CH413147A - Elektronenmikroskop mit einer Objektblende - Google Patents

Elektronenmikroskop mit einer Objektblende

Info

Publication number
CH413147A
CH413147A CH823063A CH823063A CH413147A CH 413147 A CH413147 A CH 413147A CH 823063 A CH823063 A CH 823063A CH 823063 A CH823063 A CH 823063A CH 413147 A CH413147 A CH 413147A
Authority
CH
Switzerland
Prior art keywords
electron microscope
object diaphragm
diaphragm
microscope
electron
Prior art date
Application number
CH823063A
Other languages
German (de)
English (en)
Inventor
Pietari Wilska Alvar
Original Assignee
Philips Electronic Pharma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic Pharma filed Critical Philips Electronic Pharma
Publication of CH413147A publication Critical patent/CH413147A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
CH823063A 1962-07-05 1963-07-03 Elektronenmikroskop mit einer Objektblende CH413147A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207681A US3150257A (en) 1962-07-05 1962-07-05 Electron beam aperture plate

Publications (1)

Publication Number Publication Date
CH413147A true CH413147A (de) 1966-05-15

Family

ID=22771562

Family Applications (1)

Application Number Title Priority Date Filing Date
CH823063A CH413147A (de) 1962-07-05 1963-07-03 Elektronenmikroskop mit einer Objektblende

Country Status (8)

Country Link
US (1) US3150257A (fi)
JP (1) JPS4933209B1 (fi)
BE (1) BE634510A (fi)
CH (1) CH413147A (fi)
DE (1) DE1248182B (fi)
FR (1) FR1362285A (fi)
GB (1) GB1057684A (fi)
NL (1) NL294850A (fi)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (de) * 1964-07-24 1969-07-17 Steigerwald Strahltech Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
FR2321976A1 (fr) * 1975-08-26 1977-03-25 Commissariat Energie Atomique Vanne d'isolement pour machine de soudage par bombardement electronique et machines munies d'une telle vanne
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
WO2014145898A2 (en) * 2013-03-15 2014-09-18 Glenn Lane Family Limited Liability Limited Partnership Adjustable mass resolving aperture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877353A (en) * 1954-07-14 1959-03-10 Gen Electric X-ray microscope
DE1850497U (de) * 1958-05-21 1962-04-26 Akashi Seisakusho Vorrichtung zum reinigen der blende von elektronen-mikroskopen bzw. elektronen-beugungsgeraeten.
US3038993A (en) * 1958-05-21 1962-06-12 Masuda Tatsunosuke Aperture system for electron optical instrument

Also Published As

Publication number Publication date
GB1057684A (en) 1967-02-08
US3150257A (en) 1964-09-22
FR1362285A (fr) 1964-05-29
BE634510A (fi)
JPS4933209B1 (fi) 1974-09-05
NL294850A (fi)
DE1248182B (de) 1967-08-24

Similar Documents

Publication Publication Date Title
CH420670A (de) Messeinrichtung mit einem Elektronenmikroskop
CH407356A (de) Elektronenoptisches System
CH405528A (de) Elektronenstrahlofen
AT246237B (de) Photokathode
CH389528A (de) Schützenwächter an Webstühlen
CH413147A (de) Elektronenmikroskop mit einer Objektblende
CH471463A (de) Elektronenmikroskop
CH409158A (de) Elektronenstrahlbildröhre mit einer Schutzhülle
NL148737B (nl) Elektronenbuis.
CH401286A (de) Elektronenmikroskop
AT242206B (de) Elektronenoptischer Bildverstärker
FR1322406A (fr) Aérostat
CH411159A (de) Elektronenmikroskop
CH413146A (de) Elektronenmikroskop
CH397609A (fr) Anode
FR1344385A (fr) Microscope télécommandé à microduromètre associé
AT256198B (de) Elektronenmikroskop
CH404231A (de) Mikroskopobjektiv
FR1345063A (fr) Cathode photoélectrique
CH412121A (de) Vorrichtung mit einer Elektronenstrahlröhre
FR1348046A (fr) Cathode incandescente
NL142496B (nl) Kathodestraaloscillograaf met tijdmarkering.
CH398996A (fr) Microscope
AT257965B (de) Elektronenstrahlofen
CH426580A (de) Spulkörper