SE360022B - - Google Patents

Info

Publication number
SE360022B
SE360022B SE01278/71A SE127871A SE360022B SE 360022 B SE360022 B SE 360022B SE 01278/71 A SE01278/71 A SE 01278/71A SE 127871 A SE127871 A SE 127871A SE 360022 B SE360022 B SE 360022B
Authority
SE
Sweden
Application number
SE01278/71A
Inventor
W Touchy
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE360022B publication Critical patent/SE360022B/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/10Controlling or regulating
    • C30B19/106Controlling or regulating adding crystallising material or reactants forming it in situ to the liquid
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00Liquid-phase epitaxial-layer growth
    • C30B19/06Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/061Tipping system, e.g. by rotation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
SE01278/71A 1970-02-03 1971-02-02 SE360022B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2004849A DE2004849B2 (de) 1970-02-03 1970-02-03 Verfahren zum Herstellen eines mit Silicium oder Germanium dotierten Galliumarsenidkristalls durch Kristallisation

Publications (1)

Publication Number Publication Date
SE360022B true SE360022B (xx) 1973-09-17

Family

ID=5761308

Family Applications (1)

Application Number Title Priority Date Filing Date
SE01278/71A SE360022B (xx) 1970-02-03 1971-02-02

Country Status (9)

Country Link
US (1) US3756955A (xx)
AT (1) AT310813B (xx)
CA (1) CA955156A (xx)
CH (1) CH558205A (xx)
DE (1) DE2004849B2 (xx)
FR (1) FR2078062A5 (xx)
GB (1) GB1282249A (xx)
NL (1) NL7101381A (xx)
SE (1) SE360022B (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4371420A (en) * 1981-03-09 1983-02-01 The United States Of America As Represented By The Secretary Of The Navy Method for controlling impurities in liquid phase epitaxial growth
US5183767A (en) * 1991-02-14 1993-02-02 International Business Machines Corporation Method for internal gettering of oxygen in iii-v compound semiconductors
US5272373A (en) * 1991-02-14 1993-12-21 International Business Machines Corporation Internal gettering of oxygen in III-V compound semiconductors

Also Published As

Publication number Publication date
CA955156A (en) 1974-09-24
DE2004849B2 (de) 1975-06-05
FR2078062A5 (xx) 1971-11-05
NL7101381A (xx) 1971-08-05
GB1282249A (en) 1972-07-19
AT310813B (de) 1973-10-25
US3756955A (en) 1973-09-04
CH558205A (de) 1975-01-31
DE2004849A1 (de) 1971-08-19

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