CA3013169C - Optical-fiber-compatible acoustic sensor - Google Patents
Optical-fiber-compatible acoustic sensor Download PDFInfo
- Publication number
- CA3013169C CA3013169C CA3013169A CA3013169A CA3013169C CA 3013169 C CA3013169 C CA 3013169C CA 3013169 A CA3013169 A CA 3013169A CA 3013169 A CA3013169 A CA 3013169A CA 3013169 C CA3013169 C CA 3013169C
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- CA
- Canada
- Prior art keywords
- sensor
- diaphragm
- certain embodiments
- reflective element
- optical
- Prior art date
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- 239000013307 optical fiber Substances 0.000 claims abstract description 156
- 230000003287 optical effect Effects 0.000 claims abstract description 149
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 238000004891 communication Methods 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 68
- 230000004044 response Effects 0.000 claims description 51
- 239000011344 liquid material Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 127
- 239000004038 photonic crystal Substances 0.000 description 86
- 238000000034 method Methods 0.000 description 70
- 239000000835 fiber Substances 0.000 description 61
- 239000000377 silicon dioxide Substances 0.000 description 57
- 235000012431 wafers Nutrition 0.000 description 50
- 230000035945 sensitivity Effects 0.000 description 44
- 238000001228 spectrum Methods 0.000 description 41
- 239000012530 fluid Substances 0.000 description 38
- 230000008859 change Effects 0.000 description 35
- 239000000463 material Substances 0.000 description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 229910052710 silicon Inorganic materials 0.000 description 31
- 239000010703 silicon Substances 0.000 description 31
- 238000006073 displacement reaction Methods 0.000 description 27
- 230000000694 effects Effects 0.000 description 26
- 230000002829 reductive effect Effects 0.000 description 25
- 238000004519 manufacturing process Methods 0.000 description 24
- 230000008569 process Effects 0.000 description 24
- 230000006870 function Effects 0.000 description 19
- 238000002310 reflectometry Methods 0.000 description 19
- 238000001514 detection method Methods 0.000 description 17
- 238000010168 coupling process Methods 0.000 description 15
- 238000005859 coupling reaction Methods 0.000 description 15
- 230000005855 radiation Effects 0.000 description 15
- 230000008878 coupling Effects 0.000 description 14
- 238000006880 cross-coupling reaction Methods 0.000 description 14
- 238000013461 design Methods 0.000 description 14
- 238000005259 measurement Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 230000033001 locomotion Effects 0.000 description 10
- FCJSHPDYVMKCHI-UHFFFAOYSA-N phenyl benzoate Chemical compound C=1C=CC=CC=1C(=O)OC1=CC=CC=C1 FCJSHPDYVMKCHI-UHFFFAOYSA-N 0.000 description 10
- 238000012512 characterization method Methods 0.000 description 9
- 230000000875 corresponding effect Effects 0.000 description 9
- 238000013016 damping Methods 0.000 description 9
- 239000005350 fused silica glass Substances 0.000 description 9
- 230000005693 optoelectronics Effects 0.000 description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- 238000000206 photolithography Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 238000000708 deep reactive-ion etching Methods 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 239000011651 chromium Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 238000004088 simulation Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 230000001747 exhibiting effect Effects 0.000 description 4
- 229960002050 hydrofluoric acid Drugs 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000005653 Brownian motion process Effects 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005537 brownian motion Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000001627 detrimental effect Effects 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000000847 optical profilometry Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 239000013535 sea water Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 230000002277 temperature effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 241000252506 Characiformes Species 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 101000909811 Homo sapiens Protein cornichon homolog 2 Proteins 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 102100024446 Protein cornichon homolog 2 Human genes 0.000 description 1
- 101150105133 RRAD gene Proteins 0.000 description 1
- 229910008051 Si-OH Inorganic materials 0.000 description 1
- 229910006358 Si—OH Inorganic materials 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005534 acoustic noise Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000344 soap Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 230000008542 thermal sensitivity Effects 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12138—Sensor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA3090851A CA3090851C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US31409010P | 2010-03-15 | 2010-03-15 | |
| US61/314090 | 2010-03-15 | ||
| US33130310P | 2010-05-04 | 2010-05-04 | |
| US61/331303 | 2010-05-04 | ||
| US38238510P | 2010-09-13 | 2010-09-13 | |
| US61/382385 | 2010-09-13 | ||
| CA2793452A CA2793452C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2793452A Division CA2793452C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3090851A Division CA3090851C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA3013169A1 CA3013169A1 (en) | 2011-09-22 |
| CA3013169C true CA3013169C (en) | 2020-10-27 |
Family
ID=44625644
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3013169A Active CA3013169C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
| CA2793452A Active CA2793452C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
| CA3090851A Active CA3090851C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2793452A Active CA2793452C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
| CA3090851A Active CA3090851C (en) | 2010-03-15 | 2011-03-14 | Optical-fiber-compatible acoustic sensor |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US8542956B2 (enExample) |
| EP (1) | EP2547990B1 (enExample) |
| JP (2) | JP5819394B2 (enExample) |
| CN (1) | CN103154682B (enExample) |
| CA (3) | CA3013169C (enExample) |
| NO (1) | NO345445B1 (enExample) |
| WO (1) | WO2011115933A2 (enExample) |
Families Citing this family (69)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5028410B2 (ja) | 2005-04-29 | 2012-09-19 | ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティ | 高感度ファイバ適合光音響センサ |
| US7881565B2 (en) | 2006-05-04 | 2011-02-01 | The Board Of Trustees Of The Leland Stanford Junior University | Device and method using asymmetric optical resonances |
| US7630589B2 (en) * | 2007-01-09 | 2009-12-08 | The Board Of Trustees Of The Leland Stanford Junior University | Photonic crystal structure sensor |
| JP5819394B2 (ja) | 2010-03-15 | 2015-11-24 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 光ファイバ適合音響センサ |
| US8879067B2 (en) * | 2010-09-01 | 2014-11-04 | Lake Shore Cryotronics, Inc. | Wavelength dependent optical force sensing |
| US8636911B2 (en) * | 2010-10-07 | 2014-01-28 | Magic Technologies, Inc. | Process for MEMS scanning mirror with mass remove from mirror backside |
| FR2974263B1 (fr) * | 2011-04-14 | 2014-10-24 | Thales Sa | Hydrophone tout optique insensible a la temperature et a la pression statique |
| JP5743715B2 (ja) * | 2011-05-26 | 2015-07-01 | キヤノン株式会社 | 音響信号受信装置 |
| US20120321322A1 (en) * | 2011-06-16 | 2012-12-20 | Honeywell International Inc. | Optical microphone |
| US8594507B2 (en) * | 2011-06-16 | 2013-11-26 | Honeywell International Inc. | Method and apparatus for measuring gas concentrations |
| US20120325001A1 (en) * | 2011-06-27 | 2012-12-27 | The Boeing Company | Optical sensor systems and methods |
| JP5232334B1 (ja) * | 2011-08-25 | 2013-07-10 | パナソニック株式会社 | 光マイクロホン |
| CN103048389B (zh) * | 2011-10-13 | 2015-03-18 | 中国科学院合肥物质科学研究院 | 双探头补偿式光纤声发射传感器 |
| CN103380630A (zh) * | 2011-10-24 | 2013-10-30 | 松下电器产业株式会社 | 光学麦克 |
| JP6049293B2 (ja) * | 2011-12-26 | 2016-12-21 | キヤノン株式会社 | 音響波取得装置 |
| EP2828622B1 (en) * | 2012-03-22 | 2019-07-17 | University of Limerick | A sensor for combined temperature, pressure, and refractive index detection |
| FR2996011B1 (fr) * | 2012-09-21 | 2016-01-01 | Centre Nat Rech Scient | Procede de connexion d'une fibre optique et connecteur pour fibre optique |
| US9267963B2 (en) * | 2012-11-08 | 2016-02-23 | The Board Of Trustees Of The Leland Stanford Junior University | Interferometric atomic-force microscopy device and method |
| CN103063574B (zh) * | 2012-12-21 | 2014-10-29 | 安徽大学 | 一种膜片式微型光声池及其应用 |
| US9103968B2 (en) * | 2013-02-12 | 2015-08-11 | The Boeing Company | Multifunctional optical sensor unit |
| CN103152684B (zh) * | 2013-03-12 | 2015-12-02 | 中国电子科技集团公司第三研究所 | 光纤传声器探头 |
| US9372173B2 (en) * | 2013-03-14 | 2016-06-21 | Orbital Atk, Inc. | Ultrasonic testing phased array inspection fixture and related methods |
| US9423311B2 (en) * | 2013-03-14 | 2016-08-23 | Behzad Moslehi | Movement and expression sensor |
| US9275868B2 (en) * | 2013-07-19 | 2016-03-01 | Globalfoundries Inc. | Uniform roughness on backside of a wafer |
| CN103528665A (zh) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | 一种新型法布里-帕罗干涉型mems声波传感器 |
| CN103542926B (zh) * | 2013-10-09 | 2015-07-08 | 中国船舶重工集团公司第七一五研究所 | 一种光纤微机电水听器及其制作方法 |
| CN103994818B (zh) * | 2014-06-05 | 2016-03-02 | 中国科学院电子学研究所 | 光纤fp腔声波传感探头 |
| CN104036545A (zh) * | 2014-06-27 | 2014-09-10 | 嘉善天慧光电科技有限公司 | 一种便携式自适应图像三维重建仪的光源结构 |
| US20170307437A1 (en) * | 2014-10-01 | 2017-10-26 | Phonoptics | Opto-mechanical transducer for the detection of vibrations |
| CN104502016B (zh) * | 2014-12-04 | 2017-06-09 | 刘玉珏 | 一种基于mems工艺的腔长可调f‑p压力传感器及成型方法 |
| CN104502005B (zh) * | 2014-12-04 | 2017-09-19 | 上海拜安传感技术有限公司 | 一种基于mems工艺的f‑p压力传感器及成型方法 |
| CN104596435B (zh) * | 2014-12-04 | 2017-09-19 | 中国科学院上海微系统与信息技术研究所 | 一种基于mems工艺的腔长可调光纤f‑p应变计及成型方法 |
| CN104596685B (zh) * | 2014-12-04 | 2017-05-10 | 刘玉珏 | 一种基于mems工艺的微型封装f‑p压力传感器及成型方法 |
| GB201500641D0 (en) * | 2015-01-15 | 2015-03-04 | Ucl Business Plc | Ultrasound probe |
| US9933319B2 (en) * | 2015-04-13 | 2018-04-03 | Invensense, Inc. | Acoustic ambient temperature and humidity sensing |
| WO2016196954A1 (en) * | 2015-06-04 | 2016-12-08 | The University Of Massachusetts | Fiber optic temperature measurement system |
| US9897506B2 (en) * | 2015-07-16 | 2018-02-20 | Kulite Semiconductor Products, Inc. | Systems and methods for liquid dynamic pressure testing |
| RU2610382C1 (ru) * | 2015-12-28 | 2017-02-09 | Общество С Ограниченной Ответственностью "Научно-Производственное Предприятие "Технология" | Способ настройки максимальной чувствительности волоконно-оптического гидрофона |
| US9736597B1 (en) * | 2016-02-17 | 2017-08-15 | Siemens Energy, Inc. | Optical fiber based microphone array for detecting acoustic emissions generated by an area of interest |
| US9992581B2 (en) | 2016-03-25 | 2018-06-05 | Northrop Grumman Systems Corporation | Optical microphone system |
| CN105737966A (zh) * | 2016-04-16 | 2016-07-06 | 西北大学 | 法布里-珀罗腔金箔光纤超声波传感器 |
| US10251027B2 (en) * | 2016-12-15 | 2019-04-02 | Wisconsin Alumni Ressarch Foundation | Navigation system tracking high-efficiency indoor lighting fixtures |
| US10753908B2 (en) * | 2017-02-22 | 2020-08-25 | The Hong Kong Polytechnic University | Resonator for force detection |
| CN108132093B (zh) * | 2017-10-11 | 2020-08-11 | 黄辉 | 一种悬膜光纤声波传感器及其制备方法 |
| WO2019183137A1 (en) | 2018-03-23 | 2019-09-26 | Digonnet Michel J F | Diaphragm-based fiber acoustic sensor |
| GB201807889D0 (en) * | 2018-05-15 | 2018-06-27 | Sintef Tto As | Microphone housing |
| DE102018111816B4 (de) * | 2018-05-16 | 2021-01-21 | Anton Paar Provetec Gmbh | Vorbereitung einer Destillationsmessung |
| WO2019227014A1 (en) * | 2018-05-24 | 2019-11-28 | Baker Hughes, A Ge Company, Llc | Transducers including laser etched substrates |
| CN109238437A (zh) * | 2018-08-28 | 2019-01-18 | 电子科技大学 | 一种基于氮化硅mems膜的光纤法珀声波探头 |
| CN108844561B (zh) * | 2018-08-31 | 2024-05-17 | 中国科学技术大学 | 光纤法珀气泡腔传感器及其制作方法 |
| CN109374109B (zh) * | 2018-09-01 | 2020-09-25 | 哈尔滨工程大学 | 一种共光路结构的微型光纤非本征型迈克尔逊声压传感器 |
| CN109506764B (zh) * | 2018-12-12 | 2021-09-24 | 电子科技大学 | 一种光纤mems麦克风阵列声波探测板及系统 |
| KR102191673B1 (ko) * | 2019-03-04 | 2020-12-17 | 한국과학기술원 | 초소형 렌즈형 광섬유 프로브를 갖는 내시현미경 |
| US11079230B2 (en) | 2019-05-10 | 2021-08-03 | Northrop Grumman Systems Corporation | Fiber-optic gyroscope (FOG) assembly |
| CN110346333A (zh) * | 2019-08-07 | 2019-10-18 | 东北大学 | 一种lrspr高灵敏度光纤传感器 |
| WO2021080973A1 (en) * | 2019-10-21 | 2021-04-29 | Massachusetts Institute Of Technology | Distributed-sensor quench detection method for superconducting devices |
| CN110673204B (zh) * | 2019-11-13 | 2021-06-11 | 山东省科学院激光研究所 | 基于螺旋管平衡静压的光纤光栅水听器 |
| EP3865453A1 (en) | 2020-02-13 | 2021-08-18 | Miraex SA | Micro-opto-mechanical system sensor, arrangement and manufacturing method |
| CN111460577A (zh) * | 2020-03-23 | 2020-07-28 | 南京航空航天大学 | 一种隔热瓦-粘接层系统的动力学响应快速评估方法 |
| US11262506B1 (en) * | 2020-08-07 | 2022-03-01 | Advanced Semiconductor Engineering, Inc. | Recessed portion in a substrate and method of forming the same |
| CN112763052B (zh) * | 2020-12-16 | 2022-04-08 | 华中科技大学 | 一种反电子监测的宽带声波传感器 |
| CN113916348B (zh) * | 2021-09-09 | 2022-10-18 | 山东大学 | 一种测量材料传递损失的装置及方法 |
| CN114486019B (zh) * | 2022-01-12 | 2023-07-07 | 西北工业大学 | 一种消除第三腔干扰的光纤法珀压力传感器及mems制造方法 |
| CN116839639A (zh) * | 2022-03-24 | 2023-10-03 | 华为技术有限公司 | 光纤传感器和检测设备 |
| WO2023215319A1 (en) * | 2022-05-02 | 2023-11-09 | Jun Zou | Surface-micromachined fabry-pérot sensors and array |
| CN115014498B (zh) * | 2022-06-01 | 2023-03-14 | 上海大学 | 一种光纤谐振式法布里珀罗超声传感器件 |
| CN115444407B (zh) * | 2022-09-02 | 2024-08-09 | 嘉兴学院 | 一种基于光纤声波传感的生理信息监测装置 |
| CN117617913B (zh) * | 2024-01-25 | 2024-06-18 | 浙江巴泰医疗科技有限公司 | 压力导丝 |
| CN119439575A (zh) * | 2024-10-17 | 2025-02-14 | 华中科技大学 | 一种腔增强型的法布里-珀罗干涉谐振腔 |
Family Cites Families (101)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2923915A (en) * | 1957-01-22 | 1960-02-02 | vogel | |
| US3831137A (en) | 1972-04-14 | 1974-08-20 | Us Navy | Acousto-optic underwater detector |
| NZ186808A (en) * | 1977-04-06 | 1979-10-25 | Rocol Ltd | Lubricant composition containing group ii-a metal carbonate and halogenated organic lubricant |
| GB1558689A (en) | 1977-12-06 | 1980-01-09 | Standard Telephones Cables Ltd | Reduction of reflection at fibre optic ends |
| US4446543A (en) | 1979-07-02 | 1984-05-01 | The United States Of America As Represented By The Secretary Of The Navy | Optical resonator single-mode fiber hydrophone |
| CA1123642A (en) | 1979-07-04 | 1982-05-18 | Alexander W. Lightstone | Multimode optical fiber coupler |
| CA1124384A (en) * | 1979-08-09 | 1982-05-25 | Paolo G. Cielo | Stable fiber-optic hydrophone |
| JPS584322B2 (ja) | 1979-12-10 | 1983-01-26 | 日本電信電話株式会社 | 光変調装置 |
| JPS59155526A (ja) | 1983-02-25 | 1984-09-04 | Hitachi Ltd | デイ−ゼルエンジン排気浄化装置 |
| US4519252A (en) | 1983-03-21 | 1985-05-28 | Sperry Corporation | Pressure and temperature compensated photoelastic hydrophone |
| JPS59155526U (ja) * | 1983-04-05 | 1984-10-18 | 沖電気工業株式会社 | 振動ピツクアツプ |
| JPS6052073A (ja) * | 1983-08-31 | 1985-03-23 | Fujitsu Ltd | 波長安定化半導体レ−ザ |
| US5574699A (en) * | 1983-10-31 | 1996-11-12 | Cuomo; Frank W. | Fiber optic lever towed array |
| JPS6156598A (ja) | 1984-08-28 | 1986-03-22 | Oki Electric Ind Co Ltd | 光フアイバハイドロホン |
| JPS61235731A (ja) * | 1985-04-11 | 1986-10-21 | Sharp Corp | 感圧素子 |
| US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
| US5052228A (en) * | 1986-11-19 | 1991-10-01 | Massachusetts Institute Of Technology | Shear stress measuring device |
| US5000901A (en) * | 1988-07-25 | 1991-03-19 | Abbott Laboratories | Fiber-optic physiological probes |
| US5039492A (en) * | 1989-01-27 | 1991-08-13 | Metricor, Inc. | Optical pH and gas concentration sensor |
| US4911516A (en) | 1989-02-27 | 1990-03-27 | General Electric Company | Optical device with mode selecting grating |
| JPH03160774A (ja) * | 1989-11-20 | 1991-07-10 | Toshiba Corp | 半導体レーザモジュール |
| US5280173A (en) * | 1992-01-31 | 1994-01-18 | Brown University Research Foundation | Electric and electromagnetic field sensing system including an optical transducer |
| JPH0652073A (ja) | 1992-07-29 | 1994-02-25 | Toshiba Corp | 通信インタフェースボードのテスト装置 |
| US5311485A (en) * | 1992-10-30 | 1994-05-10 | The United States Of America As Represented By The United States Department Of Energy | Fiber optic hydrophone |
| US5488504A (en) | 1993-08-20 | 1996-01-30 | Martin Marietta Corp. | Hybridized asymmetric fabry-perot quantum well light modulator |
| US6680792B2 (en) | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
| FR2730810B1 (fr) | 1995-02-21 | 1997-03-14 | Thomson Csf | Capteur chimique hautement selectif |
| US5832157A (en) | 1996-07-12 | 1998-11-03 | Mcdermott Technology, Inc. | Fiber optic acoustic emission sensor |
| US6281976B1 (en) * | 1997-04-09 | 2001-08-28 | The Texas A&M University System | Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement |
| RU2152601C1 (ru) * | 1998-06-16 | 2000-07-10 | Научный центр волоконной оптики при Институте общей физики РАН | Волоконно-оптический датчик давления (его варианты) и способ его изготовления |
| US6188644B1 (en) * | 1999-05-10 | 2001-02-13 | The United States Of America As Represented By The Secretary Of The Navy | Photon transducer |
| US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
| US6542244B1 (en) * | 1999-12-07 | 2003-04-01 | Harris Corporation | Variable sensitivity acoustic transducer |
| US6768590B2 (en) * | 2000-05-19 | 2004-07-27 | Shipley Company, L.L.C. | Method of fabricating optical filters |
| EP1168008B1 (en) | 2000-06-21 | 2008-05-14 | Matsushita Electric Industrial Co., Ltd. | Photonic band gap optical fibre |
| JP4619507B2 (ja) | 2000-09-26 | 2011-01-26 | 浜松ホトニクス株式会社 | 光ファイバ結合装置、波長可変器、圧力センサ、加速度センサ及び光学装置 |
| EP1197738A1 (de) | 2000-10-18 | 2002-04-17 | Abb Research Ltd. | Anisotroper Faserlaser-Sensor mit verteilter Rückkopplung |
| US6777244B2 (en) | 2000-12-06 | 2004-08-17 | Hrl Laboratories, Llc | Compact sensor using microcavity structures |
| US7973936B2 (en) | 2001-01-30 | 2011-07-05 | Board Of Trustees Of Michigan State University | Control system and apparatus for use with ultra-fast laser |
| US6717707B2 (en) | 2001-02-21 | 2004-04-06 | Beyond 3, Inc. | Method and system for controlling resonance within a resonator-enhanced optical system |
| US7193725B2 (en) | 2001-02-21 | 2007-03-20 | Xyratex Technology Ltd. | Method and system for optical measurement via a resonator having a non-uniform phase profile |
| US6925213B2 (en) * | 2001-03-09 | 2005-08-02 | University Of Cincinnati | Micromachined fiber optic sensors |
| US6822784B2 (en) | 2001-03-22 | 2004-11-23 | Matsushita Electric Works, Ltd | Light-beam deflecting device with photonic crystal, optical switch using the same, and light-beam deflecting method |
| US6705771B2 (en) * | 2001-09-26 | 2004-03-16 | Np Photonics, Inc. | Method of fusion splicing silica fiber with low-temperature multi-component glass fiber |
| JP3642570B2 (ja) * | 2001-10-23 | 2005-04-27 | 株式会社東北テクノアーチ | 光干渉型マイクロ・ハイドロホン |
| JP2003185864A (ja) | 2001-12-20 | 2003-07-03 | Fujitsu Ltd | フォトニック結晶光機能素子 |
| US6816514B2 (en) * | 2002-01-24 | 2004-11-09 | Np Photonics, Inc. | Rare-earth doped phosphate-glass single-mode fiber lasers |
| WO2003075055A1 (en) | 2002-03-06 | 2003-09-12 | Pirelli & C. S.P.A. | Method for guiding an electromagnetic radiation, in particular in an integrated optical device |
| US6807342B2 (en) | 2002-03-12 | 2004-10-19 | Opticnet, Inc. | Fiber optic tunable filter using a fabry-perot resonator |
| JP3404031B2 (ja) | 2002-03-25 | 2003-05-06 | 株式会社東芝 | 集積化光合分波器 |
| US6728457B2 (en) | 2002-07-10 | 2004-04-27 | Agilent Technologies, Inc. | Waveguides in two dimensional slab photonic crystals with noncircular holes |
| US7155087B2 (en) | 2002-10-11 | 2006-12-26 | The Board Of Trustees Of The Leland Stanford Junior University | Photonic crystal reflectors/filters and displacement sensing applications |
| US7224465B2 (en) | 2002-10-15 | 2007-05-29 | University Of Maryland | Fiber tip based sensor system for measurements of pressure gradient, air particle velocity and acoustic intensity |
| KR100490754B1 (ko) | 2002-11-15 | 2005-05-24 | 한국전자통신연구원 | 파장 의존성을 조절할 수 있는 가변 감쇠기 |
| TW588162B (en) | 2003-04-21 | 2004-05-21 | Univ Nat Chiao Tung | Fiber-optic tunable filters and intensity modulators |
| KR100489810B1 (ko) | 2003-05-12 | 2005-05-17 | 한국전자통신연구원 | 전자기력에 의해 양방향으로 구동되는 파장가변 필터 |
| JP2005045463A (ja) | 2003-07-25 | 2005-02-17 | Toshiba Corp | 音響電気変換素子 |
| US7134343B2 (en) | 2003-07-25 | 2006-11-14 | Kabushiki Kaisha Toshiba | Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound |
| US7134339B2 (en) | 2003-08-04 | 2006-11-14 | Murata Manufacturing Co., Ltd. | Acceleration sensor |
| US7330277B2 (en) | 2003-08-20 | 2008-02-12 | Xyratex Technology Limited | Resonant ellipsometer and method for determining ellipsometric parameters of a surface |
| WO2005022222A1 (ja) | 2003-08-29 | 2005-03-10 | Kyoto University | エアブリッジ構造を有する２次元フォトニック結晶及びその製造方法 |
| JP4063740B2 (ja) | 2003-08-29 | 2008-03-19 | 国立大学法人京都大学 | エアブリッジ構造を有する２次元フォトニック結晶及びその製造方法 |
| US7054011B2 (en) * | 2003-09-04 | 2006-05-30 | Virginia Tech Intellectual Properties, Inc. | Optical fiber pressure and acceleration sensor fabricated on a fiber endface |
| US7283716B2 (en) | 2003-10-21 | 2007-10-16 | The Regents Of The University Of Colorado | Strain tunable, flexible photonic crystals |
| US20050169590A1 (en) | 2003-12-31 | 2005-08-04 | Crystal Fibre A/S | Liquid crystal infiltrated optical fibre, method of its production, and use thereof |
| US20050186117A1 (en) | 2004-02-19 | 2005-08-25 | Hiroyuki Uchiyama | Gas detecting method and gas sensors |
| BRPI0508448B1 (pt) | 2004-03-04 | 2017-12-26 | Halliburton Energy Services, Inc. | Method for analysis of one or more well properties and measurement system during drilling for collection and analysis of one or more measurements of force " |
| US7173713B2 (en) * | 2004-03-04 | 2007-02-06 | Virginia Tech Intellectual Properties, Inc. | Optical fiber sensors for harsh environments |
| US7489846B2 (en) | 2004-03-11 | 2009-02-10 | Agilent Technologies, Inc. | Photonic crystal sensors |
| US20050201660A1 (en) | 2004-03-11 | 2005-09-15 | Grot Annette C. | Apparatus for single nanoparticle detection |
| JP4208754B2 (ja) | 2004-03-24 | 2009-01-14 | 株式会社リコー | 光遅延素子 |
| US20050231728A1 (en) | 2004-04-15 | 2005-10-20 | Anbo Wang | Q-point stabilization for linear interferometric sensors using tunable diffraction grating |
| US7492463B2 (en) * | 2004-04-15 | 2009-02-17 | Davidson Instruments Inc. | Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor |
| JP2005309295A (ja) | 2004-04-26 | 2005-11-04 | Nec Corp | 光増幅素子、光増幅装置および光増幅システム |
| US7619744B2 (en) | 2004-04-29 | 2009-11-17 | Koninklijke Philips Electronics N.V. | Movement sensor |
| WO2005114166A1 (en) | 2004-05-21 | 2005-12-01 | Atonomics A/S | Surface acoustic wave sensor comprising a hydrogel |
| BRPI0403240B1 (pt) * | 2004-08-10 | 2016-02-16 | Petroleo Brasileiro Sa | transdutor óptico para medida simultânea de pressão e temperatura em poços de petróleo e método para dita medida |
| US7400797B2 (en) | 2004-10-06 | 2008-07-15 | Corning Incorporated | Transverse closed-loop resonator |
| US7190869B2 (en) | 2004-10-29 | 2007-03-13 | The Hong Kong Polytechnic University | Two-mode photonic crystal fiber and applications thereof |
| US7187816B2 (en) | 2004-12-13 | 2007-03-06 | Purdue Research Foundation | In-fiber whitelight interferometry using long-period fiber grating |
| US7689071B2 (en) * | 2004-12-22 | 2010-03-30 | Opsens Inc. | Fiber optic pressure sensor for catheter use |
| US7751055B2 (en) | 2005-01-28 | 2010-07-06 | Honeywell International Inc. | Hollow core fiber optical gyro |
| WO2006092052A1 (en) * | 2005-03-02 | 2006-09-08 | Fiso Technologies Inc. | Fabry-perot optical sensor and method of manufacturing the same |
| US7446880B2 (en) | 2005-04-06 | 2008-11-04 | President And Fellows Of Harvard College | Method and apparatus for measuring and monitoring optical properties based on a ring-resonator |
| JP5028410B2 (ja) | 2005-04-29 | 2012-09-19 | ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティ | 高感度ファイバ適合光音響センサ |
| US7308163B2 (en) | 2005-05-10 | 2007-12-11 | Hewlett-Packard Development Company, L.P. | Photonic crystal system and method of controlling/detecting direction of radiation propagation using photonic crystal system |
| US7684657B2 (en) | 2005-08-12 | 2010-03-23 | Fiso Technologies Inc. | Single piece Fabry-Perot optical sensor and method of manufacturing the same |
| EP1954193B1 (en) | 2005-11-23 | 2013-03-06 | University of Washington | Scanning beam with variable sequential framing using interrupted scanning resonance |
| US7944567B2 (en) | 2005-12-05 | 2011-05-17 | Fujifilm Corporation | Semiconductor light emitting element, light source using the semiconductor light emitting element, and optical tomography imaging apparatus |
| JP2007298368A (ja) * | 2006-04-28 | 2007-11-15 | Kyocera Corp | 光ファイバ圧力センサ |
| US7881565B2 (en) | 2006-05-04 | 2011-02-01 | The Board Of Trustees Of The Leland Stanford Junior University | Device and method using asymmetric optical resonances |
| US7703328B2 (en) * | 2006-05-18 | 2010-04-27 | Baker Hughes Incorporated | Pressure sensor utilizing a low thermal expansion material |
| US7474823B2 (en) | 2006-10-12 | 2009-01-06 | Hewlett-Packard Development Company, L.P. | Tunable dispersion compensation |
| US7630589B2 (en) | 2007-01-09 | 2009-12-08 | The Board Of Trustees Of The Leland Stanford Junior University | Photonic crystal structure sensor |
| US7545513B2 (en) | 2007-02-05 | 2009-06-09 | Palo Alto Research Center Incorporated | Encoding optical cavity output light |
| US7483144B2 (en) | 2007-03-02 | 2009-01-27 | Honeywell International, Inc. | Apparatus and method for resonant chemical and biological sensing |
| AU2009269103B2 (en) | 2008-07-10 | 2011-10-06 | Northrop Grumman Guidance And Electronics Company, Inc. | Fiber optical acoustic sensor system and method using push-pull two wavelength Fabry Perot sensors |
| US7966887B2 (en) * | 2009-03-26 | 2011-06-28 | General Electric Company | High temperature optical pressure sensor and method of fabrication of the same |
| WO2011008559A1 (en) * | 2009-06-29 | 2011-01-20 | University Of Massachusetts Lowell | Optical fiber pressure sensor with uniform diaphragm and method of fabricating same |
| US8094519B2 (en) * | 2009-08-19 | 2012-01-10 | The United States Of America As Represented By The Secretary Of The Navy | Intensity modulated fiber optic hydrophones |
| JP5819394B2 (ja) | 2010-03-15 | 2015-11-24 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | 光ファイバ適合音響センサ |
-
2011
- 2011-03-14 JP JP2013500138A patent/JP5819394B2/ja active Active
- 2011-03-14 NO NO20121186A patent/NO345445B1/no unknown
- 2011-03-14 CA CA3013169A patent/CA3013169C/en active Active
- 2011-03-14 WO PCT/US2011/028407 patent/WO2011115933A2/en not_active Ceased
- 2011-03-14 EP EP11712086.5A patent/EP2547990B1/en active Active
- 2011-03-14 US US13/047,668 patent/US8542956B2/en active Active
- 2011-03-14 CA CA2793452A patent/CA2793452C/en active Active
- 2011-03-14 CA CA3090851A patent/CA3090851C/en active Active
- 2011-03-14 CN CN201180014330.0A patent/CN103154682B/zh not_active Expired - Fee Related
-
2013
- 2013-08-21 US US13/972,817 patent/US8897610B2/en active Active
-
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- 2014-10-30 US US14/528,854 patent/US9702755B2/en active Active
-
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- 2015-09-30 JP JP2015193344A patent/JP6084672B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011115933A2 (en) | 2011-09-22 |
| US20130340232A1 (en) | 2013-12-26 |
| US9702755B2 (en) | 2017-07-11 |
| US8542956B2 (en) | 2013-09-24 |
| CA3090851C (en) | 2023-03-07 |
| CN103154682A (zh) | 2013-06-12 |
| EP2547990A2 (en) | 2013-01-23 |
| CA3090851A1 (en) | 2011-09-22 |
| JP6084672B2 (ja) | 2017-02-22 |
| US8897610B2 (en) | 2014-11-25 |
| CA2793452C (en) | 2018-09-11 |
| JP2016026300A (ja) | 2016-02-12 |
| EP2547990B1 (en) | 2020-06-17 |
| JP2013522625A (ja) | 2013-06-13 |
| NO20121186A1 (no) | 2012-10-15 |
| CA2793452A1 (en) | 2011-09-22 |
| CN103154682B (zh) | 2015-01-07 |
| US20110268384A1 (en) | 2011-11-03 |
| WO2011115933A3 (en) | 2013-01-10 |
| US20150330830A1 (en) | 2015-11-19 |
| CA3013169A1 (en) | 2011-09-22 |
| JP5819394B2 (ja) | 2015-11-24 |
| NO345445B1 (no) | 2021-02-01 |
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