CH391305A - Method for crucible-free zone melting of semiconductor material - Google Patents

Method for crucible-free zone melting of semiconductor material

Info

Publication number
CH391305A
CH391305A CH287361A CH287361A CH391305A CH 391305 A CH391305 A CH 391305A CH 287361 A CH287361 A CH 287361A CH 287361 A CH287361 A CH 287361A CH 391305 A CH391305 A CH 391305A
Authority
CH
Switzerland
Prior art keywords
crucible
semiconductor material
free zone
zone melting
melting
Prior art date
Application number
CH287361A
Other languages
German (de)
Inventor
Wolfgang Dr Keller
Kramer Herbert
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH391305A publication Critical patent/CH391305A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/906—Special atmosphere other than vacuum or inert

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CH287361A 1960-06-11 1961-03-09 Method for crucible-free zone melting of semiconductor material CH391305A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES68896A DE1207341B (en) 1960-06-11 1960-06-11 Process for crucible-free zone melting of germanium or silicon rods
DES71088A DE1209102B (en) 1960-06-11 1960-11-02 Process for crucible-free zone melting of germanium or silicon rods

Publications (1)

Publication Number Publication Date
CH391305A true CH391305A (en) 1965-04-30

Family

ID=25996115

Family Applications (1)

Application Number Title Priority Date Filing Date
CH287361A CH391305A (en) 1960-06-11 1961-03-09 Method for crucible-free zone melting of semiconductor material

Country Status (5)

Country Link
US (1) US3223493A (en)
BE (1) BE604423A (en)
CH (1) CH391305A (en)
DE (2) DE1207341B (en)
GB (1) GB946064A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660062A (en) * 1968-02-29 1972-05-02 Siemens Ag Method for crucible-free floating zone melting a crystalline rod, especially of semi-crystalline material

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE510303A (en) * 1951-11-16
BE548227A (en) * 1955-07-22

Also Published As

Publication number Publication date
GB946064A (en) 1964-01-08
DE1209102B (en) 1966-01-20
DE1207341B (en) 1965-12-23
US3223493A (en) 1965-12-14
BE604423A (en) 1961-11-30

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