CH413147A - Electron microscope with an object diaphragm - Google Patents

Electron microscope with an object diaphragm

Info

Publication number
CH413147A
CH413147A CH823063A CH823063A CH413147A CH 413147 A CH413147 A CH 413147A CH 823063 A CH823063 A CH 823063A CH 823063 A CH823063 A CH 823063A CH 413147 A CH413147 A CH 413147A
Authority
CH
Switzerland
Prior art keywords
electron microscope
object diaphragm
diaphragm
microscope
electron
Prior art date
Application number
CH823063A
Other languages
German (de)
Inventor
Pietari Wilska Alvar
Original Assignee
Philips Electronic Pharma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic Pharma filed Critical Philips Electronic Pharma
Publication of CH413147A publication Critical patent/CH413147A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
CH823063A 1962-07-05 1963-07-03 Electron microscope with an object diaphragm CH413147A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207681A US3150257A (en) 1962-07-05 1962-07-05 Electron beam aperture plate

Publications (1)

Publication Number Publication Date
CH413147A true CH413147A (en) 1966-05-15

Family

ID=22771562

Family Applications (1)

Application Number Title Priority Date Filing Date
CH823063A CH413147A (en) 1962-07-05 1963-07-03 Electron microscope with an object diaphragm

Country Status (8)

Country Link
US (1) US3150257A (en)
JP (1) JPS4933209B1 (en)
BE (1) BE634510A (en)
CH (1) CH413147A (en)
DE (1) DE1248182B (en)
FR (1) FR1362285A (en)
GB (1) GB1057684A (en)
NL (1) NL294850A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (en) * 1964-07-24 1969-07-17 Steigerwald Strahltech Device for monitoring the beam impact area in corpuscular beam processing devices
DE2326279A1 (en) * 1973-05-23 1974-12-19 Siemens Ag ION BEAM HIGH-SPEED CIRCUIT TO ACHIEVE DEFINED SOLID DOCUMENTS THROUGH ION IMPLANTATION
FR2321976A1 (en) * 1975-08-26 1977-03-25 Commissariat Energie Atomique ISOLATION VALVE FOR ELECTRONIC BOMBING WELDING MACHINES AND MACHINES EQUIPPED WITH SUCH A VALVE
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
EP2973663B1 (en) * 2013-03-15 2018-04-18 Glenn Lane Family Limited Liability Limited Partnership Adjustable mass resolving aperture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877353A (en) * 1954-07-14 1959-03-10 Gen Electric X-ray microscope
US3038993A (en) * 1958-05-21 1962-06-12 Masuda Tatsunosuke Aperture system for electron optical instrument
DE1850497U (en) * 1958-05-21 1962-04-26 Akashi Seisakusho DEVICE FOR CLEANING THE SCREEN OF ELECTRON MICROSCOPES OR ELECTRON DIFFUSION DEVICES.

Also Published As

Publication number Publication date
NL294850A (en)
US3150257A (en) 1964-09-22
BE634510A (en)
DE1248182B (en) 1967-08-24
JPS4933209B1 (en) 1974-09-05
FR1362285A (en) 1964-05-29
GB1057684A (en) 1967-02-08

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