CH475366A - Method for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes - Google Patents

Method for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes

Info

Publication number
CH475366A
CH475366A CH1493967A CH1493967A CH475366A CH 475366 A CH475366 A CH 475366A CH 1493967 A CH1493967 A CH 1493967A CH 1493967 A CH1493967 A CH 1493967A CH 475366 A CH475366 A CH 475366A
Authority
CH
Switzerland
Prior art keywords
monitoring
glow discharge
electrical behavior
metallurgical processes
current glow
Prior art date
Application number
CH1493967A
Other languages
German (de)
Inventor
Anton Spescha Gelli
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH475366A publication Critical patent/CH475366A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
CH1493967A 1966-11-09 1967-10-25 Method for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes CH475366A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (en) 1966-11-09 1966-11-09 Process for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes and equipment for them

Publications (1)

Publication Number Publication Date
CH475366A true CH475366A (en) 1969-07-15

Family

ID=7204390

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1493967A CH475366A (en) 1966-11-09 1967-10-25 Method for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes

Country Status (8)

Country Link
AT (1) AT284991B (en)
BE (2) BE705914A (en)
CH (1) CH475366A (en)
DE (1) DE1275229B (en)
FR (1) FR1561958A (en)
GB (1) GB1202917A (en)
LU (1) LU54744A1 (en)
NL (1) NL6715171A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3504936A1 (en) * 1984-02-17 1985-08-22 TI (Group Services) Ltd., Birmingham CURRENT DENSITY CONTROL DEVICE
EP0749147A2 (en) * 1995-06-13 1996-12-18 Ipsen Industries International Gesellschaft Mit Beschränkter Haftung Method and device for controlling the electrical current density over a workpiece during heat treatment by plasma

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL86851C (en) * 1953-12-09
AT219733B (en) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Device for carrying out processes by means of electrical glow discharges

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3504936A1 (en) * 1984-02-17 1985-08-22 TI (Group Services) Ltd., Birmingham CURRENT DENSITY CONTROL DEVICE
EP0749147A2 (en) * 1995-06-13 1996-12-18 Ipsen Industries International Gesellschaft Mit Beschränkter Haftung Method and device for controlling the electrical current density over a workpiece during heat treatment by plasma
US5717186A (en) * 1995-06-13 1998-02-10 Ipsen Industries International Gmbh Method and device for controlling the electric current density across a workpiece during heat treatment in a plasma
EP0749147A3 (en) * 1995-06-13 1999-01-13 Ipsen International GmbH Method and device for controlling the electrical current density over a workpiece during heat treatment by plasma

Also Published As

Publication number Publication date
AT284991B (en) 1970-10-12
DE1275229B (en) 1968-08-14
BE284991A (en)
LU54744A1 (en) 1968-01-29
BE705914A (en) 1968-03-01
FR1561958A (en) 1969-04-04
NL6715171A (en) 1968-05-10
GB1202917A (en) 1970-08-19

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Legal Events

Date Code Title Description
PL Patent ceased