CH401286A - electron microscope - Google Patents

electron microscope

Info

Publication number
CH401286A
CH401286A CH1052363A CH1052363A CH401286A CH 401286 A CH401286 A CH 401286A CH 1052363 A CH1052363 A CH 1052363A CH 1052363 A CH1052363 A CH 1052363A CH 401286 A CH401286 A CH 401286A
Authority
CH
Switzerland
Prior art keywords
electron microscope
microscope
electron
Prior art date
Application number
CH1052363A
Other languages
German (de)
Inventor
Cornelis Van Dorsten Adrianus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH401286A publication Critical patent/CH401286A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Sampling And Sample Adjustment (AREA)
CH1052363A 1962-08-29 1963-08-26 electron microscope CH401286A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL282644A NL282644A (en) 1962-08-29 1962-08-29

Publications (1)

Publication Number Publication Date
CH401286A true CH401286A (en) 1965-10-31

Family

ID=19754071

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1052363A CH401286A (en) 1962-08-29 1963-08-26 electron microscope

Country Status (6)

Country Link
US (1) US3218457A (en)
BE (1) BE636666A (en)
CH (1) CH401286A (en)
DK (1) DK106237C (en)
GB (1) GB981447A (en)
NL (1) NL282644A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1238889A (en) * 1968-11-26 1971-07-14
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
JPS58161235A (en) * 1982-03-19 1983-09-24 Internatl Precision Inc Scanning type electron beam device
JPS58169762A (en) * 1982-03-30 1983-10-06 Internatl Precision Inc Electron beam device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE566571A (en) * 1957-04-09
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Also Published As

Publication number Publication date
BE636666A (en) 1964-02-27
US3218457A (en) 1965-11-16
GB981447A (en) 1965-01-27
NL282644A (en) 1964-12-28
DK106237C (en) 1967-01-09

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