AT284991B - Protective arrangement against disturbances of the discharge state in the event of a strong glow discharge in a discharge vessel for the metallurgical treatment of bodies - Google Patents

Protective arrangement against disturbances of the discharge state in the event of a strong glow discharge in a discharge vessel for the metallurgical treatment of bodies

Info

Publication number
AT284991B
AT284991B AT992467A AT992467A AT284991B AT 284991 B AT284991 B AT 284991B AT 992467 A AT992467 A AT 992467A AT 992467 A AT992467 A AT 992467A AT 284991 B AT284991 B AT 284991B
Authority
AT
Austria
Prior art keywords
discharge
bodies
event
protective arrangement
arrangement against
Prior art date
Application number
AT992467A
Other languages
German (de)
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Application granted granted Critical
Publication of AT284991B publication Critical patent/AT284991B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT992467A 1966-11-09 1967-11-03 Protective arrangement against disturbances of the discharge state in the event of a strong glow discharge in a discharge vessel for the metallurgical treatment of bodies AT284991B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1966J0032191 DE1275229B (en) 1966-11-09 1966-11-09 Process for monitoring the electrical behavior of a high-current glow discharge for metallurgical processes and equipment for them

Publications (1)

Publication Number Publication Date
AT284991B true AT284991B (en) 1970-10-12

Family

ID=7204390

Family Applications (1)

Application Number Title Priority Date Filing Date
AT992467A AT284991B (en) 1966-11-09 1967-11-03 Protective arrangement against disturbances of the discharge state in the event of a strong glow discharge in a discharge vessel for the metallurgical treatment of bodies

Country Status (8)

Country Link
AT (1) AT284991B (en)
BE (2) BE705914A (en)
CH (1) CH475366A (en)
DE (1) DE1275229B (en)
FR (1) FR1561958A (en)
GB (1) GB1202917A (en)
LU (1) LU54744A1 (en)
NL (1) NL6715171A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
US4115828A (en) * 1977-04-05 1978-09-19 Gte Sylvania Incorporated Arc detection and control apparatus
GB8404173D0 (en) * 1984-02-17 1984-03-21 Ti Group Services Ltd Controlling current density
DE19521548A1 (en) * 1995-06-13 1996-12-19 Ipsen Ind Int Gmbh Method and device for controlling the electrical current density over a workpiece during heat treatment in plasma

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL232698A (en) * 1953-12-09
AT219733B (en) * 1954-11-06 1962-02-12 Berghaus Elektrophysik Anst Device for carrying out processes by means of electrical glow discharges

Also Published As

Publication number Publication date
NL6715171A (en) 1968-05-10
LU54744A1 (en) 1968-01-29
BE284991A (en)
DE1275229B (en) 1968-08-14
GB1202917A (en) 1970-08-19
CH475366A (en) 1969-07-15
FR1561958A (en) 1969-04-04
BE705914A (en) 1968-03-01

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee