CA2967135A1 - Microbubble generator device, systems and method to fabricate - Google Patents
Microbubble generator device, systems and method to fabricate Download PDFInfo
- Publication number
- CA2967135A1 CA2967135A1 CA2967135A CA2967135A CA2967135A1 CA 2967135 A1 CA2967135 A1 CA 2967135A1 CA 2967135 A CA2967135 A CA 2967135A CA 2967135 A CA2967135 A CA 2967135A CA 2967135 A1 CA2967135 A1 CA 2967135A1
- Authority
- CA
- Canada
- Prior art keywords
- micro
- fluidic
- microbubble
- heater
- microstructures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 106
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 238000000059 patterning Methods 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 230000001902 propagating effect Effects 0.000 claims description 19
- 229920000642 polymer Polymers 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 129
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 45
- 230000008901 benefit Effects 0.000 description 32
- 239000000463 material Substances 0.000 description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 13
- 229910010271 silicon carbide Inorganic materials 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 12
- 230000001965 increasing effect Effects 0.000 description 11
- 230000009467 reduction Effects 0.000 description 11
- 238000005868 electrolysis reaction Methods 0.000 description 8
- 230000006911 nucleation Effects 0.000 description 8
- 238000010899 nucleation Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- 238000000684 flow cytometry Methods 0.000 description 5
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 125000004122 cyclic group Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000001976 improved effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000013047 polymeric layer Substances 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000001454 recorded image Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 101150051314 tin-10 gene Proteins 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502761—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0647—Handling flowable solids, e.g. microscopic beads, cells, particles
- B01L2200/0652—Sorting or classification of particles or molecules
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0864—Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
- B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
- B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0442—Moving fluids with specific forces or mechanical means specific forces thermal energy, e.g. vaporisation, bubble jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/046—Chemical or electrochemical formation of bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G01N15/149—Optical investigation techniques, e.g. flow cytometry specially adapted for sorting particles, e.g. by their size or optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1006—Investigating individual particles for cytology
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Micromachines (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14193831 | 2014-11-19 | ||
| EP14193831.6 | 2014-11-19 | ||
| PCT/EP2015/077164 WO2016079269A1 (en) | 2014-11-19 | 2015-11-19 | Microbubble generator device, systems and method to fabricate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2967135A1 true CA2967135A1 (en) | 2016-05-26 |
Family
ID=51900825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2967135A Abandoned CA2967135A1 (en) | 2014-11-19 | 2015-11-19 | Microbubble generator device, systems and method to fabricate |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10124338B2 (enExample) |
| EP (1) | EP3221049B1 (enExample) |
| JP (1) | JP6594975B2 (enExample) |
| CN (1) | CN106999933B (enExample) |
| CA (1) | CA2967135A1 (enExample) |
| WO (1) | WO2016079269A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3964285A1 (en) | 2011-09-26 | 2022-03-09 | Thermo Fisher Scientific Geneart GmbH | High efficiency, small volume nucleic acid synthesis |
| WO2014153188A2 (en) | 2013-03-14 | 2014-09-25 | Life Technologies Corporation | High efficiency, small volume nucleic acid synthesis |
| US10407676B2 (en) | 2014-12-09 | 2019-09-10 | Life Technologies Corporation | High efficiency, small volume nucleic acid synthesis |
| EP3558524A1 (en) * | 2016-12-22 | 2019-10-30 | IMEC vzw | A microfluidic device for sorting out droplets |
| WO2018122215A1 (en) * | 2016-12-27 | 2018-07-05 | Imec Vzw | Jet flow power control for object sorting |
| CN109781975B (zh) * | 2017-11-14 | 2022-05-06 | 河南乾坤科技有限公司 | 富集循环稀有细胞的试剂及方法 |
| US20210076991A1 (en) * | 2018-01-16 | 2021-03-18 | The Regents Of The University Of California | In-situ sweat rate monitoring for normalization of sweat analyte concentrations |
| US20210402403A1 (en) * | 2018-11-08 | 2021-12-30 | Katholieke Universiteit Leuven | Screening and sorting of single cells |
| JP7277176B2 (ja) | 2019-02-28 | 2023-05-18 | キヤノン株式会社 | ウルトラファインバブル生成方法、およびウルトラファインバブル生成装置 |
| JP7282548B2 (ja) * | 2019-02-28 | 2023-05-29 | キヤノン株式会社 | ウルトラファインバブル生成方法、およびウルトラファインバブル生成装置 |
| EP3702331A1 (en) | 2019-02-28 | 2020-09-02 | Canon Kabushiki Kaisha | Ultrafine bubble generating method, ultrafine bubble generating apparatus, and ultrafine bubble-containing liquid |
| JP7278801B2 (ja) * | 2019-02-28 | 2023-05-22 | キヤノン株式会社 | ウルトラファインバブル生成装置、及びウルトラファインバブルの製造方法 |
| JP7277179B2 (ja) * | 2019-02-28 | 2023-05-18 | キヤノン株式会社 | ウルトラファインバブル生成装置 |
| JP7277180B2 (ja) * | 2019-02-28 | 2023-05-18 | キヤノン株式会社 | ウルトラファインバブル生成装置およびウルトラファインバブル生成方法 |
| JP7278799B2 (ja) * | 2019-02-28 | 2023-05-22 | キヤノン株式会社 | 微細バブル生成装置、及び微細バブル生成方法 |
| JP7317521B2 (ja) * | 2019-02-28 | 2023-07-31 | キヤノン株式会社 | ウルトラファインバブル生成装置およびウルトラファインバブル生成方法 |
| JP2021069993A (ja) * | 2019-10-31 | 2021-05-06 | キヤノン株式会社 | ウルトラファインバブル生成装置およびその制御方法 |
| JP7433840B2 (ja) | 2019-10-31 | 2024-02-20 | キヤノン株式会社 | ウルトラファインバブル含有液の作製装置、及びウルトラファインバブル含有液の作製方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060128006A1 (en) * | 1999-11-10 | 2006-06-15 | Gerhardt Antimony L | Hydrodynamic capture and release mechanisms for particle manipulation |
| CA2390375A1 (en) * | 1999-11-10 | 2001-05-17 | Massachusetts Institute Of Technology | Cell analysis and sorting apparatus for manipulation of cells |
| US20030116552A1 (en) * | 2001-12-20 | 2003-06-26 | Stmicroelectronics Inc. | Heating element for microfluidic and micromechanical applications |
| US7157274B2 (en) * | 2002-06-24 | 2007-01-02 | Cytonome, Inc. | Method and apparatus for sorting particles |
| TW552200B (en) * | 2002-07-12 | 2003-09-11 | Benq Corp | Fluid injection device and its manufacturing method |
| US20040115830A1 (en) * | 2002-09-25 | 2004-06-17 | Igor Touzov | Components for nano-scale Reactor |
| US7338637B2 (en) * | 2003-01-31 | 2008-03-04 | Hewlett-Packard Development Company, L.P. | Microfluidic device with thin-film electronic devices |
| FR2860249B1 (fr) * | 2003-09-30 | 2005-12-09 | Michel Bruel | Procede de fabrication d'une structure en forme de plaque, en particulier en silicium, application de procede, et structure en forme de plaque, en particulier en silicium |
| US9260693B2 (en) * | 2004-12-03 | 2016-02-16 | Cytonome/St, Llc | Actuation of parallel microfluidic arrays |
| US8383378B2 (en) * | 2005-10-10 | 2013-02-26 | The Regents Of The University Of California | Micro-bubble plate for patterning biological and non-biological materials |
| CN101291729B (zh) * | 2005-10-24 | 2011-08-17 | 横河电机株式会社 | 微型芯片装置 |
| US9995668B2 (en) * | 2006-02-01 | 2018-06-12 | Ecole polytechnique fédérale de Lausanne (EPFL) | Apparatus for manipulating, modifying and characterizing particles in a micro channel |
| JP5059851B2 (ja) * | 2006-05-05 | 2012-10-31 | サイトノーム エスティー リミテッド ライアビリティー カンパニー | 並行マイクロ流体配列の作動 |
| BRPI0813718A2 (pt) * | 2007-07-13 | 2014-12-30 | Univ Leland Stanford Junior | Método e aparelho que utilizam um campo elétrico para ensaios biológicos aperfeiçoados |
| JP2011000079A (ja) | 2009-06-19 | 2011-01-06 | Univ Of Tokyo | 粒子を操作する方法及びマイクロ流体装置 |
| EP2602608B1 (en) * | 2011-12-07 | 2016-09-14 | Imec | Analysis and sorting of biological cells in flow |
| GB2504668C (en) * | 2012-07-26 | 2020-03-04 | Atomjet Ltd | Micro pumps |
| CN103691384B (zh) * | 2013-12-11 | 2016-01-13 | 华南师范大学 | 一种微泡发生器及其制作方法与应用 |
-
2015
- 2015-11-19 CN CN201580062737.9A patent/CN106999933B/zh active Active
- 2015-11-19 WO PCT/EP2015/077164 patent/WO2016079269A1/en not_active Ceased
- 2015-11-19 JP JP2017523327A patent/JP6594975B2/ja not_active Expired - Fee Related
- 2015-11-19 EP EP15798059.0A patent/EP3221049B1/en active Active
- 2015-11-19 CA CA2967135A patent/CA2967135A1/en not_active Abandoned
- 2015-11-19 US US15/526,922 patent/US10124338B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6594975B2 (ja) | 2019-10-23 |
| WO2016079269A1 (en) | 2016-05-26 |
| US10124338B2 (en) | 2018-11-13 |
| JP2018504284A (ja) | 2018-02-15 |
| CN106999933A (zh) | 2017-08-01 |
| CN106999933B (zh) | 2019-10-18 |
| EP3221049B1 (en) | 2019-04-17 |
| EP3221049A1 (en) | 2017-09-27 |
| US20170341078A1 (en) | 2017-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20181017 |
|
| FZDE | Discontinued |
Effective date: 20201204 |