminous
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/88—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters
- G06V10/89—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators
- G06V10/893—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter
- G06V10/895—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter the filter being related to phase processing, e.g. phase-only filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0275—Photolithographic processes using lasers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Multimedia (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Holo Graphy (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEP0042772 | 1967-08-05 | ||
| DE19671572805 DE1572805B1 (de) | 1967-08-05 | 1967-08-05 | Verfahren zur Bildvervielfachung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH509609A true CH509609A (de) | 1971-06-30 |
Family
ID=25753128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1160368A CH509609A (de) | 1967-08-05 | 1968-08-02 | Verfahren zur Mehrfachabbildung eines beleuchteten oder selbstleuchtenden Gegenstandes |
Country Status (7)
| Country | Link |
|---|---|
| AT (1) | AT293058B (enrdf_load_stackoverflow) |
| BE (1) | BE719091A (enrdf_load_stackoverflow) |
| CH (1) | CH509609A (enrdf_load_stackoverflow) |
| DE (1) | DE1572805B1 (enrdf_load_stackoverflow) |
| FR (1) | FR1579159A (enrdf_load_stackoverflow) |
| GB (1) | GB1227151A (enrdf_load_stackoverflow) |
| NL (1) | NL6810976A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0266120A3 (en) * | 1986-10-31 | 1990-07-11 | AT&T Corp. | Generating an array of light spots having uniform intensity |
| JPH0536586A (ja) * | 1991-08-02 | 1993-02-12 | Canon Inc | 像投影方法及び該方法を用いた半導体デバイスの製造方法 |
| JP3194155B2 (ja) * | 1992-01-31 | 2001-07-30 | キヤノン株式会社 | 半導体デバイスの製造方法及びそれを用いた投影露光装置 |
| JP3210123B2 (ja) * | 1992-03-27 | 2001-09-17 | キヤノン株式会社 | 結像方法及び該方法を用いたデバイス製造方法 |
-
1967
- 1967-08-05 DE DE19671572805 patent/DE1572805B1/de not_active Withdrawn
-
1968
- 1968-08-01 NL NL6810976A patent/NL6810976A/xx unknown
- 1968-08-02 GB GB1227151D patent/GB1227151A/en not_active Expired
- 1968-08-02 CH CH1160368A patent/CH509609A/de not_active IP Right Cessation
- 1968-08-02 AT AT754468A patent/AT293058B/de not_active IP Right Cessation
- 1968-08-05 FR FR1579159D patent/FR1579159A/fr not_active Expired
- 1968-08-05 BE BE719091D patent/BE719091A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| BE719091A (enrdf_load_stackoverflow) | 1969-02-05 |
| DE1572805B1 (de) | 1970-08-27 |
| NL6810976A (enrdf_load_stackoverflow) | 1969-02-03 |
| AT293058B (de) | 1971-09-27 |
| GB1227151A (enrdf_load_stackoverflow) | 1971-04-07 |
| FR1579159A (enrdf_load_stackoverflow) | 1969-08-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |