CA996843A - Vapor degreasing method and system - Google Patents
Vapor degreasing method and systemInfo
- Publication number
- CA996843A CA996843A CA199,518A CA199518A CA996843A CA 996843 A CA996843 A CA 996843A CA 199518 A CA199518 A CA 199518A CA 996843 A CA996843 A CA 996843A
- Authority
- CA
- Canada
- Prior art keywords
- degreasing method
- vapor degreasing
- vapor
- degreasing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S134/00—Cleaning and liquid contact with solids
- Y10S134/902—Semiconductor wafer
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US371836A US3923541A (en) | 1973-06-20 | 1973-06-20 | Vapor degreasing system |
Publications (1)
Publication Number | Publication Date |
---|---|
CA996843A true CA996843A (en) | 1976-09-14 |
Family
ID=23465592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA199,518A Expired CA996843A (en) | 1973-06-20 | 1974-05-10 | Vapor degreasing method and system |
Country Status (2)
Country | Link |
---|---|
US (1) | US3923541A (en) |
CA (1) | CA996843A (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4478364A (en) * | 1980-11-07 | 1984-10-23 | Re-Al, Inc. | Method of mounting and cleaning electrical slide switch of flush through design |
US4788043A (en) * | 1985-04-17 | 1988-11-29 | Tokuyama Soda Kabushiki Kaisha | Process for washing semiconductor substrate with organic solvent |
JPH0667438B2 (en) * | 1986-07-17 | 1994-08-31 | 三菱重工業株式会社 | Dry cleaning equipment |
US4935066A (en) * | 1988-02-19 | 1990-06-19 | Wright C E | Process for decomposing baked-on grease or oil |
ATE152487T1 (en) * | 1988-07-08 | 1997-05-15 | Rhone Poulenc Chimie | CLEANING AND DRYING ELECTRONIC COMPONENTS |
USRE35975E (en) * | 1988-07-08 | 1998-12-01 | Rhone-Poulenc Chimie | Cleaning and drying of electronic assemblies |
US5183067A (en) * | 1988-07-08 | 1993-02-02 | Isc Chemicals Limited | Cleaning and drying of electronic assemblies |
US5156173A (en) * | 1991-05-14 | 1992-10-20 | Envirosolv | High-efficiency, low-emissions cleaning method and apparatus |
US5482563A (en) * | 1993-04-06 | 1996-01-09 | Motorola, Inc. | Method for electrical assembly cleaning using a non-azeotropic solvent composition |
US5402806A (en) * | 1993-10-19 | 1995-04-04 | Northrop Grumman Corporation | Cleaning apparatus having a partitioned boil sump |
US5534078A (en) * | 1994-01-27 | 1996-07-09 | Breunsbach; Rex | Method for cleaning electronic assemblies |
ATE522926T1 (en) * | 1997-02-14 | 2011-09-15 | Imec | METHOD FOR REMOVAL OF ORGANIC CONTAMINATION FROM A SEMICONDUCTOR SURFACE |
US5865198A (en) * | 1997-05-12 | 1999-02-02 | Hartman; Albert V. | Refrigerated vapor degreasing system |
US6303500B1 (en) | 1999-02-24 | 2001-10-16 | Micron Technology, Inc. | Method and apparatus for electroless plating a contact pad |
JP3448613B2 (en) * | 1999-06-29 | 2003-09-22 | オメガセミコン電子株式会社 | Drying equipment |
US6616769B2 (en) * | 2001-09-28 | 2003-09-09 | Air Products And Chemicals, Inc. | Systems and methods for conditioning ultra high purity gas bulk containers |
FR2878423B1 (en) * | 2004-11-30 | 2008-12-26 | Jacques Puech | DEGRAISSE BROCHES |
JP5076033B1 (en) * | 2012-06-08 | 2012-11-21 | ジャパン・フィールド株式会社 | Vapor cleaning method and apparatus for object to be cleaned |
CN104923520B (en) * | 2015-06-24 | 2017-01-18 | 西安航空动力股份有限公司 | Cleaning method for residual abrasive materials on turbine blades after being subjected to abrasive flow machining |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2113129A (en) * | 1934-05-15 | 1938-04-05 | Solvent Machine Company | Treatment of work with solvents |
US2285333A (en) * | 1940-12-31 | 1942-06-02 | Hercules Powder Co Ltd | Rosin-containing soaps |
NL241181A (en) * | 1958-07-12 | |||
NL121693C (en) * | 1959-05-22 | |||
US3070463A (en) * | 1961-06-08 | 1962-12-25 | Donald J Barday | Solvent recovering and purifying method and apparatus |
US3733218A (en) * | 1971-11-15 | 1973-05-15 | Diamond Shamrock Corp | Removal of solder flux with azeotropic solvent mixtures |
-
1973
- 1973-06-20 US US371836A patent/US3923541A/en not_active Expired - Lifetime
-
1974
- 1974-05-10 CA CA199,518A patent/CA996843A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
USB371836I5 (en) | 1975-01-28 |
US3923541A (en) | 1975-12-02 |
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