CA2798370C - Surface sensing device with optical monitoring system - Google Patents
Surface sensing device with optical monitoring system Download PDFInfo
- Publication number
- CA2798370C CA2798370C CA2798370A CA2798370A CA2798370C CA 2798370 C CA2798370 C CA 2798370C CA 2798370 A CA2798370 A CA 2798370A CA 2798370 A CA2798370 A CA 2798370A CA 2798370 C CA2798370 C CA 2798370C
- Authority
- CA
- Canada
- Prior art keywords
- stylus
- optical
- sensing device
- surface sensing
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 161
- 238000012544 monitoring process Methods 0.000 title claims abstract description 53
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- 239000000523 sample Substances 0.000 claims description 79
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- 238000012876 topography Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
- G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10162017.7 | 2010-05-05 | ||
| EP10162017A EP2385339A1 (en) | 2010-05-05 | 2010-05-05 | Surface sensing device with optical monitoring system |
| PCT/EP2011/056689 WO2011138206A1 (en) | 2010-05-05 | 2011-04-27 | Surface sensing device with optical monitoring system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2798370A1 CA2798370A1 (en) | 2011-11-10 |
| CA2798370C true CA2798370C (en) | 2015-06-16 |
Family
ID=42316037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2798370A Expired - Fee Related CA2798370C (en) | 2010-05-05 | 2011-04-27 | Surface sensing device with optical monitoring system |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US9316473B2 (https=) |
| EP (2) | EP2385339A1 (https=) |
| JP (1) | JP5629818B2 (https=) |
| KR (1) | KR101495670B1 (https=) |
| CN (1) | CN102869949B (https=) |
| AU (1) | AU2011250101B2 (https=) |
| BR (1) | BR112012028084B1 (https=) |
| CA (1) | CA2798370C (https=) |
| WO (1) | WO2011138206A1 (https=) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2194357A1 (de) * | 2008-12-03 | 2010-06-09 | Leica Geosystems AG | Optisches Sensorelement für eine Messmaschine, und messmaschinenseitiges Kupplungselement hierfür |
| WO2010109975A1 (ja) * | 2009-03-24 | 2010-09-30 | コニカミノルタオプト株式会社 | 形状測定装置 |
| DE102012003223A1 (de) * | 2012-02-20 | 2013-08-22 | Carl Zeiss 3D Automation Gmbh | Kugel-Schaft-Verbindung |
| US8786866B2 (en) * | 2012-03-02 | 2014-07-22 | Baker Hughes Incorporated | Apparatus and method for determining inner profiles of hollow devices |
| US8910391B2 (en) * | 2013-01-24 | 2014-12-16 | Faro Technologies, Inc. | Non-articulated portable CMM |
| US10156488B2 (en) * | 2013-08-29 | 2018-12-18 | Corning Incorporated | Prism-coupling systems and methods for characterizing curved parts |
| DE102013015237A1 (de) * | 2013-09-13 | 2015-03-19 | Blum-Novotest Gmbh | Rauheits-Messinstrument zum Einsatz in einer Werkzeugmaschine und Verfahren zur Rauheitsmessung in einer Werkzeugmaschine |
| JP6065875B2 (ja) * | 2014-06-02 | 2017-01-25 | 横河電機株式会社 | 偏光検査装置 |
| US9919958B2 (en) | 2014-07-17 | 2018-03-20 | Corning Incorporated | Glass sheet and system and method for making glass sheet |
| CN106716071B (zh) * | 2014-09-08 | 2021-08-24 | 皇家飞利浦有限公司 | 利用光学形状感测的对表面接触的检测 |
| US9791262B2 (en) * | 2015-12-17 | 2017-10-17 | Mitutoyo Corporation | Measurement device with multiplexed position signals |
| US9803972B2 (en) | 2015-12-17 | 2017-10-31 | Mitutoyo Corporation | Optical configuration for measurement device |
| US10281320B2 (en) * | 2015-12-29 | 2019-05-07 | Bio-Rad Laboratories, Inc. | Optical detection system with light sampling |
| FR3048077B1 (fr) * | 2016-02-23 | 2020-05-22 | Mesure-Systems3D | Dispositif de controle tridimensionnel sans contact d'une piece creuse a surface interne de revolution, procede, produit programme d'ordinateur et medium de stockage correspondants |
| ITUB20161099A1 (it) * | 2016-02-26 | 2017-08-26 | Marposs Spa | Dispositivo inseguitore per la misura del profilo di un pezzo meccanico |
| CN105783772B (zh) * | 2016-03-07 | 2018-06-26 | 合肥工业大学 | 单传感器式三维微纳米接触触发测量探头 |
| JP6819681B2 (ja) * | 2016-06-08 | 2021-01-27 | ソニー株式会社 | 撮像制御装置および方法、並びに車両 |
| US10101141B2 (en) | 2016-12-07 | 2018-10-16 | Mitutoyo Corporation | Trigger counter for measurement device with count values stored in flash memory |
| US10006757B1 (en) * | 2017-06-16 | 2018-06-26 | Mitutoyo Corporation | Optical configuration for measurement device using emitter material configuration with quadrant photodetectors |
| US10473451B2 (en) * | 2017-08-07 | 2019-11-12 | Apre Instruments, Inc. | Measuring the position of objects in space |
| CN109637064B (zh) * | 2019-01-29 | 2021-06-11 | 深圳市汉明电子有限公司 | 物体变形预警监测系统和方法 |
| KR102143388B1 (ko) * | 2019-05-29 | 2020-08-11 | 한국산업기술시험원 | 레일 하부에 지지대가 구성된 측정 장치 및 방법 |
| KR102175321B1 (ko) * | 2020-05-25 | 2020-11-06 | 주식회사 대연 | 측정기용 탐침 |
| EP3954966A1 (en) * | 2020-08-14 | 2022-02-16 | Hexagon Technology Center GmbH | Rotary table compensation |
| EP4241095A4 (en) * | 2020-11-05 | 2024-07-24 | Weinert Industries AG | MEASURING DEVICE |
| JP7530272B2 (ja) * | 2020-11-06 | 2024-08-07 | 株式会社ミツトヨ | 形状測定装置および異常検出方法 |
| KR102446916B1 (ko) * | 2022-06-03 | 2022-09-23 | 주식회사 보나 | 광융착 광파이버를 이용한 광 산란 기반의 광학식 전자펜 |
| KR102486202B1 (ko) * | 2022-09-15 | 2023-01-10 | 주식회사 보나 | 광 산란제 펜팁을 구비한 광학식 전자펜 |
| JP2024140995A (ja) * | 2023-03-28 | 2024-10-10 | 株式会社東京精密 | プローブ及び形状測定装置 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3164663A (en) * | 1960-10-27 | 1965-01-05 | Beckman Instruments Inc | Probe for colorimetric measurement |
| US3448277A (en) * | 1967-01-16 | 1969-06-03 | Crete Charles A | Photoelectric absorption measurer having plunger for enclosing variable beam path lengths |
| ATE81958T1 (de) * | 1987-11-18 | 1992-11-15 | Vax Appliances Australia | Saugreinigungskopf. |
| GB8803847D0 (en) | 1988-02-18 | 1988-03-16 | Renishaw Plc | Mounting for surface-sensing device |
| GB8815984D0 (en) * | 1988-07-05 | 1988-08-10 | Univ Brunel | Probes |
| JPH0224075A (ja) | 1988-07-13 | 1990-01-26 | Mitsubishi Electric Corp | 産業用ロボット |
| DE3920716C1 (https=) * | 1989-06-24 | 1990-11-29 | Wild Leitz Gmbh, 6330 Wetzlar, De | |
| EP0415579A1 (en) | 1989-08-30 | 1991-03-06 | Renishaw plc | Touch probe |
| US5390424A (en) * | 1990-01-25 | 1995-02-21 | Renishaw Metrology Limited | Analogue probe |
| JPH0587548A (ja) | 1991-05-01 | 1993-04-06 | Hitachi Electron Eng Co Ltd | 姿勢角検出装置 |
| US5327657A (en) * | 1991-07-11 | 1994-07-12 | Renishaw Metrology Ltd. | Touch probe |
| DE4244240B4 (de) * | 1992-12-24 | 2005-07-07 | Carl Zeiss Industrielle Messtechnik Gmbh | Taststift |
| US6112423A (en) * | 1999-01-15 | 2000-09-05 | Brown & Sharpe Manufacturing Co. | Apparatus and method for calibrating a probe assembly of a measuring machine |
| GB9907644D0 (en) * | 1999-04-06 | 1999-05-26 | Renishaw Plc | Surface sensing device with optical sensor |
| JP4660779B2 (ja) * | 2000-08-18 | 2011-03-30 | 学校法人 中央大学 | 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法 |
| DE10108774A1 (de) * | 2001-02-23 | 2002-09-05 | Zeiss Carl | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
| JP4117600B2 (ja) * | 2002-06-05 | 2008-07-16 | 財団法人大阪産業振興機構 | 光放射圧によりトラップした微粒子プローブを用いた測定装置及び方法 |
| FR2884910B1 (fr) * | 2005-04-20 | 2007-07-13 | Romer Sa | Appareil de mesure tridimensionnelle a bras articules comportant une pluralite d'axes d'articulation |
| GB0508388D0 (en) * | 2005-04-26 | 2005-06-01 | Renishaw Plc | Surface sensing device with optical sensor |
| GB0508395D0 (en) * | 2005-04-26 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
| DE602007005778D1 (de) * | 2007-04-18 | 2010-05-20 | Hexagon Metrology Ab | Tastkopf mit konstanter Rastergeschwindigkeit |
| US20110080588A1 (en) * | 2009-10-02 | 2011-04-07 | Industrial Optical Measurement Systems | Non-contact laser inspection system |
-
2010
- 2010-05-05 EP EP10162017A patent/EP2385339A1/en not_active Withdrawn
-
2011
- 2011-04-27 US US13/643,463 patent/US9316473B2/en active Active
- 2011-04-27 CN CN201180022447.3A patent/CN102869949B/zh active Active
- 2011-04-27 CA CA2798370A patent/CA2798370C/en not_active Expired - Fee Related
- 2011-04-27 KR KR1020127031904A patent/KR101495670B1/ko not_active Expired - Fee Related
- 2011-04-27 WO PCT/EP2011/056689 patent/WO2011138206A1/en not_active Ceased
- 2011-04-27 AU AU2011250101A patent/AU2011250101B2/en not_active Ceased
- 2011-04-27 EP EP11716911.0A patent/EP2567185B1/en active Active
- 2011-04-27 BR BR112012028084A patent/BR112012028084B1/pt not_active IP Right Cessation
- 2011-04-27 JP JP2013508436A patent/JP5629818B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN102869949A (zh) | 2013-01-09 |
| CN102869949B (zh) | 2017-02-15 |
| JP5629818B2 (ja) | 2014-11-26 |
| BR112012028084A2 (pt) | 2016-08-02 |
| WO2011138206A1 (en) | 2011-11-10 |
| EP2385339A1 (en) | 2011-11-09 |
| BR112012028084B1 (pt) | 2020-02-04 |
| AU2011250101A1 (en) | 2012-10-25 |
| AU2011250101B2 (en) | 2013-08-15 |
| KR101495670B1 (ko) | 2015-02-25 |
| CA2798370A1 (en) | 2011-11-10 |
| EP2567185B1 (en) | 2021-06-09 |
| EP2567185A1 (en) | 2013-03-13 |
| KR20130016358A (ko) | 2013-02-14 |
| US9316473B2 (en) | 2016-04-19 |
| US20130050701A1 (en) | 2013-02-28 |
| JP2013528794A (ja) | 2013-07-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20121105 |
|
| MKLA | Lapsed |
Effective date: 20210427 |