FR1362285A - Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope - Google Patents
Electron microscope provided with an object diaphragm and diaphragm usable in such a microscopeInfo
- Publication number
- FR1362285A FR1362285A FR940485A FR940485A FR1362285A FR 1362285 A FR1362285 A FR 1362285A FR 940485 A FR940485 A FR 940485A FR 940485 A FR940485 A FR 940485A FR 1362285 A FR1362285 A FR 1362285A
- Authority
- FR
- France
- Prior art keywords
- diaphragm
- microscope
- usable
- electron microscope
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US207681A US3150257A (en) | 1962-07-05 | 1962-07-05 | Electron beam aperture plate |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1362285A true FR1362285A (en) | 1964-05-29 |
Family
ID=22771562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR940485A Expired FR1362285A (en) | 1962-07-05 | 1963-07-05 | Electron microscope provided with an object diaphragm and diaphragm usable in such a microscope |
Country Status (8)
Country | Link |
---|---|
US (1) | US3150257A (en) |
JP (1) | JPS4933209B1 (en) |
BE (1) | BE634510A (en) |
CH (1) | CH413147A (en) |
DE (1) | DE1248182B (en) |
FR (1) | FR1362285A (en) |
GB (1) | GB1057684A (en) |
NL (1) | NL294850A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1299498B (en) * | 1964-07-24 | 1969-07-17 | Steigerwald Strahltech | Device for monitoring the beam impact area in corpuscular beam processing devices |
DE2326279A1 (en) * | 1973-05-23 | 1974-12-19 | Siemens Ag | ION BEAM HIGH-SPEED CIRCUIT TO ACHIEVE DEFINED SOLID DOCUMENTS THROUGH ION IMPLANTATION |
FR2321976A1 (en) * | 1975-08-26 | 1977-03-25 | Commissariat Energie Atomique | ISOLATION VALVE FOR ELECTRONIC BOMBING WELDING MACHINES AND MACHINES EQUIPPED WITH SUCH A VALVE |
US4445041A (en) * | 1981-06-02 | 1984-04-24 | Hewlett-Packard Company | Electron beam blanker |
KR20150130557A (en) * | 2013-03-15 | 2015-11-23 | 글렌 레인 패밀리 리미티드 리에빌러티 리미티드 파트너쉽 | Adjustable mass resolving aperture |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2877353A (en) * | 1954-07-14 | 1959-03-10 | Gen Electric | X-ray microscope |
US3038993A (en) * | 1958-05-21 | 1962-06-12 | Masuda Tatsunosuke | Aperture system for electron optical instrument |
DE1850497U (en) * | 1958-05-21 | 1962-04-26 | Akashi Seisakusho | DEVICE FOR CLEANING THE SCREEN OF ELECTRON MICROSCOPES OR ELECTRON DIFFUSION DEVICES. |
-
0
- NL NL294850D patent/NL294850A/xx unknown
- BE BE634510D patent/BE634510A/xx unknown
-
1962
- 1962-07-05 US US207681A patent/US3150257A/en not_active Expired - Lifetime
-
1963
- 1963-07-03 CH CH823063A patent/CH413147A/en unknown
- 1963-07-04 DE DEP32134A patent/DE1248182B/en not_active Withdrawn
- 1963-07-05 JP JP38035088A patent/JPS4933209B1/ja active Pending
- 1963-07-05 FR FR940485A patent/FR1362285A/en not_active Expired
- 1963-07-05 GB GB26757/63D patent/GB1057684A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CH413147A (en) | 1966-05-15 |
NL294850A (en) | |
BE634510A (en) | |
DE1248182B (en) | 1967-08-24 |
US3150257A (en) | 1964-09-22 |
GB1057684A (en) | 1967-02-08 |
JPS4933209B1 (en) | 1974-09-05 |
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