Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
  • H01J37/10—Lenses
  • H01J37/12—Lenses electrostatic
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
  • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
  • H01J29/58—Arrangements for focusing or reflecting ray or beam
  • H01J29/62—Electrostatic lenses
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/10—Lenses
  • H01J2237/12—Lenses electrostatic
  • H01J2237/1205—Microlenses

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Electron Sources, Ion Sources (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=7994521

Family Applications (1)

Country Status (2)

Families Citing this family (18)

• 0
  • BE BE440927D patent/BE440927A/xx unknown
• 1940
  • 1940-12-02 US US368271A patent/US2313018A/en not_active Expired - Lifetime

Also Published As

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