CN106999933B - 微泡产生器装置、系统及其制造方法 - Google Patents

微泡产生器装置、系统及其制造方法 Download PDF

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Publication number
CN106999933B
CN106999933B CN201580062737.9A CN201580062737A CN106999933B CN 106999933 B CN106999933 B CN 106999933B CN 201580062737 A CN201580062737 A CN 201580062737A CN 106999933 B CN106999933 B CN 106999933B
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China
Prior art keywords
microfluidic
microbubble
microheater
microfluidic device
microbubble generator
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English (en)
Chinese (zh)
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CN106999933A (zh
Inventor
刘诚迅
P·波伊曼斯
L·拉哈
B·马吉德
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Interuniversitair Microelektronica Centrum vzw IMEC
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Interuniversitair Microelektronica Centrum vzw IMEC
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502761Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads, for physically stretching molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06Fluid handling related problems
    • B01L2200/0647Handling flowable solids, e.g. microscopic beads, cells, particles
    • B01L2200/0652Sorting or classification of particles or molecules
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • B01L2300/0645Electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0864Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/18Means for temperature control
    • B01L2300/1805Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0442Moving fluids with specific forces or mechanical means specific forces thermal energy, e.g. vaporisation, bubble jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/046Chemical or electrochemical formation of bubbles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/06Valves, specific forms thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/149Optical investigation techniques, e.g. flow cytometry specially adapted for sorting particles, e.g. by their size or optical properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N2015/1006Investigating individual particles for cytology

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CN201580062737.9A 2014-11-19 2015-11-19 微泡产生器装置、系统及其制造方法 Active CN106999933B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP14193831 2014-11-19
EP14193831.6 2014-11-19
PCT/EP2015/077164 WO2016079269A1 (en) 2014-11-19 2015-11-19 Microbubble generator device, systems and method to fabricate

Publications (2)

Publication Number Publication Date
CN106999933A CN106999933A (zh) 2017-08-01
CN106999933B true CN106999933B (zh) 2019-10-18

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CN201580062737.9A Active CN106999933B (zh) 2014-11-19 2015-11-19 微泡产生器装置、系统及其制造方法

Country Status (6)

Country Link
US (1) US10124338B2 (enExample)
EP (1) EP3221049B1 (enExample)
JP (1) JP6594975B2 (enExample)
CN (1) CN106999933B (enExample)
CA (1) CA2967135A1 (enExample)
WO (1) WO2016079269A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LT2768607T (lt) 2011-09-26 2021-12-27 Thermo Fisher Scientific Geneart Gmbh Daugiašulininė plokštelė didelio efektyvumo, mažo tūrio nukleorūgščių sintezei atlikti
WO2014153188A2 (en) 2013-03-14 2014-09-25 Life Technologies Corporation High efficiency, small volume nucleic acid synthesis
LT3557262T (lt) 2014-12-09 2022-11-10 Life Technologies Corporation Didelio efektyvumo nukleorūgščių sintezė mažame tūryje
US11358144B2 (en) 2016-12-22 2022-06-14 Imec Vzw Microfluidic device for sorting out droplets
WO2018122215A1 (en) * 2016-12-27 2018-07-05 Imec Vzw Jet flow power control for object sorting
CN109781975B (zh) * 2017-11-14 2022-05-06 河南乾坤科技有限公司 富集循环稀有细胞的试剂及方法
US20210076991A1 (en) * 2018-01-16 2021-03-18 The Regents Of The University Of California In-situ sweat rate monitoring for normalization of sweat analyte concentrations
WO2020094848A1 (en) * 2018-11-08 2020-05-14 Katholieke Universiteit Leuven Screening and sorting of single cells
JP7277180B2 (ja) * 2019-02-28 2023-05-18 キヤノン株式会社 ウルトラファインバブル生成装置およびウルトラファインバブル生成方法
JP7282548B2 (ja) * 2019-02-28 2023-05-29 キヤノン株式会社 ウルトラファインバブル生成方法、およびウルトラファインバブル生成装置
US11426996B2 (en) 2019-02-28 2022-08-30 Canon Kabushiki Kaisha Ultrafine bubble generating method, ultrafine bubble generating apparatus, and ultrafine bubble-containing liquid
JP7278799B2 (ja) * 2019-02-28 2023-05-22 キヤノン株式会社 微細バブル生成装置、及び微細バブル生成方法
JP7278801B2 (ja) * 2019-02-28 2023-05-22 キヤノン株式会社 ウルトラファインバブル生成装置、及びウルトラファインバブルの製造方法
JP7277176B2 (ja) 2019-02-28 2023-05-18 キヤノン株式会社 ウルトラファインバブル生成方法、およびウルトラファインバブル生成装置
JP7277179B2 (ja) * 2019-02-28 2023-05-18 キヤノン株式会社 ウルトラファインバブル生成装置
JP7317521B2 (ja) * 2019-02-28 2023-07-31 キヤノン株式会社 ウルトラファインバブル生成装置およびウルトラファインバブル生成方法
JP2021069993A (ja) * 2019-10-31 2021-05-06 キヤノン株式会社 ウルトラファインバブル生成装置およびその制御方法
JP7433840B2 (ja) 2019-10-31 2024-02-20 キヤノン株式会社 ウルトラファインバブル含有液の作製装置、及びウルトラファインバブル含有液の作製方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060128006A1 (en) * 1999-11-10 2006-06-15 Gerhardt Antimony L Hydrodynamic capture and release mechanisms for particle manipulation
CN1883031A (zh) * 2003-09-30 2006-12-20 特雷西特技术公司 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构
CN101360817A (zh) * 2005-10-10 2009-02-04 加州大学评议会 使生物材料和非生物材料形成图案用的微泡板
WO2010147078A1 (ja) * 2009-06-19 2010-12-23 国立大学法人東京大学 粒子を操作する方法及びマイクロ流体装置
CN103691384A (zh) * 2013-12-11 2014-04-02 华南师范大学 一种微泡发生器及其制作方法与应用

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1236032A2 (en) * 1999-11-10 2002-09-04 Massachusetts Institute of Technology Cell analysis and sorting apparatus for manipulation of cells
US20030116552A1 (en) * 2001-12-20 2003-06-26 Stmicroelectronics Inc. Heating element for microfluidic and micromechanical applications
US7157274B2 (en) * 2002-06-24 2007-01-02 Cytonome, Inc. Method and apparatus for sorting particles
TW552200B (en) * 2002-07-12 2003-09-11 Benq Corp Fluid injection device and its manufacturing method
US20040115830A1 (en) * 2002-09-25 2004-06-17 Igor Touzov Components for nano-scale Reactor
US7338637B2 (en) * 2003-01-31 2008-03-04 Hewlett-Packard Development Company, L.P. Microfluidic device with thin-film electronic devices
US9260693B2 (en) * 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
CN101291729B (zh) * 2005-10-24 2011-08-17 横河电机株式会社 微型芯片装置
EP1984723B1 (en) * 2006-02-01 2019-05-15 Ecole Polytechnique Federale de Lausanne (EPFL) Impedance measurement device for characterizing particles in a micro channel
KR20090024691A (ko) * 2006-05-05 2009-03-09 사이토놈, 인크. 평행한 미세유체 어레이의 작동기
JP2010533840A (ja) * 2007-07-13 2010-10-28 ザ ボード オブ トラスティーズ オブ ザ リランド スタンフォード ジュニア ユニヴァーシティ 改善された生物学的アッセイのための電場を用いる方法および器具
EP2602608B1 (en) * 2011-12-07 2016-09-14 Imec Analysis and sorting of biological cells in flow
GB2504668C (en) * 2012-07-26 2020-03-04 Atomjet Ltd Micro pumps

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060128006A1 (en) * 1999-11-10 2006-06-15 Gerhardt Antimony L Hydrodynamic capture and release mechanisms for particle manipulation
CN1883031A (zh) * 2003-09-30 2006-12-20 特雷西特技术公司 制造片形结构的方法、特别是由硅制造片形结构的方法、所述方法的应用、和由此制备的片形结构、特别是由硅制造的片形结构
CN101360817A (zh) * 2005-10-10 2009-02-04 加州大学评议会 使生物材料和非生物材料形成图案用的微泡板
WO2010147078A1 (ja) * 2009-06-19 2010-12-23 国立大学法人東京大学 粒子を操作する方法及びマイクロ流体装置
CN103691384A (zh) * 2013-12-11 2014-04-02 华南师范大学 一种微泡发生器及其制作方法与应用

Also Published As

Publication number Publication date
US10124338B2 (en) 2018-11-13
EP3221049A1 (en) 2017-09-27
EP3221049B1 (en) 2019-04-17
JP2018504284A (ja) 2018-02-15
CN106999933A (zh) 2017-08-01
CA2967135A1 (en) 2016-05-26
JP6594975B2 (ja) 2019-10-23
WO2016079269A1 (en) 2016-05-26
US20170341078A1 (en) 2017-11-30

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