CA955156A - Process for the manufacture of a gallium-arsenide crystal from a solution of ga as in ga, doped with silicon and germanium - Google Patents

Process for the manufacture of a gallium-arsenide crystal from a solution of ga as in ga, doped with silicon and germanium

Info

Publication number
CA955156A
CA955156A CA104,370A CA104370A CA955156A CA 955156 A CA955156 A CA 955156A CA 104370 A CA104370 A CA 104370A CA 955156 A CA955156 A CA 955156A
Authority
CA
Canada
Prior art keywords
germanium
gallium
doped
silicon
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA104,370A
Other languages
English (en)
Other versions
CA104370S (en
Inventor
Wolfgang Touchy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA955156A publication Critical patent/CA955156A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/10Controlling or regulating
    • C30B19/106Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/06Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061Tipping system, e.g. by rotation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CA104,370A 1970-02-03 1971-02-03 Process for the manufacture of a gallium-arsenide crystal from a solution of ga as in ga, doped with silicon and germanium Expired CA955156A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2004849A DE2004849B2 (de) 1970-02-03 1970-02-03 Verfahren zum Herstellen eines mit Silicium oder Germanium dotierten Galliumarsenidkristalls durch Kristallisation

Publications (1)

Publication Number Publication Date
CA955156A true CA955156A (en) 1974-09-24

Family

ID=5761308

Family Applications (1)

Application Number Title Priority Date Filing Date
CA104,370A Expired CA955156A (en) 1970-02-03 1971-02-03 Process for the manufacture of a gallium-arsenide crystal from a solution of ga as in ga, doped with silicon and germanium

Country Status (9)

Country Link
US (1) US3756955A (enExample)
AT (1) AT310813B (enExample)
CA (1) CA955156A (enExample)
CH (1) CH558205A (enExample)
DE (1) DE2004849B2 (enExample)
FR (1) FR2078062A5 (enExample)
GB (1) GB1282249A (enExample)
NL (1) NL7101381A (enExample)
SE (1) SE360022B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371420A (en) * 1981-03-09 1983-02-01 The United States Of America As Represented By The Secretary Of The Navy Method for controlling impurities in liquid phase epitaxial growth
US5183767A (en) * 1991-02-14 1993-02-02 International Business Machines Corporation Method for internal gettering of oxygen in iii-v compound semiconductors
US5272373A (en) * 1991-02-14 1993-12-21 International Business Machines Corporation Internal gettering of oxygen in III-V compound semiconductors

Also Published As

Publication number Publication date
CH558205A (de) 1975-01-31
US3756955A (en) 1973-09-04
DE2004849A1 (de) 1971-08-19
AT310813B (de) 1973-10-25
DE2004849B2 (de) 1975-06-05
FR2078062A5 (enExample) 1971-11-05
SE360022B (enExample) 1973-09-17
GB1282249A (en) 1972-07-19
NL7101381A (enExample) 1971-08-05

Similar Documents

Publication Publication Date Title
CA959630A (en) Process for producing silicon oxynitride
CA918308A (en) Method and device for the deposition of doped semiconductors
CA934072A (en) Lateral transistor structure and process for forming the same
CA1000300A (en) Process for the manufacture of n,n-dihaloalkyl-2,6-dinitro-4-substituted anilines
CA954016A (en) Production of doped gallium arsenide
CA955156A (en) Process for the manufacture of a gallium-arsenide crystal from a solution of ga as in ga, doped with silicon and germanium
CA965689A (en) Doping of silicon crystals
CA854732A (en) Process for aminophenol
CA839219A (en) Silicon crystal growing
CA997369A (en) Integrated process for the production of urea
AU248705B2 (en) Process for producing selectively doped semiconductor dendritic crystals
CA729212A (en) Process for preparing silicon isocyanates
CA806627A (en) Method and apparatus for producing doped, monocrystalline semiconductor materials
AU6037860A (en) Process for producing selectively doped semiconductor dendritic crystals
CA838346A (en) Process for fabricating semiconductor wafer with oxide-isolated monocrystalline region
AU273168B2 (en) Production of single crystal compounds epitaxial films of said compounds, and semiconductor devices utilizing said compounds
CA675322A (en) Process for producing selectively doped semiconductor dendritic crystals
CA550351A (en) Method of producing p-n crystals of germanium silicon, or other semiconductors
CA833499A (en) Single crystal silicon on chrysoberyl
CA937493A (en) Glass encapsulated semiconductor device fabrication process
AU257519B2 (en) Improvements in or relating to process for producing selectively doped semiconductor dendritic crystals
CA843642A (en) Carrier lifetime killer doping process for semiconductor structures and the product formed thereby
CA760951A (en) Method of doping semiconductor material, particularly silicon, with boron
AU1494962A (en) Production of single crystal compounds epitaxial films of said compounds, and semiconductor devices utilizing said compounds
CA620881A (en) Method for producing a highly doped zone in semiconductor bodies