CA982786A - Method of recovering fluorine from waste gases - Google Patents
Method of recovering fluorine from waste gasesInfo
- Publication number
- CA982786A CA982786A CA166,486A CA166486A CA982786A CA 982786 A CA982786 A CA 982786A CA 166486 A CA166486 A CA 166486A CA 982786 A CA982786 A CA 982786A
- Authority
- CA
- Canada
- Prior art keywords
- waste gases
- recovering fluorine
- recovering
- fluorine
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/48—Halides, with or without other cations besides aluminium
- C01F7/50—Fluorides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/06—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds
- B01D53/10—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds with dispersed adsorbents
- B01D53/12—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with moving adsorbents, e.g. rotating beds with dispersed adsorbents according to the "fluidised technique"
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Environmental & Geological Engineering (AREA)
- Treating Waste Gases (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO943/72A NO131825C (xx) | 1972-03-22 | 1972-03-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA982786A true CA982786A (en) | 1976-02-03 |
Family
ID=19877887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA166,486A Expired CA982786A (en) | 1972-03-22 | 1973-03-20 | Method of recovering fluorine from waste gases |
Country Status (21)
Country | Link |
---|---|
US (1) | US3813852A (xx) |
JP (1) | JPS5792B2 (xx) |
AT (1) | AT322867B (xx) |
BE (1) | BE797066A (xx) |
BR (1) | BR7302019D0 (xx) |
CA (1) | CA982786A (xx) |
CH (1) | CH588417A5 (xx) |
CS (1) | CS189591B2 (xx) |
DE (1) | DE2313495C2 (xx) |
ES (1) | ES412890A1 (xx) |
FR (1) | FR2176817B1 (xx) |
GB (1) | GB1389769A (xx) |
HU (1) | HU165523B (xx) |
IT (1) | IT979616B (xx) |
NL (1) | NL154989B (xx) |
NO (1) | NO131825C (xx) |
OA (1) | OA04670A (xx) |
SE (1) | SE436736B (xx) |
SU (1) | SU728691A3 (xx) |
YU (1) | YU39270B (xx) |
ZA (1) | ZA731280B (xx) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5269284U (xx) * | 1976-08-17 | 1977-05-23 | ||
US4415317A (en) * | 1981-02-09 | 1983-11-15 | The Trane Company | Wrap element and tip seal for use in fluid apparatus of the scroll type |
JPS61132494U (xx) * | 1985-02-07 | 1986-08-19 | ||
JPS62284981A (ja) * | 1986-06-02 | 1987-12-10 | Matsushita Refrig Co | スクロ−ルコンプレツサ |
JPH02114785U (xx) * | 1989-03-01 | 1990-09-13 | ||
US5160512A (en) * | 1992-01-13 | 1992-11-03 | Cleveland State University | Gas separation process |
US6905663B1 (en) | 2000-04-18 | 2005-06-14 | Jose I. Arno | Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas |
US6514471B1 (en) * | 2000-10-31 | 2003-02-04 | Air Products And Chemicals, Inc. | Removing fluorine from semiconductor processing exhaust gas |
GB0101769D0 (en) * | 2001-01-24 | 2001-03-07 | Ineos Fluor Ltd | Decomposition of fluorine compounds |
US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
US7736599B2 (en) * | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
JP5102217B2 (ja) * | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
JP6090845B2 (ja) * | 2013-03-06 | 2017-03-08 | 国立研究開発法人農業・食品産業技術総合研究機構 | 吸引式種子精選装置 |
CN104911631A (zh) * | 2015-06-18 | 2015-09-16 | 中国科学院过程工程研究所 | 多孔氧化铝高效净化铝电解含氟烟气的新方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA613352A (en) * | 1961-01-24 | Aluminum Company Of America | Electrolytic production of aluminum | |
US2059553A (en) * | 1933-10-02 | 1936-11-03 | Harry V Churchill | Removal of fluorine from water |
US3503184A (en) * | 1968-03-07 | 1970-03-31 | Aluminum Co Of America | Treatment of gases evolved in the production of aluminum |
US3721066A (en) * | 1970-12-29 | 1973-03-20 | Teller Environmental Systems | Process for recovery of acid gases |
US3760565A (en) * | 1971-07-19 | 1973-09-25 | Aluminum Co Of America | Anti-pollution method |
-
1972
- 1972-03-22 NO NO943/72A patent/NO131825C/no unknown
-
1973
- 1973-02-22 ZA ZA731280A patent/ZA731280B/xx unknown
- 1973-02-28 IT IT21032/73A patent/IT979616B/it active
- 1973-03-06 YU YU595/73A patent/YU39270B/xx unknown
- 1973-03-13 NL NL737303509A patent/NL154989B/xx not_active IP Right Cessation
- 1973-03-16 FR FR7309551A patent/FR2176817B1/fr not_active Expired
- 1973-03-16 GB GB1275973A patent/GB1389769A/en not_active Expired
- 1973-03-19 DE DE2313495A patent/DE2313495C2/de not_active Expired
- 1973-03-19 US US00342730A patent/US3813852A/en not_active Expired - Lifetime
- 1973-03-20 CA CA166,486A patent/CA982786A/en not_active Expired
- 1973-03-20 BE BE129034A patent/BE797066A/xx not_active IP Right Cessation
- 1973-03-20 HU HUEE2116A patent/HU165523B/hu unknown
- 1973-03-21 ES ES412890A patent/ES412890A1/es not_active Expired
- 1973-03-21 OA OA54858A patent/OA04670A/xx unknown
- 1973-03-21 AT AT253073A patent/AT322867B/de not_active IP Right Cessation
- 1973-03-21 CS CS732072A patent/CS189591B2/cs unknown
- 1973-03-21 SE SE7303963A patent/SE436736B/xx unknown
- 1973-03-21 SU SU731896654A patent/SU728691A3/ru active
- 1973-03-21 BR BR732019A patent/BR7302019D0/pt unknown
- 1973-03-22 JP JP3196073A patent/JPS5792B2/ja not_active Expired
- 1973-03-22 CH CH417273A patent/CH588417A5/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
HU165523B (xx) | 1974-09-28 |
SE436736B (sv) | 1985-01-21 |
FR2176817A1 (xx) | 1973-11-02 |
YU39270B (en) | 1984-10-31 |
FR2176817B1 (xx) | 1976-04-09 |
NO131825C (xx) | 1975-08-13 |
AU5356173A (en) | 1974-09-26 |
NL154989B (nl) | 1977-11-15 |
DE2313495A1 (de) | 1973-10-04 |
YU59573A (en) | 1982-06-30 |
ZA731280B (en) | 1974-10-30 |
US3813852A (en) | 1974-06-04 |
BE797066A (fr) | 1973-07-16 |
OA04670A (fr) | 1980-12-31 |
GB1389769A (en) | 1975-04-09 |
ES412890A1 (es) | 1975-12-16 |
CS189591B2 (en) | 1979-04-30 |
DE2313495C2 (de) | 1982-10-07 |
IT979616B (it) | 1974-09-30 |
CH588417A5 (xx) | 1977-05-31 |
BR7302019D0 (pt) | 1974-07-25 |
NL7303509A (xx) | 1973-09-25 |
JPS497191A (xx) | 1974-01-22 |
JPS5792B2 (xx) | 1982-01-05 |
SU728691A1 (ru) | 1980-04-15 |
AT322867B (de) | 1975-06-10 |
SU728691A3 (en) | 1980-04-15 |
NO131825B (xx) | 1975-05-05 |
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