CH423405A - Process for the vapor deposition of a sharply delimited pattern of small dimensions on a substrate serving as a carrier by vapor deposition of material in a vacuum - Google Patents

Process for the vapor deposition of a sharply delimited pattern of small dimensions on a substrate serving as a carrier by vapor deposition of material in a vacuum

Info

Publication number
CH423405A
CH423405A CH1253862A CH1253862A CH423405A CH 423405 A CH423405 A CH 423405A CH 1253862 A CH1253862 A CH 1253862A CH 1253862 A CH1253862 A CH 1253862A CH 423405 A CH423405 A CH 423405A
Authority
CH
Switzerland
Prior art keywords
vapor deposition
vacuum
carrier
small dimensions
substrate serving
Prior art date
Application number
CH1253862A
Other languages
German (de)
Inventor
Leland Caswell Hollis
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH423405A publication Critical patent/CH423405A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
CH1253862A 1961-10-27 1962-10-25 Process for the vapor deposition of a sharply delimited pattern of small dimensions on a substrate serving as a carrier by vapor deposition of material in a vacuum CH423405A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14814861A 1961-10-27 1961-10-27

Publications (1)

Publication Number Publication Date
CH423405A true CH423405A (en) 1966-10-31

Family

ID=22524505

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1253862A CH423405A (en) 1961-10-27 1962-10-25 Process for the vapor deposition of a sharply delimited pattern of small dimensions on a substrate serving as a carrier by vapor deposition of material in a vacuum

Country Status (5)

Country Link
CH (1) CH423405A (en)
DK (1) DK112888B (en)
ES (2) ES281797A1 (en)
GB (1) GB960549A (en)
NL (1) NL284499A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989005361A1 (en) * 1987-12-04 1989-06-15 National Research Development Corporation Deposition of materials in a desired pattern on to substrates

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8625912D0 (en) * 1986-10-29 1986-12-03 Electricity Council Thermochemical treatment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989005361A1 (en) * 1987-12-04 1989-06-15 National Research Development Corporation Deposition of materials in a desired pattern on to substrates

Also Published As

Publication number Publication date
ES281797A1 (en) 1963-04-16
GB960549A (en) 1964-06-10
NL284499A (en)
DK112888B (en) 1969-01-27
ES285146A1 (en) 1963-07-01

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