CA2858457C - Mass spectrometer vacuum interface method and apparatus - Google Patents
Mass spectrometer vacuum interface method and apparatus Download PDFInfo
- Publication number
- CA2858457C CA2858457C CA2858457A CA2858457A CA2858457C CA 2858457 C CA2858457 C CA 2858457C CA 2858457 A CA2858457 A CA 2858457A CA 2858457 A CA2858457 A CA 2858457A CA 2858457 C CA2858457 C CA 2858457C
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- skimmer
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- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0495—Vacuum locks; Valves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1121290.9A GB2498173C (en) | 2011-12-12 | 2011-12-12 | Mass spectrometer vacuum interface method and apparatus |
| GB1121290.9 | 2011-12-12 | ||
| PCT/EP2012/075301 WO2013087731A1 (en) | 2011-12-12 | 2012-12-12 | Mass spectrometer vacuum interface method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2858457A1 CA2858457A1 (en) | 2013-06-20 |
| CA2858457C true CA2858457C (en) | 2018-06-12 |
Family
ID=45560285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2858457A Active CA2858457C (en) | 2011-12-12 | 2012-12-12 | Mass spectrometer vacuum interface method and apparatus |
Country Status (8)
| Country | Link |
|---|---|
| US (6) | US9012839B2 (cg-RX-API-DMAC7.html) |
| JP (2) | JP6046740B2 (cg-RX-API-DMAC7.html) |
| CN (2) | CN107068534B (cg-RX-API-DMAC7.html) |
| AU (1) | AU2012351700C1 (cg-RX-API-DMAC7.html) |
| CA (1) | CA2858457C (cg-RX-API-DMAC7.html) |
| DE (1) | DE112012005173B4 (cg-RX-API-DMAC7.html) |
| GB (1) | GB2498173C (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013087731A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2884457A1 (en) * | 2012-09-13 | 2014-03-20 | University Of Maine System Board Of Trustees | Radio-frequency ionization in mass spectrometry |
| CN104637773B (zh) * | 2015-02-16 | 2017-03-01 | 江苏天瑞仪器股份有限公司 | 质谱仪一级真空结构 |
| US10692692B2 (en) * | 2015-05-27 | 2020-06-23 | Kla-Tencor Corporation | System and method for providing a clean environment in an electron-optical system |
| GB2544959B (en) * | 2015-09-17 | 2019-06-05 | Thermo Fisher Scient Bremen Gmbh | Mass spectrometer |
| DE102016113771B4 (de) | 2016-07-26 | 2019-11-07 | Bundesrepublik Deutschland, Vertreten Durch Den Bundesminister Für Wirtschaft Und Energie, Dieser Vertreten Durch Den Präsidenten Der Bundesanstalt Für Materialforschung Und -Prüfung (Bam) | Analysevorrichtung für gasförmige Proben und Verfahren zum Nachweis von Analyten in einem Gas |
| GB2560160B (en) * | 2017-02-23 | 2021-08-18 | Thermo Fisher Scient Bremen Gmbh | Methods in mass spectrometry using collision gas as ion source |
| CN108010829B (zh) * | 2017-11-14 | 2019-12-03 | 大连民族大学 | 一种激光焊接中羽辉微粒子的质谱分析装置 |
| GB2572819B (en) * | 2018-04-13 | 2021-05-19 | Thermo Fisher Scient Bremen Gmbh | Method and apparatus for operating a vacuum interface of a mass spectrometer |
| JP6885510B2 (ja) * | 2018-04-20 | 2021-06-16 | 株式会社島津製作所 | スキマーコーン及び誘導結合プラズマ質量分析装置 |
| CN110690100B (zh) * | 2019-10-31 | 2025-01-28 | 杭州谱育科技发展有限公司 | 一种电感耦合等离子质谱接口装置 |
| US11145501B2 (en) * | 2020-02-20 | 2021-10-12 | Perkinelmer, Inc. | Thermal management for instruments including a plasma source |
| CN112557488A (zh) * | 2020-12-09 | 2021-03-26 | 上海交通大学 | 一种一体式分子束取样接口 |
| KR20230123998A (ko) | 2020-12-23 | 2023-08-24 | 엠케이에스 인스트루먼츠 인코포레이티드 | 질량 분석법을 사용하는 라디칼 입자 농도 모니터링 |
| CN112924525A (zh) * | 2021-01-29 | 2021-06-08 | 厦门大学 | 一种富勒烯形成机理研究的原位质谱分析装置及方法 |
| CN222462822U (zh) | 2021-12-21 | 2025-02-11 | 塞莫费雪科学（不来梅）有限公司 | 截取锥、等离子体接口和质谱仪 |
| CN115421180A (zh) * | 2022-10-09 | 2022-12-02 | 中国科学院国家空间科学中心 | 一种降低进入定标载荷离子通量的系统及方法 |
| WO2025072067A1 (en) * | 2023-09-26 | 2025-04-03 | Inficon, Inc. | Method and assembly for creating a molecular beam |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4863491A (en) * | 1988-05-27 | 1989-09-05 | Hewlett-Packard | Interface for liquid chromatography-mass spectrometry systems |
| JPH0340748U (cg-RX-API-DMAC7.html) * | 1989-08-31 | 1991-04-18 | ||
| US6002130A (en) * | 1991-09-12 | 1999-12-14 | Hitachi, Ltd. | Mass spectrometry and mass spectrometer |
| CA2116821C (en) * | 1993-03-05 | 2003-12-23 | Stephen Esler Anderson | Improvements in plasma mass spectrometry |
| JPH07240169A (ja) * | 1994-02-28 | 1995-09-12 | Jeol Ltd | 誘導結合プラズマ質量分析装置 |
| DE4433807A1 (de) * | 1994-09-22 | 1996-03-28 | Finnigan Mat Gmbh | Massenspektrometer, insbesondere ICP-MS |
| GB9525507D0 (en) | 1995-12-14 | 1996-02-14 | Fisons Plc | Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source |
| JP3492081B2 (ja) * | 1996-05-15 | 2004-02-03 | セイコーインスツルメンツ株式会社 | プラズマイオン源質量分析装置 |
| JPH10283984A (ja) * | 1997-04-01 | 1998-10-23 | Yokogawa Analytical Syst Kk | 飛行時間型質量分析装置 |
| JP3521218B2 (ja) * | 1997-07-04 | 2004-04-19 | 独立行政法人産業技術総合研究所 | 金属−絶縁性セラミック複合サンプラー及びスキマー |
| GB9820210D0 (en) | 1998-09-16 | 1998-11-11 | Vg Elemental Limited | Means for removing unwanted ions from an ion transport system and mass spectrometer |
| JP4585069B2 (ja) * | 1999-12-27 | 2010-11-24 | アジレント・テクノロジーズ・インク | 誘導結合プラズマ質量分析装置及び方法 |
| JP4164027B2 (ja) * | 2001-09-10 | 2008-10-08 | ヴァリアン オーストラリア ピーティーワイ．エルティーディー． | 元素の質量分析のための装置および方法 |
| US7053367B2 (en) * | 2001-11-07 | 2006-05-30 | Hitachi High-Technologies Corporation | Mass spectrometer |
| AU2002950505A0 (en) * | 2002-07-31 | 2002-09-12 | Varian Australia Pty Ltd | Mass spectrometry apparatus and method |
| JP4636800B2 (ja) | 2002-03-08 | 2011-02-23 | ヴァリアン オーストラリア ピーティーワイ．エルティーディー． | プラズマ質量分析計 |
| US6872940B1 (en) * | 2002-05-31 | 2005-03-29 | Thermo Finnigan Llc | Focusing ions using gas dynamics |
| US7009176B2 (en) * | 2004-03-08 | 2006-03-07 | Thermo Finnigan Llc | Titanium ion transfer components for use in mass spectrometry |
| US7259371B2 (en) | 2005-01-10 | 2007-08-21 | Applera Corporation | Method and apparatus for improved sensitivity in a mass spectrometer |
| EP1865533B1 (en) * | 2006-06-08 | 2014-09-17 | Microsaic Systems PLC | Microengineerd vacuum interface for an ionization system |
| TWI385699B (zh) * | 2007-05-22 | 2013-02-11 | Semequip Inc | 用於自一離子源萃取離子之離子萃取系統 |
| JP5308641B2 (ja) * | 2007-08-09 | 2013-10-09 | アジレント・テクノロジーズ・インク | プラズマ質量分析装置 |
| WO2009147894A1 (ja) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| US7915580B2 (en) | 2008-10-15 | 2011-03-29 | Thermo Finnigan Llc | Electro-dynamic or electro-static lens coupled to a stacked ring ion guide |
| US9105457B2 (en) * | 2010-02-24 | 2015-08-11 | Perkinelmer Health Sciences, Inc. | Cone-shaped orifice arrangement for inductively coupled plasma sample introduction system |
| GB2498174B (en) * | 2011-12-12 | 2016-06-29 | Thermo Fisher Scient (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| CN104024606A (zh) | 2011-12-28 | 2014-09-03 | 沃尔沃建造设备有限公司 | 施工机械的发动机控制方法 |
-
2011
- 2011-12-12 GB GB1121290.9A patent/GB2498173C/en active Active
-
2012
- 2012-12-12 CN CN201710265943.0A patent/CN107068534B/zh active Active
- 2012-12-12 US US14/364,616 patent/US9012839B2/en active Active
- 2012-12-12 JP JP2014546497A patent/JP6046740B2/ja active Active
- 2012-12-12 CN CN201280061124.XA patent/CN103999187B/zh active Active
- 2012-12-12 WO PCT/EP2012/075301 patent/WO2013087731A1/en not_active Ceased
- 2012-12-12 CA CA2858457A patent/CA2858457C/en active Active
- 2012-12-12 DE DE112012005173.4T patent/DE112012005173B4/de active Active
- 2012-12-12 AU AU2012351700A patent/AU2012351700C1/en active Active
-
2015
- 2015-04-20 US US14/691,415 patent/US9640379B2/en active Active
-
2016
- 2016-10-06 US US15/287,385 patent/US9741549B2/en active Active
- 2016-11-17 JP JP2016223987A patent/JP6279057B2/ja active Active
-
2017
- 2017-07-17 US US15/651,940 patent/US10283338B2/en active Active
-
2019
- 2019-04-19 US US16/389,749 patent/US10475632B2/en active Active
- 2019-10-15 US US16/601,869 patent/US10991561B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10475632B2 (en) | 2019-11-12 |
| JP2015502022A (ja) | 2015-01-19 |
| US20140339418A1 (en) | 2014-11-20 |
| GB2498173C (en) | 2018-06-27 |
| GB2498173B (en) | 2016-06-29 |
| AU2012351700C1 (en) | 2017-03-23 |
| US9741549B2 (en) | 2017-08-22 |
| GB2498173A (en) | 2013-07-10 |
| US9640379B2 (en) | 2017-05-02 |
| US10283338B2 (en) | 2019-05-07 |
| JP2017084790A (ja) | 2017-05-18 |
| CN107068534B (zh) | 2019-01-08 |
| US20190252174A1 (en) | 2019-08-15 |
| WO2013087731A1 (en) | 2013-06-20 |
| US10991561B2 (en) | 2021-04-27 |
| US20200043713A1 (en) | 2020-02-06 |
| AU2012351700A1 (en) | 2014-07-03 |
| US9012839B2 (en) | 2015-04-21 |
| AU2012351700B2 (en) | 2016-11-03 |
| CN107068534A (zh) | 2017-08-18 |
| US20150228466A1 (en) | 2015-08-13 |
| DE112012005173B4 (de) | 2021-04-29 |
| GB201121290D0 (en) | 2012-01-25 |
| US20170316927A1 (en) | 2017-11-02 |
| CN103999187A (zh) | 2014-08-20 |
| CN103999187B (zh) | 2017-05-17 |
| JP6046740B2 (ja) | 2016-12-21 |
| DE112012005173T5 (de) | 2014-08-28 |
| CA2858457A1 (en) | 2013-06-20 |
| JP6279057B2 (ja) | 2018-02-14 |
| US20170025261A1 (en) | 2017-01-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20141107 |