FR1362285A - Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope - Google Patents

Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope

Info

Publication number
FR1362285A
FR1362285A FR940485A FR940485A FR1362285A FR 1362285 A FR1362285 A FR 1362285A FR 940485 A FR940485 A FR 940485A FR 940485 A FR940485 A FR 940485A FR 1362285 A FR1362285 A FR 1362285A
Authority
FR
France
Prior art keywords
diaphragm
microscope
usable
electron microscope
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR940485A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics and Pharmaceutical Industries Corp
Original Assignee
Philips Electronics and Pharmaceutical Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics and Pharmaceutical Industries Corp filed Critical Philips Electronics and Pharmaceutical Industries Corp
Application granted granted Critical
Publication of FR1362285A publication Critical patent/FR1362285A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
FR940485A 1962-07-05 1963-07-05 Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope Expired FR1362285A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207681A US3150257A (en) 1962-07-05 1962-07-05 Electron beam aperture plate

Publications (1)

Publication Number Publication Date
FR1362285A true FR1362285A (en) 1964-05-29

Family

ID=22771562

Family Applications (1)

Application Number Title Priority Date Filing Date
FR940485A Expired FR1362285A (en) 1962-07-05 1963-07-05 Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope

Country Status (8)

Country Link
US (1) US3150257A (en)
JP (1) JPS4933209B1 (en)
BE (1) BE634510A (en)
CH (1) CH413147A (en)
DE (1) DE1248182B (en)
FR (1) FR1362285A (en)
GB (1) GB1057684A (en)
NL (1) NL294850A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (en) * 1964-07-24 1969-07-17 Steigerwald Strahltech Device for monitoring the beam impact area in corpuscular beam processing devices
DE2326279A1 (en) * 1973-05-23 1974-12-19 Siemens Ag ION BEAM HIGH-SPEED CIRCUIT TO ACHIEVE DEFINED SOLID DOCUMENTS THROUGH ION IMPLANTATION
FR2321976A1 (en) * 1975-08-26 1977-03-25 Commissariat Energie Atomique ISOLATION VALVE FOR ELECTRONIC BOMBING WELDING MACHINES AND MACHINES EQUIPPED WITH SUCH A VALVE
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
CN105247660B (en) * 2013-03-15 2018-06-12 格伦·莱恩家族有限责任有限合伙企业 Scalable quality resolving aperture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877353A (en) * 1954-07-14 1959-03-10 Gen Electric X-ray microscope
DE1850497U (en) * 1958-05-21 1962-04-26 Akashi Seisakusho DEVICE FOR CLEANING THE SCREEN OF ELECTRON MICROSCOPES OR ELECTRON DIFFUSION DEVICES.
US3038993A (en) * 1958-05-21 1962-06-12 Masuda Tatsunosuke Aperture system for electron optical instrument

Also Published As

Publication number Publication date
DE1248182B (en) 1967-08-24
US3150257A (en) 1964-09-22
JPS4933209B1 (en) 1974-09-05
GB1057684A (en) 1967-02-08
NL294850A (en)
CH413147A (en) 1966-05-15
BE634510A (en)

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