CH400380A - Ablenkvorrichtung für Ladungsträgerstrahlen - Google Patents

Ablenkvorrichtung für Ladungsträgerstrahlen

Info

Publication number
CH400380A
CH400380A CH665762A CH665762A CH400380A CH 400380 A CH400380 A CH 400380A CH 665762 A CH665762 A CH 665762A CH 665762 A CH665762 A CH 665762A CH 400380 A CH400380 A CH 400380A
Authority
CH
Switzerland
Prior art keywords
charge carrier
deflection device
carrier beams
beams
deflection
Prior art date
Application number
CH665762A
Other languages
English (en)
Inventor
Dietrich Walter Dr Dipl-Phys
Original Assignee
Heraeus Gmbh W C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Gmbh W C filed Critical Heraeus Gmbh W C
Publication of CH400380A publication Critical patent/CH400380A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
CH665762A 1961-08-31 1962-06-01 Ablenkvorrichtung für Ladungsträgerstrahlen CH400380A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1961H0043528 DE1248175B (de) 1961-08-31 1961-08-31 Elektronenstrahlerzeugungssystem

Publications (1)

Publication Number Publication Date
CH400380A true CH400380A (de) 1965-10-15

Family

ID=7155219

Family Applications (1)

Application Number Title Priority Date Filing Date
CH665762A CH400380A (de) 1961-08-31 1962-06-01 Ablenkvorrichtung für Ladungsträgerstrahlen

Country Status (3)

Country Link
CH (1) CH400380A (de)
DE (1) DE1248175B (de)
GB (1) GB1013403A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter
DE2519537C2 (de) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke
DE3339131A1 (de) * 1983-10-28 1985-05-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlverdampfer mit mindestens zwei magnetischen ablenksystemen
DE4104845C5 (de) * 1991-02-16 2004-09-09 PTR Präzisionstechnik GmbH Elektronenstrahlerzeuger, insbesondere für eine Elektronenstrahlkanone
CN117387378B (zh) * 2023-12-12 2024-04-16 陕西煜成和汇金属材料有限公司 一种电子束熔炼炉的扒渣装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2892946A (en) * 1955-11-25 1959-06-30 High Voltage Engineering Corp Method of and apparatus for the more efficient use of high-energy charged particles in the treatment of gasphase systems
US2897365A (en) * 1956-09-28 1959-07-28 High Voltage Engineering Corp Irradiation method and apparatus
US2887583A (en) * 1956-10-08 1959-05-19 High Voltage Engineering Corp Electron accelerator for irradiation
US2993120A (en) * 1959-01-14 1961-07-18 High Voltage Engineering Corp Electron irradiation

Also Published As

Publication number Publication date
GB1013403A (en) 1965-12-15
DE1248175B (de) 1967-08-24

Similar Documents

Publication Publication Date Title
CH408770A (de) Packung für Flaschen
CH391217A (de) Trägeranordnung
BE618027A (fr) Isocyanates phosphorés
CH407703A (de) Entgrater für Bohrungen
AT249524B (de) Portionengefäß für Joghurt
CH400380A (de) Ablenkvorrichtung für Ladungsträgerstrahlen
AT252794B (de) Verschlußeinrichtung für Behälter
AT239348B (de) Elektrodenplatte für Bleiakkumulatoren
CH407485A (de) Aufhängevorrichtung für einen Deckenträger
CH393773A (de) Interferenzeinrichtung für Mikroskope
FR1295249A (fr) Transporteur
BE618301A (fr) Transporteur
CH386764A (de) Schwemmentmistungsanlage
AT231293B (de) Waschvorrichtung für Fahrzeuge
AT241132B (de) Legierung für pyrotechnische Zwecke
CH432143A (de) Klemmvorrichtung für Seile
BE615168A (fr) Lance améliorée
FR1250271A (fr) Wagon de service
AT259589B (de) Kugelförmiger Typenträger
CH389103A (de) Halbleiteranordnung für Schaltzwecke
AT249502B (de) Lichtpausgerät
DD33324A1 (de) Befestigungsmittel für Leitungen
CH388448A (de) Elektrisches Prüfgerät
AT236560B (de) Elektroden-Anordnung für elektrostatische Beflockungsvorrichtung
FR1290304A (fr) Appareils de chargement