CH490678A - Jauge de mesure de la vitesse d'évaporation sous vide - Google Patents
Jauge de mesure de la vitesse d'évaporation sous videInfo
- Publication number
- CH490678A CH490678A CH454168A CH454168A CH490678A CH 490678 A CH490678 A CH 490678A CH 454168 A CH454168 A CH 454168A CH 454168 A CH454168 A CH 454168A CH 490678 A CH490678 A CH 490678A
- Authority
- CH
- Switzerland
- Prior art keywords
- vacuum evaporation
- evaporation rate
- rate measurement
- measurement gauge
- gauge
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Measuring Fluid Pressure (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH454168A CH490678A (fr) | 1967-04-21 | 1968-03-26 | Jauge de mesure de la vitesse d'évaporation sous vide |
GB1858368A GB1194943A (en) | 1967-04-21 | 1968-04-19 | Gauge for Measuring the Rate of Evaporation of Substances in an Evacuated Enclosure |
DE19681773242 DE1773242C3 (de) | 1967-04-21 | 1968-04-19 | Meßgerät zur Ermittlung und Regelung der Verdampfungsgeschwindigkeit von im Vakuum verdampften Substanzen |
JP2638368A JPS5212590B1 (fr) | 1967-04-21 | 1968-04-20 | |
FR1577403D FR1577403A (fr) | 1967-04-21 | 1968-04-22 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH576267A CH475559A (fr) | 1967-04-21 | 1967-04-21 | Procédé de mesure de la vitesse d'évaporation sous vide, jauge pour la mise en oeuvre de ce procédé et application de ce procédé |
CH454168A CH490678A (fr) | 1967-04-21 | 1968-03-26 | Jauge de mesure de la vitesse d'évaporation sous vide |
Publications (1)
Publication Number | Publication Date |
---|---|
CH490678A true CH490678A (fr) | 1970-05-15 |
Family
ID=25695723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH454168A CH490678A (fr) | 1967-04-21 | 1968-03-26 | Jauge de mesure de la vitesse d'évaporation sous vide |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5212590B1 (fr) |
CH (1) | CH490678A (fr) |
DE (1) | DE1773242C3 (fr) |
FR (1) | FR1577403A (fr) |
GB (1) | GB1194943A (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60225422A (ja) * | 1984-04-24 | 1985-11-09 | Hitachi Ltd | 薄膜形成方法およびその装置 |
DE3521549A1 (de) * | 1985-06-15 | 1986-12-18 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur messung und/oder regelung eines teilchenstromes |
EP1611593B1 (fr) * | 2002-05-28 | 2009-09-02 | Inficon, Inc. | Jauge à ionisation et méthode pour déterminer une pression d'ions totale |
-
1968
- 1968-03-26 CH CH454168A patent/CH490678A/fr unknown
- 1968-04-19 DE DE19681773242 patent/DE1773242C3/de not_active Expired
- 1968-04-19 GB GB1858368A patent/GB1194943A/en not_active Expired
- 1968-04-20 JP JP2638368A patent/JPS5212590B1/ja active Pending
- 1968-04-22 FR FR1577403D patent/FR1577403A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5212590B1 (fr) | 1977-04-08 |
DE1773242C3 (de) | 1974-08-08 |
DE1773242B2 (de) | 1974-01-10 |
GB1194943A (en) | 1970-06-17 |
FR1577403A (fr) | 1969-08-08 |
DE1773242A1 (de) | 1971-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT1028517B (it) | Dispositivo fotoelettrico particolarmente per misure di opacita | |
BR6907179D0 (pt) | Aspirador de po | |
FR1506352A (fr) | Perfectionnements apportés aux dispositifs de mesure de l'écart pupillaire | |
CH502580A (de) | Vorrichtung mit einer Photozellenanordnung zur Bestimmung der Lage eines äquidistant geteilten Massstabes | |
CH490678A (fr) | Jauge de mesure de la vitesse d'évaporation sous vide | |
FR1463982A (fr) | Appareil de mesure de l'épaisseur d'un tube | |
CH479067A (fr) | Détecteur de variation de la réflectance superficielle d'un objet | |
CH486699A (fr) | Détecteur de vitesse angulaire | |
CH475559A (fr) | Procédé de mesure de la vitesse d'évaporation sous vide, jauge pour la mise en oeuvre de ce procédé et application de ce procédé | |
CH488172A (fr) | Dispositif de mesure de la position relative de deux organes | |
FR1527305A (fr) | Dispositif pour la vaporisation de matières sous vide | |
SU462990A1 (ru) | Стенд дл измерени скорости ухода гироскопа | |
CH473023A (fr) | Cuiller de mesure | |
AT293069B (de) | Winkelgeschwindigkeitsmeßvorrichtung | |
FR1522531A (fr) | Perfectionnements aux dispositifs de mesure de l'accélération de la pesanteur | |
BE756182A (fr) | Appareil de mesure pour masques d'ombre | |
CH490677A (de) | Einrichtung zur Bestimmung der Geschwindigkeit eines Fahrzeuges | |
FR1534439A (fr) | Appareil pour la mesure d'un déplacement sans pièce de contact | |
GB1201509A (en) | Improvements in or relating to the measurement of distances | |
FR1423237A (fr) | Dispositif de mesure de l'humidité | |
AT292612B (de) | Flüssigkeitsstand-Fühler | |
SU530168A1 (ru) | Устройство дл измерени рассто ни от объекта до базовой плоскости | |
FR1511532A (fr) | Appareil de pesage sous vide | |
FR1534094A (fr) | Indicateur de distance d'arrêt | |
FR1521192A (fr) | Dispositif pour la mesure de l'humidité de matières en feuilles |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLZ | Patent of addition ceased |