CH328885A - Einrichtung zum Ausgleichen des Astigmatismus einer Elektronenlinse - Google Patents

Einrichtung zum Ausgleichen des Astigmatismus einer Elektronenlinse

Info

Publication number
CH328885A
CH328885A CH328885DA CH328885A CH 328885 A CH328885 A CH 328885A CH 328885D A CH328885D A CH 328885DA CH 328885 A CH328885 A CH 328885A
Authority
CH
Switzerland
Prior art keywords
astigmatism
compensating
electron lens
electron
lens
Prior art date
Application number
Other languages
German (de)
English (en)
Inventor
Cornelis Van Dorsten Adrianus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH328885A publication Critical patent/CH328885A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/56—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
CH328885D 1954-03-11 1955-03-09 Einrichtung zum Ausgleichen des Astigmatismus einer Elektronenlinse CH328885A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL328885X 1954-03-11

Publications (1)

Publication Number Publication Date
CH328885A true CH328885A (de) 1958-03-31

Family

ID=19784274

Family Applications (1)

Application Number Title Priority Date Filing Date
CH328885D CH328885A (de) 1954-03-11 1955-03-09 Einrichtung zum Ausgleichen des Astigmatismus einer Elektronenlinse

Country Status (7)

Country Link
US (1) US2862129A (enrdf_load_stackoverflow)
BE (1) BE536427A (enrdf_load_stackoverflow)
CH (1) CH328885A (enrdf_load_stackoverflow)
DE (1) DE1040716B (enrdf_load_stackoverflow)
FR (1) FR1120444A (enrdf_load_stackoverflow)
GB (1) GB779462A (enrdf_load_stackoverflow)
NL (2) NL185815B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285301A (enrdf_load_stackoverflow) * 1961-11-15
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
JPS63241842A (ja) * 1987-03-30 1988-10-07 Toshiba Corp カラ−陰極線管

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE440927A (enrdf_load_stackoverflow) * 1940-05-08
NL82605C (enrdf_load_stackoverflow) * 1942-04-08
GB609480A (en) * 1944-09-30 1948-10-01 Otto Ernst Heinrich Klemperer Improvements in or relating to a electron discharge apparatus in which a flattened or ribbon-shaped electron beam is employed
US2455676A (en) * 1946-05-21 1948-12-07 Rca Corp Electron lens correction device
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
US2707246A (en) * 1952-09-04 1955-04-26 Gen Electric Combination focusing-ion trap structures for cathode-ray tubes
DE927525C (de) * 1953-05-06 1955-05-12 Siemens Ag Anordnung zur Kompensation des axialen Astigmatismus von elektrischen oder magnetischen Elektronenlinsen

Also Published As

Publication number Publication date
NL185815B (nl)
US2862129A (en) 1958-11-25
GB779462A (en) 1957-07-24
NL95815C (enrdf_load_stackoverflow)
BE536427A (enrdf_load_stackoverflow)
DE1040716B (de) 1958-10-09
FR1120444A (fr) 1956-07-05

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