DK112888B - Apparatus for forming thin layers of a metal on an insulating substrate. - Google Patents

Apparatus for forming thin layers of a metal on an insulating substrate.

Info

Publication number
DK112888B
DK112888B DK463862AA DK463862A DK112888B DK 112888 B DK112888 B DK 112888B DK 463862A A DK463862A A DK 463862AA DK 463862 A DK463862 A DK 463862A DK 112888 B DK112888 B DK 112888B
Authority
DK
Denmark
Prior art keywords
metal
insulating substrate
thin layers
forming thin
forming
Prior art date
Application number
DK463862AA
Other languages
Danish (da)
Inventor
H Caswell
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of DK112888B publication Critical patent/DK112888B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DK463862AA 1961-10-27 1962-10-26 Apparatus for forming thin layers of a metal on an insulating substrate. DK112888B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14814861A 1961-10-27 1961-10-27

Publications (1)

Publication Number Publication Date
DK112888B true DK112888B (en) 1969-01-27

Family

ID=22524505

Family Applications (1)

Application Number Title Priority Date Filing Date
DK463862AA DK112888B (en) 1961-10-27 1962-10-26 Apparatus for forming thin layers of a metal on an insulating substrate.

Country Status (5)

Country Link
CH (1) CH423405A (en)
DK (1) DK112888B (en)
ES (2) ES281797A1 (en)
GB (1) GB960549A (en)
NL (1) NL284499A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8625912D0 (en) * 1986-10-29 1986-12-03 Electricity Council Thermochemical treatment
GB8728399D0 (en) * 1987-12-04 1988-01-13 Secretary Trade Ind Brit Deposition of materials to substrates

Also Published As

Publication number Publication date
NL284499A (en)
CH423405A (en) 1966-10-31
ES281797A1 (en) 1963-04-16
ES285146A1 (en) 1963-07-01
GB960549A (en) 1964-06-10

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