GB981447A - Improvements in or relating to electron microscopes - Google Patents

Improvements in or relating to electron microscopes

Info

Publication number
GB981447A
GB981447A GB33693/63A GB3369363A GB981447A GB 981447 A GB981447 A GB 981447A GB 33693/63 A GB33693/63 A GB 33693/63A GB 3369363 A GB3369363 A GB 3369363A GB 981447 A GB981447 A GB 981447A
Authority
GB
United Kingdom
Prior art keywords
stationary part
microscope
object stage
agate
aug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB33693/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB981447A publication Critical patent/GB981447A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

981,447. Electron microscopes; electrostatic holding devices. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. Aug. 26, 1963 [Aug. 29, 1962], No. 33693/63. Headings H1D and H1P. An electron microscope is provided with an object stage in the form of a heat apertured disc 6 within an opening in which the object 8 is arranged and by means of which the object is movable in any lateral direction, together with at least one body 19 of semi-conductor material connected to the object stage 6 and arranged to contact a stationary part 11 of the microscope, the arrangement being such that, when a voltage is set up between the stationary part 11 and a conductive layer 22 on that surface of the body 19 remote from the part 11, electrostatic forces between the body 19 and the part 11 clamp the object stage 6 in such a manner as to prevent axial movement thereof. Suitable semi-conductor materials are slate, marble, agate and certain ceramic synthetic materials having a resistivity of approximately 10<SP>10</SP> ohm-cm. In the embodiment shown an annular block 19 of agate provided with a vapour-deposited layer 22 of silver is rigidly connected in an annular groove 20 of the disc 6 with the interposition of a coating 21 of insulating material. A battery 27 and switch 28 are connected between the conductive layer 22 and the stationary part 11 by way of a lead 23 and the wall 13 of the microscope housing. Specification 824,903 is referred to.
GB33693/63A 1962-08-29 1963-08-26 Improvements in or relating to electron microscopes Expired GB981447A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL282644A NL282644A (en) 1962-08-29 1962-08-29

Publications (1)

Publication Number Publication Date
GB981447A true GB981447A (en) 1965-01-27

Family

ID=19754071

Family Applications (1)

Application Number Title Priority Date Filing Date
GB33693/63A Expired GB981447A (en) 1962-08-29 1963-08-26 Improvements in or relating to electron microscopes

Country Status (6)

Country Link
US (1) US3218457A (en)
BE (1) BE636666A (en)
CH (1) CH401286A (en)
DK (1) DK106237C (en)
GB (1) GB981447A (en)
NL (1) NL282644A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1238889A (en) * 1968-11-26 1971-07-14
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
JPS58169762A (en) * 1982-03-30 1983-10-06 Internatl Precision Inc Electron beam device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL92826C (en) * 1957-04-09
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2118361A (en) * 1982-03-19 1983-10-26 Int Precision Inc Scanning electron beam apparatus
GB2173945A (en) * 1982-03-19 1986-10-22 Int Precision Inc Scanning electron beam apparatus

Also Published As

Publication number Publication date
NL282644A (en) 1964-12-28
BE636666A (en) 1964-02-27
US3218457A (en) 1965-11-16
DK106237C (en) 1967-01-09
CH401286A (en) 1965-10-31

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