CA996843A - Vapor degreasing method and system - Google Patents

Vapor degreasing method and system

Info

Publication number
CA996843A
CA996843A CA199,518A CA199518A CA996843A CA 996843 A CA996843 A CA 996843A CA 199518 A CA199518 A CA 199518A CA 996843 A CA996843 A CA 996843A
Authority
CA
Canada
Prior art keywords
degreasing method
vapor degreasing
vapor
degreasing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA199,518A
Other languages
English (en)
Other versions
CA199518S (en
Inventor
Robert M. Healy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Litton Industries Inc
Original Assignee
Litton Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Industries Inc filed Critical Litton Industries Inc
Application granted granted Critical
Publication of CA996843A publication Critical patent/CA996843A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Detergent Compositions (AREA)
  • Cleaning By Liquid Or Steam (AREA)
CA199,518A 1973-06-20 1974-05-10 Vapor degreasing method and system Expired CA996843A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US371836A US3923541A (en) 1973-06-20 1973-06-20 Vapor degreasing system

Publications (1)

Publication Number Publication Date
CA996843A true CA996843A (en) 1976-09-14

Family

ID=23465592

Family Applications (1)

Application Number Title Priority Date Filing Date
CA199,518A Expired CA996843A (en) 1973-06-20 1974-05-10 Vapor degreasing method and system

Country Status (2)

Country Link
US (1) US3923541A (cs)
CA (1) CA996843A (cs)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4478364A (en) * 1980-11-07 1984-10-23 Re-Al, Inc. Method of mounting and cleaning electrical slide switch of flush through design
US4788043A (en) * 1985-04-17 1988-11-29 Tokuyama Soda Kabushiki Kaisha Process for washing semiconductor substrate with organic solvent
JPH0667438B2 (ja) * 1986-07-17 1994-08-31 三菱重工業株式会社 ドライクリーニング装置
US4935066A (en) * 1988-02-19 1990-06-19 Wright C E Process for decomposing baked-on grease or oil
US5183067A (en) * 1988-07-08 1993-02-02 Isc Chemicals Limited Cleaning and drying of electronic assemblies
EP0350316B1 (en) * 1988-07-08 1997-05-02 Rhone-Poulenc Chimie Cleaning and drying of electronic assemblies
USRE35975E (en) * 1988-07-08 1998-12-01 Rhone-Poulenc Chimie Cleaning and drying of electronic assemblies
US5156173A (en) * 1991-05-14 1992-10-20 Envirosolv High-efficiency, low-emissions cleaning method and apparatus
JPH0771661B2 (ja) 1991-11-22 1995-08-02 ジャパン・フィールド株式会社 油分が付着した被洗浄物の洗浄方法
US5482563A (en) * 1993-04-06 1996-01-09 Motorola, Inc. Method for electrical assembly cleaning using a non-azeotropic solvent composition
US5402806A (en) * 1993-10-19 1995-04-04 Northrop Grumman Corporation Cleaning apparatus having a partitioned boil sump
US5534078A (en) * 1994-01-27 1996-07-09 Breunsbach; Rex Method for cleaning electronic assemblies
ATE522926T1 (de) * 1997-02-14 2011-09-15 Imec Verfahren zur entfernung organischer kontamination von einer halbleiteroberfläche
US5865198A (en) * 1997-05-12 1999-02-02 Hartman; Albert V. Refrigerated vapor degreasing system
US6303500B1 (en) * 1999-02-24 2001-10-16 Micron Technology, Inc. Method and apparatus for electroless plating a contact pad
JP3448613B2 (ja) * 1999-06-29 2003-09-22 オメガセミコン電子株式会社 乾燥装置
US6616769B2 (en) * 2001-09-28 2003-09-09 Air Products And Chemicals, Inc. Systems and methods for conditioning ultra high purity gas bulk containers
FR2878423B1 (fr) * 2004-11-30 2008-12-26 Jacques Puech Degraisse broches
JP5076033B1 (ja) * 2012-06-08 2012-11-21 ジャパン・フィールド株式会社 被洗浄物の蒸気洗浄方法及びその装置
CN104923520B (zh) * 2015-06-24 2017-01-18 西安航空动力股份有限公司 经磨粒流加工后的涡轮叶片残留磨料的清洗方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2113129A (en) * 1934-05-15 1938-04-05 Solvent Machine Company Treatment of work with solvents
US2285333A (en) * 1940-12-31 1942-06-02 Hercules Powder Co Ltd Rosin-containing soaps
NL241181A (cs) * 1958-07-12
NL251879A (cs) * 1959-05-22 1900-01-01
US3070463A (en) * 1961-06-08 1962-12-25 Donald J Barday Solvent recovering and purifying method and apparatus
US3733218A (en) * 1971-11-15 1973-05-15 Diamond Shamrock Corp Removal of solder flux with azeotropic solvent mixtures

Also Published As

Publication number Publication date
US3923541A (en) 1975-12-02
USB371836I5 (cs) 1975-01-28

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