CA992106A - Evaporator made from sintered refractory material - Google Patents

Evaporator made from sintered refractory material

Info

Publication number
CA992106A
CA992106A CA179,142A CA179142A CA992106A CA 992106 A CA992106 A CA 992106A CA 179142 A CA179142 A CA 179142A CA 992106 A CA992106 A CA 992106A
Authority
CA
Canada
Prior art keywords
refractory material
sintered refractory
evaporator made
evaporator
sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA179,142A
Other languages
English (en)
Other versions
CA179142S (en
Inventor
Klaus Reinmuth
Jurgen Schulz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektroschmelzwerk Kempten GmbH
Original Assignee
Elektroschmelzwerk Kempten GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722240655 external-priority patent/DE2240655C3/de
Application filed by Elektroschmelzwerk Kempten GmbH filed Critical Elektroschmelzwerk Kempten GmbH
Application granted granted Critical
Publication of CA992106A publication Critical patent/CA992106A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/5805Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides
    • C04B35/58064Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides based on refractory borides
    • C04B35/58071Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on borides based on refractory borides based on titanium borides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64Burning or sintering processes
    • C04B35/645Pressure sintering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Physical Vapour Deposition (AREA)
CA179,142A 1972-08-18 1973-08-20 Evaporator made from sintered refractory material Expired CA992106A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722240655 DE2240655C3 (de) 1972-08-18 Verfahren zur Herstellung von Verdampfern aus gesintertem, feuerfestem Material

Publications (1)

Publication Number Publication Date
CA992106A true CA992106A (en) 1976-06-29

Family

ID=5853916

Family Applications (1)

Application Number Title Priority Date Filing Date
CA179,142A Expired CA992106A (en) 1972-08-18 1973-08-20 Evaporator made from sintered refractory material

Country Status (12)

Country Link
US (1) US3915900A (xx)
JP (1) JPS548214B2 (xx)
AT (1) AT344587B (xx)
BE (1) BE803708A (xx)
CA (1) CA992106A (xx)
CH (1) CH578487A5 (xx)
ES (1) ES417413A1 (xx)
FR (1) FR2196301B1 (xx)
GB (1) GB1434136A (xx)
IT (1) IT990474B (xx)
NL (1) NL7311317A (xx)
SE (1) SE382445B (xx)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564509B2 (xx) * 1974-08-15 1981-01-30
NL174683C (nl) * 1975-09-11 1984-07-16 Philips Nv Hogedrukgasontladingslamp.
US4199480A (en) * 1978-05-25 1980-04-22 Gte Sylvania Incorporated Electrically conductive boat for vacuum evaporation of metals
US4268314A (en) * 1979-12-21 1981-05-19 Union Carbide Corporation High density refractory composites and method of making
US4373952A (en) * 1981-10-19 1983-02-15 Gte Products Corporation Intermetallic composite
JPS59232959A (ja) * 1983-05-19 1984-12-27 明智セラミツクス株式会社 極低炭素鋼用鋳造用ノズル
US4666873A (en) * 1983-10-14 1987-05-19 General Electric Company Aluminum nitride-boron nitride composite article and method of making same
US4997633A (en) * 1986-01-30 1991-03-05 Kawasaki Steel Corporation Water-soluble boron containing impurity reduced hexagonally crystalline boron nitride
JPS62202868A (ja) * 1986-02-27 1987-09-07 電気化学工業株式会社 導電性セラミツク及びその製造法
US4847031A (en) * 1987-12-16 1989-07-11 Gte Products Corporation Evaporating boats containing titanium diboride
GB8926164D0 (en) * 1989-11-20 1990-01-10 Rtz Chemicals Borides Limited Process for the production of refractory composite article
DE4138481A1 (de) * 1991-11-22 1993-05-27 Kempten Elektroschmelz Gmbh Wiederaufarbeitung von gebrauchten verdampferschiffchen
GB2284430A (en) * 1993-10-29 1995-06-07 Nippon Tungsten Self-lubricating hard material
US5604164A (en) * 1995-09-06 1997-02-18 Advanced Ceramics Corporation Refractory boat and method of manufacture
DE19823908A1 (de) * 1998-05-28 1999-12-02 Kempten Elektroschmelz Gmbh Elliptischer keramischer Verdampfer
DE10015850A1 (de) * 2000-03-30 2001-10-18 Kempten Elektroschmelz Gmbh Material für alterungsbeständige keramische Verdampfer
US7494616B2 (en) 2005-11-04 2009-02-24 Momentive Performance Materials Inc. Container for evaporation of metal and method to manufacture thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB887658A (en) * 1959-02-23 1962-01-24 British Ceramic Res Ass Improvements relating to the preparation of hot-pressed boron nitride
DE1289712C2 (de) * 1965-08-11 1973-12-13 Kempten Elektroschmelz Gmbh Verdampfer fuer das Vakuumaufdampfen von Metallschichten auf Werkstoffe
US3577245A (en) * 1967-11-03 1971-05-04 Union Carbide Corp Boron nitride article having improved thermal stability
US3544486A (en) * 1968-05-23 1970-12-01 Sylvania Electric Prod Refractory bodies containing aluminum nitride,boron nitride and titanium boride
US3673118A (en) * 1970-07-01 1972-06-27 Union Carbide Corp Composite article containing high purity hot pressed boron nitride
US3582611A (en) * 1969-11-24 1971-06-01 Sylvania Electric Prod Apparatus and method of metal evaporation including an evaporation boat having lower electrical resistivity ends than the center thereof
GB1310362A (en) * 1969-12-16 1973-03-21 United States Borax Chem Process for purification of refractory metal nitrides
US3636303A (en) * 1971-03-10 1972-01-18 Gte Sylvania Inc Apparatus for metal vaporization comprising a reduced cross sectio heater and a refractory vessel

Also Published As

Publication number Publication date
ATA720673A (de) 1977-11-15
CH578487A5 (xx) 1976-08-13
DE2240655A1 (de) 1974-02-28
FR2196301B1 (xx) 1977-05-27
ES417413A1 (es) 1976-03-01
SE382445B (sv) 1976-02-02
DE2240655B2 (de) 1975-12-11
FR2196301A1 (xx) 1974-03-15
JPS548214B2 (xx) 1979-04-13
US3915900A (en) 1975-10-28
GB1434136A (en) 1976-05-05
AT344587B (de) 1978-07-25
JPS4953906A (xx) 1974-05-25
IT990474B (it) 1975-06-20
NL7311317A (xx) 1974-02-20
BE803708A (fr) 1974-02-18

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