CA956039A - Semiconductor device fabrication using nickel to mask cathodic etching - Google Patents

Semiconductor device fabrication using nickel to mask cathodic etching

Info

Publication number
CA956039A
CA956039A CA145,913A CA145913A CA956039A CA 956039 A CA956039 A CA 956039A CA 145913 A CA145913 A CA 145913A CA 956039 A CA956039 A CA 956039A
Authority
CA
Canada
Prior art keywords
mask
nickel
semiconductor device
device fabrication
cathodic etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA145,913A
Other languages
English (en)
Other versions
CA145913S (en
Inventor
Edward F. Labuda
George K. Herb
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA956039A publication Critical patent/CA956039A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/942Masking
    • Y10S438/945Special, e.g. metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
CA145,913A 1971-12-20 1972-06-28 Semiconductor device fabrication using nickel to mask cathodic etching Expired CA956039A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00209560A US3808108A (en) 1971-12-20 1971-12-20 Semiconductor device fabrication using nickel to mask cathodic etching

Publications (1)

Publication Number Publication Date
CA956039A true CA956039A (en) 1974-10-08

Family

ID=22779246

Family Applications (1)

Application Number Title Priority Date Filing Date
CA145,913A Expired CA956039A (en) 1971-12-20 1972-06-28 Semiconductor device fabrication using nickel to mask cathodic etching

Country Status (10)

Country Link
US (1) US3808108A (de)
JP (1) JPS5117871B2 (de)
BE (1) BE792908A (de)
CA (1) CA956039A (de)
CH (1) CH544409A (de)
DE (1) DE2261337B2 (de)
FR (1) FR2164684B1 (de)
IT (1) IT976112B (de)
NL (1) NL155984B (de)
SE (1) SE381536B (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328284A1 (fr) * 1975-10-15 1977-05-13 Labo Electronique Physique Diode fonctionnant dans le domaine des ondes millimetriques et son procede de fabrication
JPS52136590A (en) * 1976-05-11 1977-11-15 Matsushita Electric Ind Co Ltd Production of semiconductor device
US4206541A (en) * 1978-06-26 1980-06-10 Extel Corporation Method of manufacturing thin film thermal print heads
CA1109927A (en) * 1978-06-26 1981-09-29 Edmund T. Marciniec Manufacture of thin film thermal print head
US4232440A (en) * 1979-02-27 1980-11-11 Bell Telephone Laboratories, Incorporated Contact structure for light emitting device
US4375390A (en) * 1982-03-15 1983-03-01 Anderson Nathaniel C Thin film techniques for fabricating narrow track ferrite heads
US4514751A (en) * 1982-12-23 1985-04-30 International Business Machines Corporation Compressively stresses titanium metallurgy for contacting passivated semiconductor devices
JP2005527102A (ja) 2001-07-24 2005-09-08 クリー インコーポレイテッド 高電子移動度トランジスタ及びその製造方法
US7692263B2 (en) 2006-11-21 2010-04-06 Cree, Inc. High voltage GaN transistors
US8212290B2 (en) 2007-03-23 2012-07-03 Cree, Inc. High temperature performance capable gallium nitride transistor
US8729156B2 (en) 2009-07-17 2014-05-20 Arkema France Polyhydroxyalkanoate composition exhibiting improved impact resistance at low levels of impact modifier
WO2014085241A1 (en) * 2012-11-29 2014-06-05 Corning Incorporated Joining methods for bulk metallic glasses
TWI733069B (zh) * 2017-12-31 2021-07-11 美商羅門哈斯電子材料有限公司 單體、聚合物及包含其的微影組合物

Also Published As

Publication number Publication date
SE381536B (sv) 1975-12-08
FR2164684B1 (de) 1977-04-08
DE2261337B2 (de) 1977-09-15
NL7217010A (de) 1973-06-22
DE2261337A1 (de) 1973-07-26
JPS5117871B2 (de) 1976-06-05
BE792908A (fr) 1973-04-16
CH544409A (de) 1973-11-15
NL155984B (nl) 1978-02-15
FR2164684A1 (de) 1973-08-03
IT976112B (it) 1974-08-20
US3808108A (en) 1974-04-30
JPS4886473A (de) 1973-11-15

Similar Documents

Publication Publication Date Title
MY7600090A (en) Fabrication of semiconductor devices
CA926036A (en) Fabrication of semiconductor devices
CA956039A (en) Semiconductor device fabrication using nickel to mask cathodic etching
CA937337A (en) Fabrication of semiconductor devices
GB1345818A (en) Semiconductor devices
CA958492A (en) Wafer breaker
CA927978A (en) Fabrication of integrated semiconductor devices by electrochemical etching
GB1420920A (en) Etching compositions
CA920720A (en) Fabrication of semiconductor devices
AU459526B2 (en) Integrated semiconductor structure
CA988817A (en) Etching of group iii-v semiconductors
GB1395238A (en) Semiconductor devices
CA970073A (en) Semiconductor wafer
AU4728572A (en) Manufacturing semiconductor devices
CA857823A (en) Semiconductor mask fabrication
IL42260A0 (en) The manufacture of semiconductor devices by film deposition
AU459637B2 (en) Semiconductor circuit
CA882390A (en) Semiconductor devices using all positive photographic masks
CA934483A (en) Fabrication of complementary semiconductor devices
CA902796A (en) Fabrication of semiconductor devices
CA863541A (en) Semiconductor device fabrication processes
CA967274A (en) Photosensitive semiconductor device
AU452767B2 (en) Fabrication of semiconductor devices
AU458873B2 (en) Fabrication of semiconductor devices
AU465323B2 (en) Semi-conductor devices