CH504106A - Verfahren zur Herstellung von Halbleiterbauelementen unter Verwendung eines selektiven Ätzvorgangs - Google Patents
Verfahren zur Herstellung von Halbleiterbauelementen unter Verwendung eines selektiven ÄtzvorgangsInfo
- Publication number
- CH504106A CH504106A CH1499969A CH1499969A CH504106A CH 504106 A CH504106 A CH 504106A CH 1499969 A CH1499969 A CH 1499969A CH 1499969 A CH1499969 A CH 1499969A CH 504106 A CH504106 A CH 504106A
- Authority
- CH
- Switzerland
- Prior art keywords
- production
- semiconductor components
- selective etching
- etching process
- selective
- Prior art date
Links
- 238000000034 method Methods 0.000 title 2
- 238000005530 etching Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6814415A NL6814415A (de) | 1968-10-09 | 1968-10-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH504106A true CH504106A (de) | 1971-02-28 |
Family
ID=19804886
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1499969A CH504106A (de) | 1968-10-09 | 1969-10-06 | Verfahren zur Herstellung von Halbleiterbauelementen unter Verwendung eines selektiven Ätzvorgangs |
Country Status (7)
Country | Link |
---|---|
BE (1) | BE739941A (de) |
BR (1) | BR6913205D0 (de) |
CH (1) | CH504106A (de) |
FR (1) | FR2020229B1 (de) |
GB (1) | GB1289147A (de) |
NL (1) | NL6814415A (de) |
SE (1) | SE344141B (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8426915D0 (en) * | 1984-10-24 | 1984-11-28 | Marconi Instruments Ltd | Fabricating devices on semiconductor substrates |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3418226A (en) * | 1965-05-18 | 1968-12-24 | Ibm | Method of electrolytically etching a semiconductor having a single impurity gradient |
-
1968
- 1968-10-09 NL NL6814415A patent/NL6814415A/xx unknown
-
1969
- 1969-10-06 CH CH1499969A patent/CH504106A/de not_active IP Right Cessation
- 1969-10-07 SE SE1378869A patent/SE344141B/xx unknown
- 1969-10-07 BE BE739941D patent/BE739941A/xx unknown
- 1969-10-08 GB GB1289147D patent/GB1289147A/en not_active Expired
- 1969-10-08 FR FR6934386A patent/FR2020229B1/fr not_active Expired
- 1969-10-09 BR BR21320569A patent/BR6913205D0/pt unknown
Also Published As
Publication number | Publication date |
---|---|
FR2020229A1 (de) | 1970-07-10 |
DE1950533A1 (de) | 1970-04-23 |
DE1950533B2 (de) | 1976-06-24 |
BR6913205D0 (pt) | 1973-01-11 |
SE344141B (de) | 1972-03-27 |
NL6814415A (de) | 1970-04-13 |
FR2020229B1 (de) | 1974-03-15 |
BE739941A (de) | 1970-04-07 |
GB1289147A (de) | 1972-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |